"Integrated Scheduling of a Dual-Armed Cluster Tool for Maximizing Steady ..."

Woojin Kim, Tae-Sun Yu, Tae-Eog Lee (2021)

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DOI: 10.1109/TSMC.2020.2978486

access: closed

type: Journal Article

metadata version: 2021-12-25

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Woojin Kim, Tae-Sun Yu, Tae-Eog Lee:
Integrated Scheduling of a Dual-Armed Cluster Tool for Maximizing Steady Schedule Patterns. IEEE Trans. Syst. Man Cybern. Syst. 51(12): 7282-7294 (2021)

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