"Micromachined inductor integrated with a patterned soft magnetic thin film."

Yu-Che Huang, Ben-Hwa Jang, Weileun Fang (2013)

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DOI: 10.1109/NEMS.2013.6559913

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Yu-Che Huang, Ben-Hwa Jang, Weileun Fang:
Micromachined inductor integrated with a patterned soft magnetic thin film. NEMS 2013: 1096-1099

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