"Modeling and Performance Evaluation of a Controlled IC Fab using ..."

Chung-Hsien Kuo, Han-Pang Huang (2000)

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DOI: 10.1109/ROBOT.2000.846353

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-22

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Chung-Hsien Kuo, Han-Pang Huang:
Modeling and Performance Evaluation of a Controlled IC Fab using Distributed Colored Timed Petri Net. ICRA 2000: 2191-2196

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