"High sensitivity capacitive humidity sensor with a novel polyimide design ..."

Ji-Hong Kim et al. (2009)

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DOI: 10.1109/NEMS.2009.5068676

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-23

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Ji-Hong Kim, Sung-Min Hong, Jang-Sub Lee, Byung-Moo Moon, Kunnyun Kim:
High sensitivity capacitive humidity sensor with a novel polyimide design fabricated by MEMS technology. NEMS 2009: 703-706

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