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"Defect Filling Method of Sensor Encapsulation Based on Micro-Nano ..."
Jia-Lin Yao et al. (2021)
- Jia-Lin Yao, Wen-Jiang Qiang, Xingqi Guo, Hanshui Fan, Yushuang Zheng, Yan Xu, Xing Yang:
Defect Filling Method of Sensor Encapsulation Based on Micro-Nano Composite Structure with Parylene Coating. Sensors 21(4): 1107 (2021)
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