"Design and Optimization of Glass Frit Package Structure for Micro Pressure ..."

Lingyun Wang et al. (2021)

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DOI: 10.1109/NEMS51815.2021.9451300

access: closed

type: Conference or Workshop Paper

metadata version: 2021-06-28

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Lingyun Wang, Daner Chen, Heng Xiong, Yifang Liu:
Design and Optimization of Glass Frit Package Structure for Micro Pressure Switch. NEMS 2021: 840-844

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