"Microrobot System for Automatic Nanohandling inside a Scanning Electron ..."

Sergej Fatikow et al. (2006)

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DOI: 10.1109/ROBOT.2006.1641905

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-22

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Sergej Fatikow, Thomas Wich, Helge Hülsen, Torsten Sievers, Marco Jähnisch:
Microrobot System for Automatic Nanohandling inside a Scanning Electron Microscope. ICRA 2006: 1402-1407

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