"Timed Petri nets in modeling and analysis of cluster tools."

Wlodzimierz M. Zuberek (2001)

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DOI: 10.1109/70.964658

access: closed

type: Journal Article

metadata version: 2021-10-14

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Wlodzimierz M. Zuberek:
Timed Petri nets in modeling and analysis of cluster tools. IEEE Trans. Robotics Autom. 17(5): 562-575 (2001)

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