"On the differential flatness and control of electrostatically actuated MEMS."

Guchuan Zhu, Jean Lévine, Laurent Praly (2005)

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DOI: 10.1109/ACC.2005.1470341

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-07

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Guchuan Zhu, Jean Lévine, Laurent Praly:
On the differential flatness and control of electrostatically actuated MEMS. ACC 2005: 2493-2498

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