"Raman spectroscopic assessments of structural orientation and residual ..."

Wenliang Zhu, Giuseppe Pezzotti (2015)

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DOI: 10.1016/J.MICROREL.2014.10.001

access: closed

type: Journal Article

metadata version: 2020-02-22

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Wenliang Zhu, Giuseppe Pezzotti:
Raman spectroscopic assessments of structural orientation and residual stress in wurtzitic AlN film deposited on (0 0 1) Si. Microelectron. Reliab. 55(1): 66-73 (2015)

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