"Scheduling Cluster Tools for Concurrent Processing of Two Wafer Types."

Jun-Ho Lee, Hyun-Jung Kim, Tae-Eog Lee (2014)

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DOI: 10.1109/TASE.2013.2296855

access: closed

type: Journal Article

metadata version: 2020-04-02

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Jun-Ho Lee, Hyun-Jung Kim, Tae-Eog Lee:
Scheduling Cluster Tools for Concurrent Processing of Two Wafer Types. IEEE Trans Autom. Sci. Eng. 11(2): 525-536 (2014)

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