"Development of a Multi-Ball-Cantilever AFM for Measuring Resist Surface."

Shujie Liu et al. (2006)

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DOI: 10.20965/JRM.2006.P0698

access: closed

type: Journal Article

metadata version: 2020-04-01

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Shujie Liu, Shuichi Nagasawa, Satoru Takahashi, Kiyoshi Takamasu:
Development of a Multi-Ball-Cantilever AFM for Measuring Resist Surface. J. Robotics Mechatronics 18(6): 698-704 (2006)

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