Vacuum Technology Book II Part 3 2
Vacuum Technology Book II Part 3 2
Vacuum Technology Book II Part 3 2
Book Volume II
The
Part
3.2
www.pfeiffer-vacuum.com
Contents
1 2 3.1
Vacuum solutions from a single source Know-how book Vacuum generation Addresses sales and service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4 Rotary vane pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8 Diaphragm vacuum pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 124 Screw pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 142 Multi-stage Roots pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 158 Roots pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 210 Side channel vacuum pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 260 Turbopumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 266 Index . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 460
3.2
Vacuum measurement, analysis, leak detection Addresses sales and service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4 Measurement equipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8 Analytical equipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 86 Leak detectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 120 Contamination management. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 170 System technology . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 178 Index . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 190
3.3
Chambers and components Addresses sales and service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4 Vacuum chambers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8 Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40 Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 218 Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 298 Manipulators . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 354 Index . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 384
www.pfeiffer-vacuum.com
3.2 Vacuum measurement, analysis, leak detection / Addresses sales and service
Addresses sales
Argentina
RUVAC S.R.L. Sales Agency Buenos Aires C. F. Buenos Aires T +54 11 4501 5129 F +54 11 4504 4122 [email protected]
Chile
Bermat S. A. Sales Agency Santiago Santiago T +56 2 231 8877 F +56 2 231 4294 [email protected]
Estonia
UAB Vildoma Sales Agency Vilnius Vilnius T +37 05 236 36 56/57 F +37 05 236 36 55 [email protected]
Indonesia
APP Systems Services Pte. Ltd. Jakarta T +6221 745 1687 F +6221 745 3337 [email protected]
Ireland
Pfeiffer Vacuum Ltd Newport Pagnell T +44 1908 500600 F +44 1908 500601 [email protected]
Australia
Scitek Australia Pty. Ltd. Sales Agency/ServicePoint Sydney Sydney T +61 2 9420 0477 F +61 2 9418 3540 [email protected]
China
Hakuto Enterprises Ltd. Hong Kong T +852 2512 5717 F +852 2807 0511 [email protected] Pfeiffer Vacuum (Shanghai) Co., Ltd. Shanghai T +86-(0)21-33933940 F +86-(0)21-33933944 [email protected] Pfeiffer Vacuum (Shanghai) Co., Ltd. ServiceCenter Wuxi Wuxi T +86-(0)510-85498888 F +86-(0)510-82239070 [email protected]
Finland
SV Vacuumservice Oy Sales Agency Helsinki Helsinki T +358-9-774 55 30 F +358- 9 774 55 330 [email protected]
Israel
ODEM Scientific Applications Ltd. Rehovot T +972 8 9480780 F +972 8 9480781 [email protected]
Austria
Pfeiffer Vacuum Austria GmbH Sales and Service Company Austria Wien T +43 1 894 17 04 F +43 1 894 17 07 [email protected]
France
adixen Vacuum Products SAS Sales and Service Company France Annecy T +33 4 50 65 77 77 F +33 4 50 65 77 89 [email protected]
Italy
Pfeiffer Vacuum Italia S.p.A. Paderno Dugnano (MI) T +39 02 93 99 051 F +39 02 93 99 05 33 [email protected]
Belgium
Pfeiffer Vacuum Benelux B.V. Culemborg T +31 345 478 400 F +31 345 531 076 [email protected]
Germany
Pfeiffer Vacuum GmbH Headquarters Asslar T +49 6441 802-0 F +49 6441 802-1202 [email protected] Trinos Vakuum-Systeme GmbH Gttingen T +49 551 99963-0 F +49 551 99963-3010 [email protected]
Colombia
APP Machines Ltda. Sales Agency Bogot Bogot T +57 1 704 2311 F +57 1 703 8648 [email protected]
Japan
Hakuto Co., Ltd. Headoffice Tokyo T + 81 3 32 258 910 F + 81 3 32 259 011 [email protected]
Bolivia
APP Machines Ltda. Sales Agency Bogot Bogot T +57 1 704 2311 F +57 1 703 8648 [email protected]
Croatia
SCAN, d.o.o., Preddvor Kranj, Slovenia T +386 4 27 50 200 F +386 4 27 50 240 [email protected]
Kazakhstan
BLM Synergie Moscow T +7 495 781 39 39 F +7 495 781 35 91 [email protected]
Great Britain
Pfeiffer Vacuum Ltd Livingston T +44 1506 418000 F +44 1506 418002 [email protected] Newport Pagnell T +44 1908 500600 F +44 1908 500601 [email protected]
Cyprus
Analytical Instruments S.A. Chalandri/Athens T +30 210 67 48 973 F +30 210 67 48 978 [email protected] Norm Electronics ltd. Athens T +30 210 3237698 F +30 210 3237780 [email protected]
Korea
adixen Vacuum Technology Korea Hwasung-Si, Gyeonggi-Do T +82 31 8014 7200 F +82 31 8014 7227 [email protected] Pfeiffer Vacuum Korea Ltd. Yongin-City, Kyungki-Do T +82 31 266 0741 F +82 31 266 0747 [email protected]
Brazil
AVACO Tecnologia em Vcuo Sales Agency So Paulo So Paulo SP T +55 11 4436 6994 F +55 11 4438-7571 [email protected] Pfeiffer Vacuum Brasil Ltda. Sales and Service Company Brazil So Paulo SP T +55 11 3130 7999 F +55 11 3130 7979 [email protected]
Greece
Analytical Instruments S.A. Chalandri/Athens T +30 210 67 48 973 F +30 210 67 48 978 [email protected] Norm Electronics ltd. Athens T +30 210 3237698 F +30 210 3237780 [email protected]
Czech Republic
Pfeiffer Vacuum Austria GmbH, Office Prague Praha 4 T +420 257 923 888 F +420 257 923 014 [email protected]
Kosovo
SCAN, d.o.o., Preddvor Kranj, Slovenia T +386 4 27 50 200 F +386 4 27 50 240 [email protected]
Bulgaria
Astel Ltd Sales Agency/ServicePoint Sofia Sofia T +359 2 958 78 85 F +359 2 958 78 90 [email protected]
Hungary Denmark
Pfeiffer Vacuum Scandinavia AB Taastrup T +45 43 523 800 F +45 43 523 850 [email protected] Magnificat Vacuum Kft. Budapest T +3612317030 F +3612317035 [email protected]
Latvia
UAB Vildoma Sales Agency Vilnius Vilnius T +37 05 236 36 56/57 F +37 05 236 36 55 [email protected]
Byelorussia
BLM Synergie Moscow T +7 495 781 39 39 F +7 495 781 35 91 [email protected]
Iceland Ecuador
APP Machines Ltda. Sales Agency Bogot Bogot T +57 1 704 2311 F +57 1 703 8648 [email protected] Pfeiffer Vacuum Scandinavia AB Upplands Vsby T +46 8 590 748 10 F +46 8 590 748 88 [email protected]
Lithuania
UAB Vildoma Sales Agency Vilnius Vilnius T +37 05 236 36 56/57 F +37 05 236 36 55 [email protected]
Canada
Pfeiffer Vacuum Inc. ServiceCenter Nashua Nashua T +1 (800) 248-8254 F +1 (888) 658-7983 [email protected]
India
Pfeiffer Vacuum India Ltd. Secunderabad T +91 40 2775 0014 F +91 40 2775 7774 [email protected]
www.pfeiffer-vacuum.com
3.2 Vacuum measurement, analysis, leak detection / Addresses sales and service
Luxembourg
Pfeiffer Vacuum Benelux B.V. Culemborg T +31 345 478 400 F +31 345 531 076 [email protected]
Peru
APP Machines Ltda. Sales Agency Bogot Bogot T +57 1 704 2311 F +57 1 703 8648 [email protected]
South Africa
Air & Vacuum Technologies (Pty) Ltd. Gauteng T + 27 11 318 3240/5 F + 27 (0)86 522 9188 [email protected]
Venezuela
Secotec S.A. Sales Agency Caracas Caracas T +58 212 573 8687 F +58 212 573 1932 [email protected]
Macedonia (FYROM)
SCAN, d.o.o., Preddvor Kranj, Slovenia T +386 4 27 50 200 F +386 4 27 50 240 [email protected]
Spain Philippines
APP Systems Services Pte. Ltd. Manila T +63 2 846 84 17 F +63 2 846 84 20 [email protected] Tecnovac Tecnologia de Vacio S.L. Alcobendas (Madrid) T +34 91 804 1134 F +34 91 804 3091 [email protected]
Vietnam
APP Systems Services Pte. Ltd. Ho Chi Minh City T +848 3933 0177 F +848 3933 0178 [email protected]
Malaysia
APP Engineering Sdn. Bhd. Office Kuala Lumpur Kuala Lumpur T +60 3 7984 6611 F +60 3 7984 6616 [email protected] APP Engineering Sdn. Bhd. Office Kuching Kuching, Sarawak T +60 82 363182 F +60 82 362078 [email protected] APP Engineering Sdn. Bhd. Office Penang Penang T +60 4 646 7758 F +60 4 646 7759 [email protected]
Sweden Poland
APVACUUM Sp.z o.o. Sales Agency/ServicePoint Suchy Las, k. Poznania T +48 61 6563530 F +48 61 6100312 [email protected] Pfeiffer Vacuum Scandinavia AB Upplands Vsby T +46 8 590 748 10 F +46 8 590 748 88 [email protected]
Switzerland
Pfeiffer Vacuum (Schweiz) AG Zrich T +41 44 444 22 55 F +41 44 444 22 66 [email protected]
Portugal
Tecnovac Tecnologia de Vacio S.L. Tres Cantos (Madrid) T +34 91 804 1134 F +34 91 804 3091 [email protected]
Taiwan R.O.C.
Pfeiffer Vacuum Taiwan Corporation Hsin Chu T 886-3-5599230 F 886-5599231 [email protected]
Romania
VACUSERV srl Sales Agency Romania Bucharest T +40 744 500 119 F +40 21 314 0034 [email protected]
Thailand
Hakuto (Thailand) Ltd. Bangkok T +662 255 8910 F +662 255 8911 [email protected]
Mexico
INTERCOVAMEX ServicePoint Cuernavaca Morelos Cuernavaca Morelos T +52 777 313 2260 F +52 777 317 2701 [email protected]
Russia
BLM Synergie Moscow T +7 495 781 39 39 F +7 495 781 35 91 [email protected]
Turkey
An-Ka Analiz Ltd. Istanbul T +90 212 274 97 10 F +90 212 274 97 22 [email protected]
Montenegro
SCAN, d.o.o., Preddvor Kranj, Slovenia T +386 4 27 50 200 F +386 4 27 50 240 [email protected]
Serbia
SCAN, d.o.o., Preddvor Kranj, Slovenia T +386 4 27 50 200 F +386 4 27 50 240 [email protected]
Ukraine
BLM Synergie Moscow T +7 495 781 39 39 F +7 495 781 35 91 [email protected] PV Systems Moscow T +7 (495) 411 7962 F +7 (495) 411 7962 108 [email protected]
Netherlands
Pfeiffer Vacuum Benelux B.V. Culemborg T +31 345 478 400 F +31 345 531 076 [email protected]
Singapore
Pfeiffer Vacuum Singapore Pte. Ltd. Singapore T +65 6254 0828 F +65 6254 7018 [email protected]
New Zealand
Scitek Australia Pty. Ltd. ServicePoint Sydney Lane Cove West T +61 2 9420 0477 F +61 2 9418 3540 [email protected]
Slovakia
Pfeiffer Vacuum Austria GmbH, Office Prague Praha 4, CZ T +420 257 923 888 F +420 257 923 014 [email protected]
Uruguay
RUVAC S.R.L. Sales Agency Buenos Aires C. F. Buenos Aires T +54 11 4501 5129 F +54 11 4504 4122 [email protected]
Norway
VakuumConsult AS Sales Agency Norway Oslo T +47 22 16 32 00 F +47 22 16 32 01 [email protected]
Slovenia
SCAN, d.o.o., Preddvor Kranj, Slovenia T +386 4 27 50 200 F +386 4 27 50 240 [email protected]
USA
Pfeiffer Vacuum Inc. Headquarters Nashua, NH 03063-1988 T +1 (800) 248-8254 F +1 (603) 578-6550 [email protected]
Paraguay
RUVAC S.R.L. Sales Agency Buenos Aires C. F. Buenos Aires T +54 11 4501 5129 F +54 11 4504 4122 [email protected]
www.pfeiffer-vacuum.com
3.2 Vacuum measurement, analysis, leak detection / Addresses sales and service
Addresses service
Argentina
RUVAC S.R.L. ServicePoint Buenos Aires C. F. Buenos Aires T +54 11 4501 5129 F +54 11 4504 4122 [email protected]
China
Pfeiffer Vacuum (Shanghai) Co., Ltd. ServiceCenter Shanghai Shanghai T +86-(0)21-33933940 F +86-(0)21-33933944 [email protected] Hakuto Enterprises Ltd. ServicePoint Hong Kong Hong Kong T +852 2690 2543 F +852 2690 2034 [email protected] Pfeiffer Vacuum (Shanghai) Co., Ltd. ServiceCenter Wuxi Wuxi T +86-(0)510-85498888 F +86-(0)510-82239070 [email protected]
France
adixen Vacuum Products SAS ServiceCenter Annecy Annecy T +33 4 50 65 76 07 F +33 4 50 65 75 77 [email protected] adixen Vacuum Products SAS ServiceCenter Paris Saclay T +33 1 69 30 92 86 F +33 1 69 30 92 94 [email protected]
Great Britain
Pfeiffer Vacuum Ltd ServiceCenter Livingston Livingston T +44 1506 418000 F +44 1506 418002 [email protected] Pfeiffer Vacuum Ltd ServiceCenter Newport Pagnell Newport Pagnell T +44 1908 500600 F +44 1908 500601 [email protected]
Australia
Scitek Australia Pty. Ltd. ServicePoint Sydney Sydney T +61 2 9420 0477 F +61 2 9418 3540 [email protected]
Germany
Pfeiffer Vacuum GmbH Headquarters Asslar T +49 6441 802-1852 F +49 6441 802-1202 [email protected] Pfeiffer Vacuum GmbH ServiceCenter Berlin Berlin-Adlershof T +49 6441 802 1852 F +49 6441 802 1202 [email protected] DREEBIT GmbH ServiceCenter Dresden Dresden T +49 6441 802 1852 F +49 6441 802 1202 [email protected] Pfeiffer Vacuum GmbH ServiceCenter Wertheim Wertheim T +49 9342 9610 0 F +49 9342 9610 3810 [email protected] MassTech GmbH ServicePoint Bremen Bremen T +49 6441 802 1852 F +49 6441 802 1202 [email protected] Pfeiffer Vacuum GmbH ServicePoint Karlsruhe Karlsruhe T +49 6441 802 1852 F +49 6441 802 1202 [email protected] Pfeiffer Vacuum GmbH ServicePoint Mnchen Mnchen T +49 6441 802 1852 F +49 6441 802 1202 [email protected] Pfeiffer Vacuum GmbH ServicePoint Aachen Aachen T +49 6441 802 1852 F +49 6441 802 1202 [email protected] Pfeiffer Vacuum GmbH ServicePoint Nrnberg Nrnberg T +49 6441 802 1852 F +49 6441 802 1202 [email protected] Pfeiffer Vacuum GmbH ServicePoint Hamburg Hamburg T +49 6441 802 1852 F +49 6441 802 1202 [email protected]
Greece
Analytical Instruments S.A. ServicePoint Athens Chalandri/Athens T +30 210 67 48 973 F +30 210 67 48 978 [email protected] Norm Electronics ltd. ServicePoint Greece Athens T +30 210 3237698 F +30 210 3237780 [email protected]
Austria
Pfeiffer Vacuum Austria GmbH ServiceCenter Vienna Wien T +43 1 894 17 04 F +43 1 894 17 07 [email protected]
Colombia
APP Machines Ltda. ServicePoint Bogot Bogot T +57 1 704 2311 F +57 1 703 8648 [email protected]
Belgium
Pfeiffer Vacuum Benelux B.V. ServiceCenter Culemborg T +31 345 478 400 F +31 345 531 076 [email protected]
Croatia Bolivia
APP Machines Ltda. ServicePoint Bogot Bogot T +57 1 704 2311 F +57 1 703 8648 [email protected] SCAN, d.o.o., Preddvor Kranj, Slovenia Preddvor T +386 4 27 50 200 F +386 4 27 50 240 [email protected]
Hungary
Magnificat Vacuum Kft ServicePoint Budapest Budapest T +3612317030 F +3612317035 [email protected]
Iceland
Pfeiffer Vacuum Scandinavia AB ServiceCenter Stockholm Upplands Vsby T +46 8 590 748 15 F +46 8 590 748 88 [email protected]
Brazil
Pfeiffer Vacuum Brasil Ltda. Sales and Service Company Brazil So Paulo SP T +55 11 3130 7999 F +55 11 3130 7979 [email protected] AVACO Tecnologia em Vcuo ServicePoint So Paulo So Paulo SP T +55 11 4436 6994 F +55 11 4438-7571 [email protected]
India
Pfeiffer Vacuum India Ltd. ServiceCenter Secunderabad Secunderabad T +91 40 2775 0014 F +91 40 2775 7774 [email protected]
Czech Republic
Vakuum Servis S.R.O. ServiceCenter Roznov Roznov p. R. T +420 571 115 656 F +420 571 843 166 [email protected]
Indonesia
APP Systems Services Pte. Ltd. ServicePoint Jakarta T +62 21 745 1687 F +62 21 745 3337 [email protected]
Bulgaria
Astel ltd Sales Agency/ServicePoint Sofia Sofia T +359 2 958 78 85 F +359 2 958 78 90 [email protected]
Denmark
Pfeiffer Vacuum Scandinavia AB ServiceCenter Stockholm Upplands Vsby T +46 8 590 748 15 F +46 8 590 748 88 [email protected]
Ireland
Pfeiffer Vacuum Ltd ServiceCenter Newport Pagnell Newport Pagnell T +44 1908 500600 F +44 1908 500601 [email protected]
Byelorussia
BLM Synergie ServicePoint Moscow Mytischi T +7 (495) 781 39 39 F +7 (495) 781 35 91 [email protected]
Ecuador
APP Machines Ltda. ServicePoint Bogot Bogot T +57 1 704 2311 F +57 1 703 8648 [email protected]
Israel
ODEM Scientific Applications Ltd. ServicePoint Rehovot Rehovot T +972 8 9480780 F +972 8 9480781 [email protected]
Canada
Pfeiffer Vacuum Inc. ServiceCenter Nashua Nashua, NH 03063-1988 T +1 (800) 248-8254 F +1 (888) 658-7983 [email protected]
Estonia
UAB Vildoma ServiceCenter Stockholm Upplands Vsby T +46 8 590 748 15 F +46 8 590 748 88 [email protected]
Italy
Pfeiffer Vacuum Italia S.p.A. ServiceCenter Milano Paderno Dugnano (MI) T +39 02 93 99 051 F +39 02 93 99 05 33 [email protected] Pfeiffer Vacuum Italia S.p.A. ServiceCenter Catania Catania (CT) T +39 095 523257 F +39 095 523268 [email protected]
Chile
Bermat S. A. ServicePoint Santiago Santiago T +56 24122800 F +56 2 231 4294 [email protected]
Finland
SV Vacuumservice Oy ServicePoint Helsinki Helsinki T +358-9-774 55 30 F +358- 9 774 55 330 [email protected]
www.pfeiffer-vacuum.com
3.2 Vacuum measurement, analysis, leak detection / Addresses sales and service
Pfeiffer Vacuum Italia S.p.A. ServiceCenter Agrate Agrate Brianza (MB) T +39 039 6899718 F +39 039 6899718 [email protected] Pfeiffer Vacuum Italia S.p.A. ServiceCenter Roma Pomezia (RM) T +39 335 5284142 [email protected]
Macedonia (FYROM)
SCAN, d.o.o., Preddvor Kranj, Slovenia T +386 4 27 50 200 F +386 4 27 50 240 [email protected]
Poland
APVACUUM Sp.z o.o. ServicePoint Suchy Las, k. Poznania T +48 61 656 35 30 F +48 61 6100312 [email protected]
Sweden
Pfeiffer Vacuum Scandinavia AB ServiceCenter Stockholm Upplands Vsby T +46 8 590 748 15 F +46 8 590 748 88 [email protected] Pfeiffer Vacuum Scandinavia AB ServicePoint Gothenburg Hisings Backa T +46 31 52 60 60 F +46 31 52 80 61 [email protected]
Malaysia
APP Engineering Sdn. Bhd. Office Kuala Lumpur ServicePoint Kuala Lumpur Kuala Lumpur T +60 3 7984 6611 F +60 3 7984 6616 [email protected] APP Engineering Sdn. Bhd. Office Penang ServicePoint Penang Penang T +60 4 646 7758 F +60 4 646 7759 [email protected]
Portugal
Tecnovac Tecnologia de Vacio S.L. ServicePoint Madrid Alcobendas (Madrid) T +34 91 804 1134 F +34 91 804 3091 [email protected]
Japan
Hakuto Co., Ltd., Vacuum Scientific, Instruments Division ServiceCenter Isehara Isehara T +81 463 96 2005 F +81 463 96 2021 [email protected] Hakuto Co., Ltd. ServicePoint Kansai Hyogo-ken T +81 72 784 8268 F +81 72 784 8286 [email protected] Hakuto Co., Ltd. ServicePoint Nagoya Nagoya T +81 52 794 8970 F +81 52 794 8975 [email protected]
Switzerland Romania
VACUSERV srl ServicePoint Romania Bucharest T +40 744 500 119 F +40 21 314 0034 [email protected] Pfeiffer Vacuum (Schweiz) AG ServiceCenter Zrich Zrich T +41 44 444 22 55 F +41 44 444 22 66 [email protected]
Russia
BLM Synergie ServicePoint Moscow Mytischi T +7 (495) 781 39 39 F +7 (495) 781 35 91 [email protected]
Pfeiffer Vacuum Taiwan Corporation ServiceCenter Taiwan Hsin Chu T 886-3-5599230 F 886-3-5599231 [email protected]
Thailand Montenegro
SCAN, d.o.o., Preddvor Kranj, Slovenia T +386 4 27 50 200 F +386 4 27 50 240 [email protected]
Serbia
SCAN, d.o.o., ServicePoint Preddvor Kranj, Slovenia T +386 4 27 50 200 F +386 4 27 50 240 [email protected]
Kazakhstan
BLM Synergie Moscow T +7 495 781 39 39 F +7 495 781 35 91 [email protected]
Hakuto (Thailand) Ltd. ServicePoint Bangkok Bangkok T +662 255 8910 F +662 255 8911 [email protected]
Netherlands
Pfeiffer Vacuum Benelux B.V. ServiceCenter Culemborg T +31 345 478 400 F +31 345 531 076 [email protected]
Singapore
Pfeiffer Vacuum Singapore Pte. Ltd. ServiceCenter Singapore Singapore T +65 6254 0828 F +65 6254 7018 [email protected]
Turkey
An-Ka Analiz Ltd. ServicePoint Istanbul Istanbul T +90 212 274 97 10 F +90 212 274 97 22 [email protected]
Korea
Pfeiffer Vacuum Korea Ltd. ServiceCenter Seoul Yongin-City, Gyeonggi-Do T +82 31 266 0741 F +82 31 266 0747 [email protected] adixen Vacuum Technology Korea ServiceCenter Hwasung Hwasung-Si, Gyeonggi-Do T +82 31 8014 7202 F +82 31 8014 7203 [email protected]
New Zealand
Scitek Australia Pty. Ltd. ServicePoint Sydney Sydney T +61 2 9420 0477 F +61 2 9418 3540 [email protected]
Slovakia
Vakuum Servis S.R.O. ServiceCenter Roznov Roznov p. R. T +420 571 842 314 F +420 571 843 166 [email protected]
Ukraine
BLM Synergie ServicePoint Moscow Mytischi T +7 (495) 781 39 39 T +7 (495) 781 35 91 [email protected]
Norway
VakuumConsult AS ServicePoint Oslo Oslo T +47 22 16 32 00 F +47 22 16 32 01 [email protected]
Slovenia
SCAN, d.o.o., Preddvor ServicePoint Preddvor Kranj, Slovenia T +386 4 27 50 200 F +386 4 27 50 240 [email protected]
Uruguay
RUVAC S.R.L. ServicePoint Buenos Aires C. F. Buenos Aires T +54 11 4501 5129 F +54 11 4504 4122 [email protected]
Kosovo
SCAN, d.o.o., Preddvor Kranj, Slovenia T +386 4 27 50 200 F +386 4 27 50 240 [email protected]
Paraguay
RUVAC S.R.L. ServicePoint Buenos Aires C. F. Buenos Aires T +54 11 4501 5129 F +54 11 4504 4122 [email protected]
South Africa
Air & Vacuum Technologies (Pty) Ltd. ServicePoint South Africa Gauteng T + 27 (0)861 822 832 F + 27 (0)86 522 9188 [email protected]
USA
Pfeiffer Vacuum Inc. ServiceCenter Nashua Nashua, NH 03063-1988 T +1 (800) 248-8254 F +1 (888) 658-7983 [email protected]
Latvia
UAB Vildoma ServiceCenter Stockholm Upplands Vsby T +46 8 590 748 15 F +46 8 590 748 88 [email protected]
Peru
APP Machines Ltda. ServicePoint Bogot Bogot T +57 1 704 2311 F +57 1 703 8648 [email protected]
Spain
Tecnovac Tecnologia de Vacio S.L. ServicePoint Madrid Alcobendas (Madrid) T +34 91 804 1134 F +34 91 804 3091 [email protected]
Venezuela
Secotec S.A. ServicePoint Caracas Caracas T +58 212 573 8687 F +58 212 573 1932 [email protected]
Lithuania
UAB Vildoma ServiceCenter Stockholm Upplands Vsby T +46 8 590 748 15 F +46 8 590 748 88 [email protected]
Philippines
APP Systems Services Pte. Ltd. ServicePoint Manila Cupang Muntinlupa City T +63 2 850 6665 F +63 2 850 6665 [email protected]
Vietnam
APP Systems Services Pte. Ltd. ServicePoint Ho Chi Minh City Ho Chi Minh City T +84 8 3933 0177 F +84 8 3933 0178 [email protected]
Luxembourg
Pfeiffer Vacuum Benelux B.V. ServiceCenter Culemborg T +31 345 478 400 F +31 345 531 076 [email protected]
www.pfeiffer-vacuum.com
Measurement equipment
Measurement equipment
Vacuum gauges for all vacuum areas and applications
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Contents
Measurement equipment Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8 Overview of series and applications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9 Features at a glance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10 DigiLine Piezo resistive transmitter CPT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Piezo/Pirani transmitter RPT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Pirani transmitter PPT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Pirani/cold catheter transmitter MPT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Pirani/Bayard Alpert transmitter HPT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Controller DPG. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ActiveLine Piezo transmitter APR . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Capacitative transmitter CMR, temperature compensated, hPa . . . . . . . . . . . . . . . . . . . Capacitative transmitter CMR, temperature regulated, hPa . . . . . . . . . . . . . . . . . . . . . . . Capacitative transmitter CCR, temperature compensated, Torr . . . . . . . . . . . . . . . . . . . . Capacitative transmitter CCR, temperature regulated, Torr . . . . . . . . . . . . . . . . . . . . . . . Pirani/capacitative transmitter PCR. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Pirani transmitter TPR . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Cold cathode transmitter IKR . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Pirani/cold catheter transmitter PKR . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Hot cathode transmitter IMR . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Pirani/Bayard Alpert transmitter PBR . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . SingleGauge measuring equipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . DualGauge measuring equipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Pirani and Pirani/Piezo hand measuring equipment TPG . . . . . . . . . . . . . . . . . . . . . . . . . Controllers TPG . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Software for ActiveLine . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ModulLine Pirani vacuum gauges TPR . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Cold cathode vacuum gauges IKR . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Vacuum gauge accessories. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Measurement boards . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Interface and relay board . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . TPG 300 basic unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . TPG 300 complete measurement units. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14 16 18 20 22 24 28 30 32 36 38 40 42 44 46 50 54 56 58 60 61 62 64 67 68 70 72 74 76 79 80 82
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Measurement equipment
Measurement equipment
Measurement equipment
Vacuum gauges for all vacuum areas and applications
Many vacuum applications operate only in a specific pressure range. Analog and digital total vacuum or pressure measurement instruments are used to measure and control the total pressure in a vacuum system. Pfeiffer Vacuum offers three different lines of total pressure gauges. The criteria for selecting a vacuum gauge are based upon various conditions: The pressure range to be detected Gas composition (inert or corrosive) Required accuracy and repeatability Ambient conditions such as ionizing radiation Each series separately covers the entire pressure range. Pfeiffer Vacuum provides you with the best solution for your total pressure measurement tasks based on the relevant application. DigiLine Total pressure vacuum gauge with digital signal outlet ActiveLine Total pressure vacuum gauge with analog signal outlet ModulLine Total pressure measurement in areas with ionizing radiation
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