"Learning Control for Motion Coordination in Wafer Scanners: Toward Gain ..."

Fazhi Song et al. (2022)

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DOI: 10.1109/TIE.2022.3142428

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type: Journal Article

metadata version: 2023-08-28

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Fazhi Song, Yang Liu, Dong Shen, Li Li, Jiubin Tan:
Learning Control for Motion Coordination in Wafer Scanners: Toward Gain Adaptation. IEEE Trans. Ind. Electron. 69(12): 13428-13438 (2022)

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