"Stitch-Aware Routing for Multiple E-Beam Lithography."

Iou-Jen Liu, Shao-Yun Fang, Yao-Wen Chang (2015)

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DOI: 10.1109/TCAD.2014.2385761

access: closed

type: Journal Article

metadata version: 2020-09-24

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Iou-Jen Liu, Shao-Yun Fang, Yao-Wen Chang:
Stitch-Aware Routing for Multiple E-Beam Lithography. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 34(3): 471-482 (2015)

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