"Scheduling Dual-Armed Cluster Tools With Chamber Cleaning Operations."

Tae-Sun Yu, Tae-Eog Lee (2019)

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DOI: 10.1109/TASE.2017.2764105

access: closed

type: Journal Article

metadata version: 2020-04-02

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Tae-Sun Yu, Tae-Eog Lee:
Scheduling Dual-Armed Cluster Tools With Chamber Cleaning Operations. IEEE Trans Autom. Sci. Eng. 16(1): 218-228 (2019)

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