"Long-Term Bilayer Encapsulation Performance of Atomic Layer Deposited Al ..."

Xianzong Xie et al. (2013)

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DOI: 10.1109/TBME.2013.2266542

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type: Journal Article

metadata version: 2024-10-06

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Xianzong Xie, Loren Rieth, Ryan Caldwell, Mohit Diwekar, Prashant Tathireddy, Rohit Sharma, Florian Solzbacher:
Long-Term Bilayer Encapsulation Performance of Atomic Layer Deposited Al $_{\bf 2}$O$_{\bf 3}$ and Parylene C for Biomedical Implantable Devices. IEEE Trans. Biomed. Eng. 60(10): 2943-2951 (2013)

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