"Robust Scheduling of Time-Constrained Dual-Arm Cluster Tools With Wafer ..."

Yan Qiao et al. (2019)

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DOI: 10.1109/TSMC.2017.2721979

access: closed

type: Journal Article

metadata version: 2021-02-05

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Yan Qiao, Naiqi Wu, FaJun Yang, MengChu Zhou, Qinghua Zhu, Ting Qu:
Robust Scheduling of Time-Constrained Dual-Arm Cluster Tools With Wafer Revisiting and Activity Time Disturbance. IEEE Trans. Syst. Man Cybern. Syst. 49(6): 1228-1240 (2019)

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