"Modeling, Scheduling, and Prediction for Wafer Fabrication: Queueing ..."

An-Chih Huang et al. (2002)

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DOI: 10.1109/ROBOT.2002.1013717

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-22

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An-Chih Huang, Li-Chen Fu, Ming-Hung Lin, Shun-Yu Lin:
Modeling, Scheduling, and Prediction for Wafer Fabrication: Queueing Colored Petri-Net and GA Based Approach. ICRA 2002: 3187-3192

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