"Fabrication of Submicron Beams with Galvanic Etch Stop for Si in TMAH."

Rong Lu et al. (2009)

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DOI: 10.3390/S90402470

access: open

type: Journal Article

metadata version: 2024-05-31

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Rong Lu, Yanhong Wu, Haitao Cheng, Heng Yang, Xinxin Li, Yuelin Wang:
Fabrication of Submicron Beams with Galvanic Etch Stop for Si in TMAH. Sensors 9(4): 2470-2477 (2009)

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