"Adaptive control for micro/nano positioning system driven by piezo ..."

Xinkai Chen et al. (2015)

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DOI: 10.1109/ISIE.2015.7281445

access: closed

type: Conference or Workshop Paper

metadata version: 2022-12-07

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Xinkai Chen, Shengjun Wen, Dongyun Wang, Chun-Yi Su:
Adaptive control for micro/nano positioning system driven by piezo electric actuator. ISIE 2015: 66-71

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