"A New Class of Sequences Without Interferences for Cluster Tools With ..."

Yuchul Lim, Tae-Sun Yu, Tae-Eog Lee (2019)

> Home

Details and statistics

DOI: 10.1109/TASE.2018.2815157

access: closed

type: Journal Article

metadata version: 2020-04-02

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/tase/LimYL19
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/tase/LimYL19
Yuchul Lim, Tae-Sun Yu, Tae-Eog Lee:
A New Class of Sequences Without Interferences for Cluster Tools With Tight Wafer Delay Constraints. IEEE Trans Autom. Sci. Eng. 16(1): 392-405 (2019)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.