"A MEMS accelerometer with double-sided symmetrical folded-beams on single ..."

Wei Li et al. (2017)

> Home

Details and statistics

DOI: 10.1109/NEMS.2017.8017004

access: closed

type: Conference or Workshop Paper

metadata version: 2025-01-08

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/nems/LiZWLWC17
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/nems/LiZWLWC17
Wei Li, Xiaofeng Zhou, Jian Wu, Youling Lin, Ze Wang, Lu feng Che:
A MEMS accelerometer with double-sided symmetrical folded-beams on single wafer. NEMS 2017: 194-197

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.