"Study of GHz-SAM sensitivity to delamination in BEOL layers."

Ahmad Khaled et al. (2017)

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DOI: 10.1016/J.MICROREL.2017.06.075

access: closed

type: Journal Article

metadata version: 2023-09-30

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Ahmad Khaled, Luka Kljucar, Sebastian Brand, Michael Kögel, Robert Aertgeerts, Ruben Nicasy, Ingrid De Wolf:
Study of GHz-SAM sensitivity to delamination in BEOL layers. Microelectron. Reliab. 76-77: 238-242 (2017)

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