"Novel fabrication method for high-aspect-ratio suspended parylene structures."

Wen-Cheng Kuo, Cheng-Wei Chen (2011)

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DOI: 10.1109/NEMS.2011.6017423

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-17

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Wen-Cheng Kuo, Cheng-Wei Chen:
Novel fabrication method for high-aspect-ratio suspended parylene structures. NEMS 2011: 585-588

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