"Modeling and Analysis of Semiconductor Manufacturing Systems with Degraded ..."

MuDer Jeng, Xiaolan Xie (2001)

> Home

Details and statistics

DOI: 10.1109/ROBOT.2001.932529

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-22

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/icra/JengX01
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/icra/JengX01
MuDer Jeng, Xiaolan Xie:
Modeling and Analysis of Semiconductor Manufacturing Systems with Degraded Behaviors Using Petri Nets and Siphons. ICRA 2001: 52-57

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.