"Reduced-order modeling of thermally induced deformations on reticles for ..."

Can Bikcora, Siep Weiland, Wim M. J. Coene (2013)

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DOI: 10.1109/ACC.2013.6580705

access: closed

type: Conference or Workshop Paper

metadata version: 2021-08-08

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Can Bikcora, Siep Weiland, Wim M. J. Coene:
Reduced-order modeling of thermally induced deformations on reticles for extreme ultraviolet lithography. ACC 2013: 5542-5549

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