A Structured Routing Architecture for Practical Application of Character Projection Method in Electron-Beam Direct Writing

Rimon IKENO; Takashi MARUYAMA; Satoshi KOMATSU; Tetsuya IIZUKA; Makoto IKEDA; Kunihiro ASADA

doi:10.1587/transfun.E97.A.1688

Regular Section

A Structured Routing Architecture for Practical Application of Character Projection Method in Electron-Beam Direct Writing

Rimon IKENO, Takashi MARUYAMA, Satoshi KOMATSU, Tetsuya IIZUKA, Makoto IKEDA, Kunihiro ASADA

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Keywords: Electron Beam Direct Writing, Character Projection, routing, interconnect, VIA

JOURNAL RESTRICTED ACCESS

2014 Volume E97.A Issue 8 Pages 1688-1698

DOI https://doi.org/10.1587/transfun.E97.A.1688

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Abstract

To improve throughput of Electron Beam Direct Writing (EBDW) with Character Projection (CP) method, a structured routing architecture (SRA) has been proposed to restrict VIA placement and wire-track transition. It reduces possible layout patterns in the interconnect layers, and increases VIA and metal figure numbers in the EB shots while suppressing the CP character number explosion. In this paper, we discuss details of the SRA design methodology, and demonstrate the CP performance by SRA in comparison with other EBDW techniques. Our experimental results show viable CP performance for practical use, and prove SRA's feasibility in 14nm mass fabrication.

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