"Micro-/Nano-Integration for MEMS based on nano-robotic assembly."

Thomas Wich, Manuel Mikczinski, Sergej Fatikow (2010)

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DOI: —

access: closed

type: Conference or Workshop Paper

metadata version: 2021-08-11

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  dblp key:
  - conf/isr/WichWMFF10
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  - https://dblp.org/rec/conf/isr/WichWMFF10
Thomas Wich, Manuel Mikczinski, Sergej Fatikow:
Micro-/Nano-Integration for MEMS based on nano-robotic assembly. ISR/ROBOTIK 2010: 1-8

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