"Identification of objects of complex shape by using stochastic local ..."

Masayoshi Kamijo, Shin-Ichi Aihara, Masaru Nakazawa (1995)

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DOI: 10.1002/SCJ.4690261305

access: closed

type: Journal Article

metadata version: 2023-09-13

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Masayoshi Kamijo, Shin-Ichi Aihara, Masaru Nakazawa:
Identification of objects of complex shape by using stochastic local fractal variables-categorizing dust particles on lsi wafer surface. Syst. Comput. Jpn. 26(13): 44-54 (1995)

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