"Evaluation of the phase error in Si-wire arrayed-waveguide gratings ..."

Kyosuke Muramatsu et al. (2015)

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DOI: 10.1587/ELEX.12.20150019

access: open

type: Journal Article

metadata version: 2021-02-12

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  - https://dblp.org/rec/journals/ieiceee/MuramatsuASTTOY15
Kyosuke Muramatsu, Hideaki Asakura, Keijiro Suzuki, Ken Tanizawa, Munehiro Toyama, Minoru Ohtsuka, Nobuyuki Yokoyama, Kazuyuki Matsumaro, Miyoshi Seki, Keiji Koshino, Kazuhiro Ikeda, Shu Namiki, Hitoshi Kawashima, Hiroyuki Tsuda:
Evaluation of the phase error in Si-wire arrayed-waveguide gratings fabricated by ArF-immersion photolithography. IEICE Electron. Express 12(7): 20150019 (2015)

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