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Conferences > OFC > 2014 > M2G > M2G.5

Ultra-Small Butt-Joint Ge Photodetector Featuring Self-Aligned In-situ Doping and CMP-Free Novel CVD Process

M. Miura, J. Fujikata, M. Noguchi, and Y. Arakawa

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Abstract

Ultra-small butt-joint germanium photodetector featuring self-aligned in-situ doping was realized with drastically decreased process number based on novel CVD method. The photodetector showed prominently increased 3 dB bandwidth at zero bias (35 GHz).

© 2014 Optical Society of America

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