"Novel Oxide Top-Off Process Enabling Reliable PC-CA TDDB on IO Devices ..."

Tian Shen et al. (2019)

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DOI: 10.1109/IRPS.2019.8720542

access: closed

type: Conference or Workshop Paper

metadata version: 2019-05-31

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Tian Shen, Abu Naser Zainuddin, Purushothaman Srinivasan, Zakariae Chbili, Kai Zhao, Patrick Justison:
Novel Oxide Top-Off Process Enabling Reliable PC-CA TDDB on IO Devices with Self Aligned Contact. IRPS 2019: 1-5

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