"Coupling-aware Dummy Metal Insertion for Lithography."

Liang Deng et al. (2007)

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DOI: 10.1109/ASPDAC.2007.357785

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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Liang Deng, Martin D. F. Wong, Kai-Yuan Chao, Hua Xiang:
Coupling-aware Dummy Metal Insertion for Lithography. ASP-DAC 2007: 13-18

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