"Semiconductor process equipment modeling: using emulation to validate a ..."

Todd LeBaron, Ruth Ann Hendrickson (2000)

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DOI: 10.1109/WSC.2000.899119

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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Todd LeBaron, Ruth Ann Hendrickson:
Semiconductor process equipment modeling: using emulation to validate a cluster tool simulation model. WSC 2000: 1417-1422

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