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Publications

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This publications database includes many of the most recent publications of the National Institute of Standards and Technology (NIST). The database, however, is not complete. Additional publications are added on a continual basis.

If you have difficulties in locating a specific publication, please contact reflib [at] nist.gov (reflib[at]nist[dot]gov) and provide any information you may have, including title, author, publication series, or date published.

Recent Publications

Detection limits of AI-based SEM dimensional metrology

Author(s)
Peter Bajcsy, Brycie Wiseman, Michael Paul Majurski, Andras Vladar
The speed of in-line scanning electron microscope (SEM) measurements of linewidth, contact hole, and overlay is critically important for identifying the

Mission Critical Voice Roundtable Report

Author(s)
Alison Kahn, Lisa Soucy
This report summarizes discussions from the Mission Critical Voice Virtual Roundtable hosted by the Public Safety Communications Research (PSCR) Division of the