"FEM Modeling of Thermal Aspect of Dielectric Inserted Under Source & ..."

Vivek Kumar et al. (2022)

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DOI: 10.1007/978-3-031-21514-8_1

access: closed

type: Conference or Workshop Paper

metadata version: 2022-12-25

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Vivek Kumar, Jyoti Patel, Arnab Datta, Sudeb Dasgupta:
FEM Modeling of Thermal Aspect of Dielectric Inserted Under Source & Drain of 5 nm Nanosheet. VDAT 2022: 3-11

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