"Predictive formulae for OPC with applications to lithography-friendly routing."

Tai-Chen Chen, Guang-Wan Liao, Yao-Wen Chang (2008)

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DOI: 10.1145/1391469.1391599

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-06

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Tai-Chen Chen, Guang-Wan Liao, Yao-Wen Chang:
Predictive formulae for OPC with applications to lithography-friendly routing. DAC 2008: 510-515

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