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"Design, Fabrication, and Testing of a New Compact Piezo-Driven Flexure ..."
Zeyi Wu, Qingsong Xu (2019)
- Zeyi Wu
, Qingsong Xu
:
Design, Fabrication, and Testing of a New Compact Piezo-Driven Flexure Stage for Vertical Micro/Nanopositioning. IEEE Trans Autom. Sci. Eng. 16(2): 908-918 (2019)
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