"Automatic Inspection for Wafer Defect Pattern Recognition with ..."

Katherine Shu-Min Li et al. (2021)

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DOI: 10.1109/ETS50041.2021.9465457

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-02

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  - conf/ets/LiCCLWHTCHCLH21
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Katherine Shu-Min Li, Leon Li-Yang Chen, Ken Chau-Cheung Cheng, Peter Yi-Yu Liao, Sying-Jyan Wang, Andrew Yi-Ann Huang, Nova Cheng-Yen Tsai, Leon Chou, Gus Chang-Hung Han, Jwu E. Chen, Hsing-Chung Liang, Chun-Lung Hsu:
Automatic Inspection for Wafer Defect Pattern Recognition with Unsupervised Clustering. ETS 2021: 1-2

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