Electrical Engineering and Systems Science > Systems and Control
[Submitted on 10 Jan 2023]
Title:Sequential Structure and Control Co-design of Lightweight Precision Stages with Active control of flexible modes
View PDFAbstract:Precision motion stages are playing a prominent role in various manufacturing equipment. The drastically increasing demand for higher throughput in integrated circuit (IC) manufacturing and inspection calls for the next-generation precision stages that have light weight and high control bandwidth simultaneously. In today's design techniques, the stage's first flexible mode is limiting its achievable control bandwidth, which enforces a trade-off between the stage's acceleration and closed-loop stiffness and thus limits the system's overall performance. To overcome this challenge, this paper proposes a new hardware design and control framework for lightweight precision motion stages with the stage's low-frequency flexible modes actively controlled. Our method proposes to minimize the resonance frequency of the controlled mode to reduce the stage's weight, and to maximize that of the uncontrolled mode to enable high control bandwidth. In addition, the proposed framework determines the placement of the actuators and sensors to maximize the controllability/observability of the stage's controlled flexible mode while minimizing that of the uncontrolled mode, which effectively simplifies the controller designs. Two case studies are used to evaluate the effectiveness of the proposed framework. Simulation results show that the stage designed using the proposed method has a weight reduction of more than 55% compared to a baseline stage design. Improvement in control bandwidth was also achieved. These results demonstrate the effectiveness of the proposed method in achieving lightweight precision positioning stages with high acceleration, bandwidth, and precision.
Current browse context:
eess.SY
References & Citations
Bibliographic and Citation Tools
Bibliographic Explorer (What is the Explorer?)
Connected Papers (What is Connected Papers?)
Litmaps (What is Litmaps?)
scite Smart Citations (What are Smart Citations?)
Code, Data and Media Associated with this Article
alphaXiv (What is alphaXiv?)
CatalyzeX Code Finder for Papers (What is CatalyzeX?)
DagsHub (What is DagsHub?)
Gotit.pub (What is GotitPub?)
Hugging Face (What is Huggingface?)
Papers with Code (What is Papers with Code?)
ScienceCast (What is ScienceCast?)
Demos
Recommenders and Search Tools
Influence Flower (What are Influence Flowers?)
CORE Recommender (What is CORE?)
arXivLabs: experimental projects with community collaborators
arXivLabs is a framework that allows collaborators to develop and share new arXiv features directly on our website.
Both individuals and organizations that work with arXivLabs have embraced and accepted our values of openness, community, excellence, and user data privacy. arXiv is committed to these values and only works with partners that adhere to them.
Have an idea for a project that will add value for arXiv's community? Learn more about arXivLabs.