Turbovac Mag 2200 C-2
Turbovac Mag 2200 C-2
Turbovac Mag 2200 C-2
digital
MAG.DRIVE
Turbomolecular Pumps with Magnetic Bearing
Electronic Frequency Converter
Operating Instructions GA05141_0802
Contents
Page
Description
1.1
System overview
1.2
10
1.3
12
1.4
Standard specification
14
1.5
Technical data
15
1.6
Ordering data
23
Pump configuration
24
44
Installation
45
3.1
Conforming utilization
60
3.2
Ambient conditions
60
3.3
61
3.4
64
3.5
66
3.6
69
3.7
73
3.7.1
75
3.7.2
Pump connection
75
3.7.3
76
Emergency off
76
3.7.4
Interface connector
78
Operation
82
4.1
82
4.2
83
4.3
85
4.4
87
4.5
4.6
Bakeout
88
4.7
89
4.8
Remote control
90
4.9
92
4.10
Operating statuses
94
Contents
4.11
Operating menu
97
4.11.1
Basic Menu
97
4.11.2
98
4.11.3
99
4.11.4
100
4.11.5
101
4.11.6
101
4.11.7
101
4.11.8
Frequency settings
102
4.11.9
103
4.11.10
104
4.11.11
105
4.11.12
106
Maintenance
108
5.1
Cleaning
108
5.2
108
5.3
108
5.4
109
5.5
109
Troubleshooting
112
6.1
Warning messages
113
6.2
Failure messages
115
6.3
Malfunctions
121
Waste Disposal
122
EC Manufacturers Declaration
123
EC Conformance Declaration
124
Certificates
125
Overviews
128
128
List of Figures
129
130
Index
131
Safety Information
Caution
Warning
Safety Information
Parts of the pump can become so hot during operation (> 70 C, > 158
F) that they represent a burn hazard:
Provide protection against contact with the hot components.
Warning
Qualified personnel
Qualified electrical personnel in this instruction manual means a person who
has received electrical engineering instruction or is an electrical expert in
accordance with EN 60204, Part 1, 3.30 respectivly 3.55.
Safety Information
Caution
Ensure that no items like bolts, nuts, washers, pieces of wire, for example,
enter into the inlet of the pump. Foreign objects which enter into the
pump will generally cause severe damage. Damage caused by the intake
of foreign objects is not covered by our warranty. For this reason always
leave the supplied inlet screen in place.
The equipment must not be exposed to drip or spray water.
Figures
The references to diagrams, e. g. (1/2) consist of the Fig. No. and the Item
No. in that order.
We reserve the right to alter the design or any data given in these Operating
Instructions. The illustrations are not binding.
The Operating Instructions are included with the pump and the converter.
If they have different editions, the version delivered with the pump describes the pump correctly and the version delivered with the converter
describes the converter correctly. The version number is either the digit
behind the / in the GA No. or the first two digits behind the _.
Example: GA 05.141/6.02 is the sixth edition and GA05141_0802 the
eighth.
Description
Description
The CT versions are additionally equipped with a temperature management system (TMS) to control the pump temperature. They are prepared
for use in medium to harsh corrosive applications.
The pumps are available with 2 different rotors:
MAG version: Turbo pump
MAG W version: Turbo pump stages and an active drag stage.
See table Pump configuration for an overview on the available models.
The MAG.DRIVEdigital frequency converter
The electronic converter converts the single-phase line supply voltage into
a three-phase DC voltage to drive the pump motor. It also evaluates measured signals and controls
- the pump functions
- the temperature management system (TMS) and
- the active magnetic bearing system
The MAG.DRIVEdigital can be operated with the START and STOP keys,
via a plug-in control, or via an interface.
A cable set consisting of:
- DRIVE/BEARING cable
- TMS or Purge/Vent cable if required
Description
MAG W 830 C
MAG W 1300 C
MAG 2000 CT
MAG 1500 CT
MAG W 1500 CT
MAG W 2000 CT
Description
MAG W 2200 C
MAG W 2800 CT
MAG W 3200 CT
Each Fuse 4 A
digital
Description
Ceramic layer
Rotor
The rotor is made from a high strength aluminium alloy. The rotor and the
lower stator plates are protected with a special ceramic layer ( KEPLACOAT). The standard rotor is a multi-stage axial-flow turbine. In addition to
the turbine stage the wide range rotor has a screw stage.
Both rotors are machined from one piece and the geometry of the the blades
is optimized for high compression and pumping speed of the typical gases
used in semiconductor manufacturing processes.
Magnetic bearing
Bearings
The MAG has a built-in precision 5-axes controlled magnetic bearing. The
rotor is suspended by trouble-free magnets:
along two orthogonal axes in each of two radial planes
and completely in the axial direction
The bearing concept allows for low vibration operations and insures operation of the pump in any mounting position. Magnetic bearings also guarantee
ultra-clean vacuum because no grease is used for lubrication of bearings.
Two touch down bearings are provided to stabilize the rotor mechanically if
impacts occur during operation. They are only used in case of the breaking
of the power supply or BEARING cable during operation, strong shocks, or
faulty electronics.
Motor and control
A DC motor without commutator is used to power the rotor.
Drive voltage for the motor and the operating voltage for the magnetic bearing are supplied by the MAG.DRIVEdigital frequency converter. It also handles
the automatic monitoring of these systems.
Data storage
The pump is equipped with a data storage device which stores the important
operating parameters during the complete operation time of the pump.
The converter monitors continously all important operating parameters and
provides warning and alarm signals in case the operating conditions exceed
the specification or the set threshold.
10
Description
Axiales
Magnetlager
Motor
Standard rotor
11
Description
DC motor
TMS
The electronic converter converts the single-phase line supply voltage into a
three-phase DC voltage to control and monitor the electronically-commutated
DC motor. It also evaluates measured signals and controls (open-loop and
closed-loop) the pump functions.
The temperature management system (TMS) and the magnetic bearing control system are integrated into the converter. The TMS regulates the pump
temperature by switching the heating on/off or cooling the pump. The digital
magnetic bearing control system actively controls the pump rotor in five axes
(closed-loop control).
All parameters required for pump operation and the listed faults and operating hours are stored in a non-volatile memory in the pump. When the converter is switched on, the data are loaded into the converter from the pump.
The outputs of the electronic converter are no-load and short-circuit proof.
For remote control via control connector X14 we recommend that either a
relay or optocoupler is used to provide electrical decoupling.
Housing
The converter is supplied with a closed housing. It can be installed in a 19
cabinet; see Section 2.7.
Front panel
Main switch
9-pin connecting socket for the plug-in control or for connection of a serial
interface
2 short-stroke keys
1 green/red STATUS LED
1 green COM LED (communications interface)
1 green MAIN LED (line supply voltage)
2 fuses TMS
Plug-in control
The optional plug-in control has 10 keys and 1 LCD with 2 lines, each 16
characters. The plug-in control displays operating statuses and failures and
allows the configuration of the pumping system.
Rear panel
X14 50-pin D socket connector for remote monitoring and open-loop control
X19 3-pin Hirschmann connector for the connection to the mains supply
X20 MIL standard socket connector for internal sensors, magnetic bearing
connection, motor drive, and communication to the memory chip
X21 MIL standard socket connector for the TMS and purge valve connection
Spare slot for optional network cards, e.g. Device Net
12
Description
Each Fuse 4 A
digital
MAG.DRIVEdigital
Each Fuse 4 A
Esc
Mon
Start
Stop
Prog
Enter
+
_
digital
(X22)
X20
X19
X21
13
Description
1.4
Standard specification
MAG
The turbomolecular pumps are shipped complete, sealed in a PE bag containing a desiccant.
The maximum effective life time of the desiccant is one year.
The intake flange is sealed with a transport seal, the forevacuum flange with
a plastic cap.
The electronic frequency converter MAG.DRIVEdigital, the cables required for
operation and a seal kit to seal the pump tightly if it is removed from the process must be ordered seperately.
All MAGs except from 2000 C/CT/CTS
For the intake flange, a centering ring with FPM O-ring, outer ring, and a
splinter guard are enclosed.
We also provide the bolts for attaching the pump to your tool. To avoid any
safety risk we highly recommend using only the bolts provided with the
pump. Refer also to Section 3.3 Connecting the MAG ....
MAG 2000 C/CT/CTS
The MAG 2000 C/CT/CTS will be delivered without splinter guard.
They will be delivered without bolts for the high-vacuum flange. Instead, you
must use the Fastening Set DN 250 ISO-K.
MAG.DRIVEdigital
Converter
Line supply cable with USA connector, approx. 3m
Line supply cable with EURO connector, approx. 3 m
2 spare fuses for the TMS (miniature fuses 5 x 20 mm, F4A; according
to IEC 127-2/1) and 2 fuse holders 6.3 x 30 mm
Connector for control plug X14 (pins 47/48 bridged)
14
Description
1.5
Technical data
MAG
W 830 C
W 1300 C
W 1300 C
High-vacuum flange
DN
160 ISO-F
200 ISO-F
250 ISO-F
250 ISO-K
ls-1
ls-1
ls-1
700
650
300
1100
1050
920
1220
1180
1020
> 5107
> 108
> 108
Compression for N2
Ultimate pressure as to DIN 28 400
mbar
< 10-8
< 10-8
< 10-8
mbar
Rotor speed
min-1
24,000
36,000
36,000
Run-up time
min
<4
<6
<6
min
1/<4
1/<6
1/<6
Cooling
Cooling water temperature
Weight
Max. high-vacuum flange temperature
short-time
for continuous operation
water
10 30
50 86
C
F
approx. kg
32
C
F
C
F
85
185
60
140
< 0.01
DN
or
40 KF
25 KF
40 KF
25 KF
m3/h
TRIVAC
100
D 65 BCS
C
F
5 40
40 104
Storage temperature
C
F
-10 +60
14 140
40 KF
-
95% (non-condensing)
IP 20
15
Description
1500 CT
W 1500 CT
1500 CT
W 1500 CT
High-vacuum flange
DN
200 ISO-F
200 ISO-F
200 CF
250 ISO-F
250 ISO-F
ls-1
ls-1
ls-1
1100
1000
980
1100
1000
800
1220
1180
1020
1220
1180
850
>108
>108
>108
>108
Compression for N2
Ultimate pressure as to DIN 28 400
mbar
< 10-8
< 10-8
< 10-8
< 10-8
mbar
1.7
2.6
1.7
2.6
Rotor speed
min-1
Run-up time
min
<6
min
1/<6
C
F
water
10 30
50 86
C
F
20 90
68 194
Cooling
Cooling water temperature
Weight
Max. high-vacuum flange temperature
short-time
for continuous operation
for bake-out (CF flange only)
36,000
approx. kg
C (F)
C (F)
C (F)
32
85 (185)
60 (140)
120 (248)
< 0.01
Forevacuum flange
DN
40 KF
m3/h
TRIVAC
100
D 65 BCS
C
F
5 40
40 104
Storage temperature
C
F
-10 +60
14 140
16
95% (non-condensing)
IP 20
Description
2000 C/CT/CTS
W 2000 C/CT
High-vacuum flange
DN
250 ISO-K
250 ISO-F
ls-1
1550
1650
> 108
> 108
Compression for N2
Ultimate pressure
mbar
< 10-8
< 10-8
mbar
mbar
1.6
3.5
4.3
Rotor speed
min-1
Run-up time
min
<8
min
1 / < 7.5
C
F
water
10 30
50 86
C
F
30 62
86 144
Weight
kg
68
C
F
C
F
85
185
60
140
< 0.01
Forevacuum flange
DN
40 KF
Cooling
Cooling water temperature
28,800
m3/h
TRIVAC
100
D 65 BCS
C
F
5 40
40 104
Storage temperature
C
F
-10 +60
14 140
95% (non-condensing)
IP 20
17
Description
W 2200 C
W 2200 C
W 2800 C/CT
W 3200 CT
High-vacuum flange
DN
200 ISO-F
250 ISO-F
250 ISO-F
250 CF
320 ISO-F
Pumping speed
for N2
for Ar
for H2
ls-1
ls-1
ls-1
1600
1450
1650
2000
1900
1800
2650
2450
2100
3200
3000
2250
> 108
Compression for N2
Ultimate pressure as to DIN 28 400
mbar
< 10-8
mbar
2,0
Rotor speed
min-1
Run-up time
Braking time with/without venting
Cooling
Cooling water temperature
29,400
29,400
28,800
28,800
min
<8
<8
< 10
< 10
min
1 / <7
1 / <7
2 / <9
2 / <9
64
65
C
F
water
10 30
50 86
C
F
20 80
68 176
Weight
kg
48
48
C
F
C
F
85
185
60
140
< 0.01
Forevacuum flange
DN
40 KF
m3/h
TRIVAC
100
D 65 BCS
C
F
5 40
40 104
Storage temperature
C
F
-10 +60
14 140
18
95% (non-condensing)
IP 20
Description
W 830
W 1300
W 2200
W 2800
W 3200
High-vacuum flange
DN
160 CF
200 CF
250 CF
250 CF
320 ISO-F
ls-1
900
1170
1800
2400
2400
1.5 108
7.5 102
1.5 108
7.5 102
3.5 105
1 104
1 109
1.6 103
1 109
1.6 103
Compression for N2
Compression for H2
< 110-10
mbar
mbar
mbar
2
0.2
2
0.2
1
0.1
3
0.3
3
0.3
Rotor speed
min-1
36,000
36,000
29,400
28,800
28,800
Run-up time
min
<6
<6
< 10
< 10
< 10
kg
35
35
60
75
75
Weight
Max. high-vacuum flange temperature
short-time
for continuous operation
for bake-out (CF flange only)
C (F)
C (F)
C (F)
85 (185)
60 (140)
120 (248)
Forevacuum flange
DN
40 KF
C
F
5 40
40 104
Storage temperature
C
F
-10 +60
14 140
95% (non-condensing)
IP 20
19
Description
20
Section 3.6
Description
3500
With purge gas
with splinter guard
according to PNEUROP
l/s
3000
Pumping speed
2000
500
0
10 -4
10 -4
10 -3
10 -2
10 -3
10 -2
10 -1
mbar
Torr
10 -1
Inlet pressure
Fig. 1.7 Pumping speed curves for Nitrogen
21
Description
109
MAG W 2800/3200
108
Compression k0
107
MAG W 2200
MAG W 830/1300
106
105
N2
104
He
103
H2
102
101
10-6
10-5
10-4
10-3
10-2
Forevacuum pressure
22
10-1
100
mbar
101
Description
1.6
Ordering data
Part No.
Pumps
200 07 901
on request
400153V0007.
200 91 471
MAG.DRIVEdigital converter
400035V0011
Plug-in control
121 36
400035V0013
MAG.DRIVEdigital
400035V0015
400035V0014
MAG.DRIVEdigital
400035V0016
19 installation frame
161 00
161 02
on request
121 33
400153V0002
Screws M 10 x 50
Screw quality 12.9 according to EN ISO 898-1 with coating
0,2 % yield strength > 1080 N/mm2
200 15 752
Washers
200 07 833
Nuts
211 28 117
267 72
See Oerlikon Leybold Vacuum catalogue
or on request
23
24
200 ISO-F
200 ISO-F
250 ISO-F
250 ISO-F
200 CF
MAG 1500 CT
MAG W 1500 C
MAG W 1500 CT
MAG W 1500 C
MAG W 1500 CT
MAG W 1500 CT
250 ISO-F
250 ISO-F
MAG 1500 CT
MAG W 2000 CT
200 ISO-F
MAG W 1300 C
250 ISO-F
250 ISO-K
MAG W 1300 C
MAG W 2000 C
250 ISO-F
MAG W 1300 C
250 ISO-K
250 ISO-F
MAG W 1300 C
200 ISO-F
MAG W 1300 C
250 ISO-K
200 ISO-F
MAG W 830 C
MAG 2000 CT
160 ISO-F
MAG W 830 C
250 ISO-K
160 ISO-F
Pump
MAG 2000 C
Inlet
flange DN
Pump configuration
40 KF
40 KF
40 KF
40 KF
40 KF
40 KF
40 KF
40 KF
40 KF
40 KF
40 KF
40 KF
40 KF
40 KF
40 KF
25 KF
40 KF
25 KF
40 KF
Forevacuum
flange DN
DN 16
DN 16
DN 16
DN 10/16
DN 10/16
DN 10/16
VCR
DN 10/16
VCR
DN 10/16
Purge
gas
connection
yes
yes
no (but manually
actuated venting valve)
no (but manually
actuated venting valve)
no (but manually
actuated venting valve)
yes
yes
no (but 60 mm
adapter DN 16 KF)
yes
yes
yes
yes
no*
no*
no*
no*
no*
no*
no*
Purge valve
mounted to
pump
yes
yes
no
no
no
yes
yes
yes
yes
yes
yes
yes
yes
yes
yes
yes
yes
yes
yes
Splinter
guard
installed
yes
yes
yes
yes
yes
yes
yes
yes
yes
yes
yes
yes
yes
yes
yes
yes
yes
yes
yes
Rotor
coated
Swagelock 1/4
tube connector
Swagelock 1/4
tube connector
Swagelock 1/4
tube connector
Swagelock 1/4
tube connector
Swagelock 1/4
tube connector
John-Guest fitting
6 mm Rohr
Edelstahl-Schlauchtllen 3/8
Swagelock 1/4
tube connector
Cooling
water
connection
yes
yes
yes
yes
no
yes
yes
yes
yes
yes
yes
yes
no
no
no
no
no
no
no
400047V0012
400047V0011
400030V0002
400027V0002
400027V0001
400026V0002
400026V0001
400021V0002
400020V0002
400110V0121
400110V0023
400110V0021
400110V0017
400110V0011
400100V0006
400100V0005
Part No.
yes
no
400047V0002
400047V0001
yes, but no
400047V0010
cooling coil for
the housing
yes
no
yes
yes
no
yes
no
yes
yes
no
no
no
no
no
no
no
Temperature
sensor for
cooling water TMS**
Description
40 KF
40 KF
40 KF
40 KF
40 KF
40 KF
40 KF
40 KF
40 KF
40 KF
40 KF
40 KF
Forevacuum
flange DN
DN 10/16
DN 10/16
DN 10/16
DN 10/16
DN 10/16
Thread 1/4
Purge
gas
connection
no*
no*
no*
no*
no*
yes
yes
yes
yes
yes
no
no
Purge valve
mounted to
pump
* Purge vent valve Part No. 121 36 or purge vent Tee can be mounted
320 ISO-F
MAG W 3200
MAG W 3200 CT
250 CF
320 ISO-F
MAG W 2800 CT
MAG W 2800
250 CF
MAG W 2800 CT
250 CF
250 ISO-F
MAG W 2800 C
MAG W 2200
250 ISO-F
MAG W 2200 C
200 CF
250 ISO-F
MAG W 2200 C
MAG W 1300
250 ISO-F
MAG W 2200 C
160 CF
200 ISO-F
Pump
MAG W 830
Inlet
flange DN
yes
yes
yes
yes
yes
yes
yes
yes
yes
yes
yes
yes
Splinter
guard
installed
no
no
no
no
no
yes
yes
yes
yes
yes
yes
yes
Rotor
coated
Thread 1/8
Stainless steel
hose nipples 1/2
Stainless steel
hose nipples 1/2
Cooling
water
connection
no
no
no
no
no
yes
yes
yes
yes
no
yes
yes
no
no
no
no
no
yes
yes
yes
no
no
no
no
Temperature
sensor for
cooling water TMS**
400003V0003
400006V0071
400081V0061
400110V0051
400100V0041
400003V0002
400006V0002
400000V0002
400000V0001
400081V0020
400081V0021
400081V0011
Part No.
Description
25
Description
Connecting cables
Cable DRIVE/BEARING
Cable
length
1.5 m
bended 225
straight
straight
400036V0001
1.5 m
straight
straight
straight
400036V0007
1.5 m
bended 40
bended 180
straight
400036V0025
3m
straight
bended 180
straight
400036V0006
3m
bended 225
straight
straight
400036V0008
3m
straight
bended 270
straight
400036V0009
5m
bended 225
straight
straight
400036V0004
5m
straight
straight
straight
400036V0010
8m
bended 225
straight
straight
400036V0005
10 m
bended 225
straight
straight
400036V0002
20 m
bended 225
straight
straight
400036V0003
23 m
bended 225
straight
straight
400036V0012
30 m
bended 225
straight
straight
400036V0011
Part No.
1.5 m
bended 225
straight
bended 180
400037V0001
1.5 m
straight
straight
bended 180
400037V0007
1.5 m
bended 40
straight
bended 180
400037V0025*
3m
bended 225
straight
bended 180
400037V0008
5m
bended 225
straight
bended 180
400037V0004
8m
bended 225
straight
bended 180
400037V0005
10 m
bended 225
straight
bended 180
400037V0002
20 m
bended 225
straight
bended 180
400037V0003
Part No.
Cable Purge/Vent (for optional purge vent valve Part No. 121 33 only)
Cable
length
1.5 m
straight
bended
bended
400038V0007
3m
bended 225
bended
bended
400038V0006
10 m
bended 225
bended
bended
400038V0002
20 m
straight
bended
bended
400038V0009
* Only this TMS cable fits to the MAG 2000 CT/CTS. Other lengths on request.
26
Part No.
Description
0
0
90
270
90
DRIVE/BEARING
connection
TMS
connection
DRIVE/BEARING
connection
225
180
180
27
Description
27
455
max. 115
128
135
196
113
straight plugs
bended plugs
198
3.3
Each Fuse 4 A
122.4
Fu
se
ch
Ea
Co
X7
4
se
Fu
Sta
Ma
T
AR
ST
TM
tus
in
MA
G.D
RIV
19 installation frame
OP
ST
4 x M3 screws
28
Description
MAG W 830 C
MAG W 1300 C
MAG W 830 C
Inlet flange A
160 ISO-F 225
B
200
C
151
D
353
E
15
F
45
G
8
Forevacuum connection
DN 40 KF / DN 25 KF
MAG W 1300 C
260
213
306
15
30
12
DN 40 KF / DN 25 KF
MAG W 1300 C
310
261
306
15
30
12
DN 40 KF
MAG W 1300 C
261
306
DN 40 KF
16
262
Forevacuum
connection
109.5
35
50
72
260
175
113
20
4 0
G
30
163
xF
,7
14
103
R1
98
8.3
)
0
36
(=
24
M8
11
50
31
30
85
30
30
29
Description
A
B
16
Inlet flange
200 ISO-F
A
285
B
260
C
213
D
12
E
30
G
15
H
307
250 ISO-F
335
310
261
12
30
15
307
200 CF
253
231
200
24
15
7.5
327
262
107
84
118
76
29
DN 40 KF
11
164.5
175
26
116
.5
Dx
(=
70
36
159
)
0
43
15
30
285
M8, 15
15 mm
mmdeep
deep
M8,
9
32
60
105
30
Heaterband
Heatband
11
182
60
Description
MAG 2000 C
290
308
393
272
DN 250 ISO-K
339
DN 40 KF
45
DN 16 KF
39
58
202
148
211
16
17 2
9
11
90
39,5
31
Description
MAG 2000 CT
290
308
393
272
DN 250 ISO-K
339
DN 40 KF
45
DN 16 KF
39
58
202
151
16
11
1
17 62
9
211
90
39,5
32
Description
308
393
272
DN 250 ISO-K
339
DN 40 KF
45
DN 16 KF
20
58
202
Cooling water IN
211
16
15
4
151
12
32
39,
33
Description
MAG W 2000 C
335
303
388
273
DN 250 ISO-F
339
Cooling water IN
199
40
197
32
16
43
10
16
0
3
11
38
11
42
11x 3
34
67
38
35
47
Forevacuum
flange DN 40 KF
Description
MAG W 2000 CT
335
273
303
388
DN 250 ISO-F
339
Cooling water IN
199
67
38
35
47
Forevacuum
flange DN 40 KF
05
32
R2
16
43
40
197
Heater
10
16
11
11
38
0
11x 3
35
Description
317
Inlet flange
200 ISO-F
A
285
B
396
C
213
D
260
250 ISO-F
335
371
261
310
25
23
78
85.5
45
DN 40
164.6
199
36.5
12
39
3
(=
0
x 3 30
36
D
3
11
36
R120
15
R11
)
60
R1
55
Description
36
29
16
335
283
286
293
301
45
DN
40
68
371
317
165
199
49
25
57.5
G1/8"
36.5
40
39
45
37
Description
Inlet flange
250 ISO-F
A
335
B
310
C
261
D
11
E
3
F
293
G
361
H
408
320 ISO-F
425
395
318
13.5
248
316
363
250 CF
305
284
8.4
307
375
422
A
B
C
369
84
176
DN 40
196.5
199
32
50
12
.5
x3
)
60
(=3
30
30
15
15
53
10
13
38
42
M8/ 14 deep
Description
MAG W 830
202.5
22
DN 160 CF
DN 40 KF
359
308
249
296
260
163
175
20
40
Bearing Connector
1
50
.7
14
R1
103
18
8.4
18
97
85.5
30
31
39
Description
MAG W 1300
253
DN 200 CF
DN 40 KF
328
277
328
218
260
162
175
20
40
196
.7
14
R1
103
15
Bearing
Connector
.8
231
7,5
97
86
30
31
40
Description
MAG W 2200
305
45
322
401
316
DN 250 CF
DN 40 KF
164
199
31
0
25
5
11
40
149.6
11.25
5
53.
28
Bearing Connector
45
41
Description
MAG W 2800
305
DN 250 CF
39
66
58
337
307
391
422
369
196
199
32
8.4
48
11
46.
42
5.625
28
11
Bearing
Connector
50
DN 40 KF
0
(=36
11.2
31
50
1.2
x1
39.5
Description
MAG W 3200
425
DN 320 ISO-F
39
66
57,5
84
176
332
363
284
369
196.5
199
31
30
50.
DN 40 KF
31
15
43
.5
39
13
11
Bearing
Connector
1
10
138
43
2
Transport and storing
Remove the equipment from the transportation box and keep the packaging.
Make sure that the product has not been damaged during transportation. If
this unit is damaged contact your carrier and inform Oerlikon Leybold
Vacuum if necessary. For storage of the product, use the packaging provided.
Lift the pump by the crane eyelets.
You can position the pump on the base plate for transport with a lift-truck.
Protect the pump against slipping and tipping over.
Caution
Warning
Do not stand below the pump while connecting or removing the MAG.
The MAG is shipped in a sealed PE bag with desiccant. Do not open the
sealed package until immediately before installing.
Do not remove the covers and blanking flanges until you are ready to make
the connections, to ensure that the MAG is installed under the cleanest possible conditions.
44
Installation
Installation
MAG W 830 C
Part No. 400100V0005
Inlet flange
Forevacuum flange
PK
connection
DRIVE/BEARING
connection
Cooling water
connection
Correct
17 mm
35 mm
Wrong
Caution
Install the splinter guard as shown. Installing the
splinter guard upside down may lead to contact between splinter guard and rotor during fast venting of
the pump
8 bolts M10 x 35
Installation torque per bolt 35+5 Nm
Bolt quality:12.9 according to EN ISO 898-1
with coating
0,2% yield strength > 1080 N/mm2
Fig. 3.1 MAG W 830 C: Connection elements, installing the splinter guard and fixing the intake flange
45
Installation
MAG W 830 C
Part No. 400100V0006
Inlet flange
Forevacuum flange
PK
connection
Purge gas inlet
DRIVE/BEARING
connection
Cooling water
connection
Correct
Wrong
Caution
Install the splinter guard as shown. Installing the
splinter guard upside down may lead to contact
between splinter guard and rotor during fast
venting of the pump
8 bolts M10 x 35
Installation torque per bolt 35+5 Nm
Bolt quality:12.9 according to EN ISO 898-1
with coating
0,2% yield strength > 1080 N/mm2
Fig. 3.2 MAG W 830 C: Connection elements, installing the splinter guard and fixing the intake flange
46
Installation
MAG W 1300 C
Inlet flange
Forevacuum flange
Cooling water
connection
PK
connection
DRIVE/BEARING
connection
ISO-F flange
Correct
DN 200: 260 mm
DN 250: 310 mm
DN 200: 213 mm
DN 250: 261 mm
14 mm
35 mm
Wrong
Caution
Install the splinter guard as shown.
Installing the splinter guard upside down
may lead to contact between splinter
guard and rotor during fast venting of
the pump
ISO-K flange
Vacuum sealing disk consisting
of centering ring and O-ring
with outer support ring
14 mm
Retaining ring
ISO-K flange
35 mm
12 bolts M10 x 35
Installation torque per bolt 35+5 Nm
Bolt quality:12.9 according to EN ISO 898-1
with coating
0,2% yield strength > 1080 N/mm2
Fig. 3.3 MAG W 1300 C: Connection elements, installing the splinter guard and fixing the intake flange
47
Installation
Forevacuum flange
Purge gas
valve
Cooling water
connection
Purge gas inlet
TMS
connection
PK
connection
DRIVE/BEARING
connection
Correct
DN 200 CF
10 mm
2 mm
40 mm
48 mm
24 bolts M8 x 40
Installation torque per bolt 25+5 Nm
Bolt quality: 10.9 according to
EN ISO 898-1 with coating
0,2% yield strength > 900 N/mm2
Wrong
Caution
Install the splinter guard as shown.
Installing the splinter guard upside down
may lead to contact between splinter
guard and rotor during fast venting of
the pump
DN 200: 260 mm
DN 250: 310 mm
ISO-F flange
DN 200: 213 mm
DN 250: 261 mm
Fig. 3.4 MAG (W) 1500 CT: Connection elements, installing the splinter guard and fixing the intake flange
48
12 bolts M10 x 35
Installation torque per bolt
35+5 Nm
14 mm
Bolt quality:12.9 according
to EN ISO 898-1
35 mm with coating
0,2% yield strength >
1080 N/mm2
Installation
Forevacuum flange
Purge gas inlet
PK connection
DRIVE/BEARING
connection
TMS connection
Cooling
water
Cooling
waterOUT
OUT
Cooling
water IN
IN
Cooling
water
Splinter
guard
Part No.
400153V0007
335
310
12
12 bolts M10 x 35
Installation torque per bolt: 35+5 Nm
Bolt quality:12.9 according to
EN ISO 898-1 with coating
0,2% yield strength > 1080 N/mm2
35
Correct
Wrong
Caution
Install the splinter guard as shown.
Installing the splinter guard upside
down may lead to contact between
splinter guard and rotor during fast
venting of the pump
Fig. 3.5 MAG 2000 C, CT, CTS: Connection elements, installing the splinter guard and fixing the intake flange
49
Installation
Correct
DRIVE/BEARING
connection
(not visible)
310 mm
261 mm
14 mm
35 mm
Wrong
ISO-F flange
Caution
Install the splinter guard as shown. Installing
the splinter guard upside down may lead to
contact between splinter guard and rotor
during fast venting of the pump
12 bolts M10 x 35
Installation torque per bolt 35+5 Nm
Bolt quality:12.9 according to EN ISO 898-1
with coating
0,2% yield strength > 1080 N/mm2
Fig. 3.6 MAG W 2000 C, CT: Connection elements, installing the splinter guard and fixing the intake flange
50
Installation
MAG W 2200 C
Inlet flange
Forevacuum flange
Cooling water
connection
DRIVE/BEARING
connection
Purge gas in
PK connection
PK connection
Cooling water
connection
DRIVE/BEARING
connection
Purge gas in
1
2
3
Housing
Splinter guard
Ring
DN 200: 260 mm
DN 250: 310 mm
DN 200: 213 mm
DN 250: 261 mm
14 mm
35 mm
12 bolts M10 x 35
Installation torque per bolt 35+5 Nm
Bolt quality:12.9 according to EN ISO 898-1
with coating
0,2% yield strength > 1080 N/mm2
Fig. 3.7 MAG W 2200 C: Connection elements, installing the splinter guard and fixing the intake flange
51
Installation
MAG W 2800 C, CT
with ISO-Fflange
Inlet flange
Heater band
Forevacuum flange
1
2
3
TMS
connection
DRIVE/BEARING
connection
310 mm
Housing
Splinter guard
Ring
261 mm
15.5 mm
35 mm
12 bolts M10 x 35
Installation torque per bolt 35+5 Nm
Bolt quality:12.9 according to EN ISO 898-1
with coating
0,2% yield strength > 1080 N/mm2
Fig. 3.8 MAG W 2800 C, CT: Connection elements, installing the splinter guard and fixing the intake flange
52
Installation
MAG W 2800 CT
with CF flange
Inlet flange
Heater band
Forevacuum flange
TMS
connection
DRIVE/BEARING
connection
Correct
10 mm
2 mm
40 mm
48 mm
Wrong
Caution
Install the splinter guard as shown. Installing the
splinter guard upside down may lead to contact
between splinter guard and rotor during fast
venting of the pump
Fig. 3.9 MAG W 2800 CT with CF flange: Connection elements, installing the splinter guard and fixing the intake flange
53
Installation
MAG W 3200 CT
Inlet flange
Heater band
Forevacuum flange
TMS
connection
DRIVE/BEARING
connection
395 mm
1
2
3
Housing
Splinter guard
Ring
318 mm
14 mm
40 mm
Einlass
10 bolts M12 x 40
Installation torque per bolt 45+5 Nm
Bolt quality:12.9 according to EN ISO 898-1
with coating
0,2% yield strength > 1080 N/mm2
Fig. 3.10 MAG W 3200 CT with DN 320 ISO-F flange: Connection elements, installing the splinter guard and fixing the intake flange
54
Installation
MAG W 830
Inlet flange
Forevacuum flange
PK
connection
DRIVE/BEARING
connection
Cooling water
connection
Correct
10 mm
2 mm
40 mm
48 mm
Wrong
Caution
Install the splinter guard as shown. Installing the
splinter guard upside down may lead to contact
between splinter guard and rotor during fast venting of the pump
Fig. 3.11 MAG W 830: Connection elements, installing the splinter guard and fixing the intake flange
55
Installation
MAG W 1300
Inlet flange
Forevacuum flange
PK
connection
DRIVE/BEARING
connection
Cooling water
connection
Correct
10 mm
2 mm
40 mm
48 mm
Wrong
Caution
Install the splinter guard as shown. Installing the
splinter guard upside down may lead to contact
between splinter guard and rotor during fast
venting of the pump
Fig. 3.12 MAG W 1300: Connection elements, installing the splinter guard and fixing the intake flange
56
Installation
MAG W 2200
Inlet flange
Forevacuum flange
Cooling water
connection
DRIVE/BEARING
connection
Correct
10 mm
2 mm
40 mm
48 mm
Wrong
Caution
Install the splinter guard as shown. Installing the
splinter guard upside down may lead to contact
between splinter guard and rotor during fast
venting of the pump
Fig. 3.13 MAG W 2200: Connection elements, installing the splinter guard and fixing the intake flange
57
Installation
MAG W 2800
Inlet flange
Forevacuum flange
PK
connection
Cooling water
connection
DRIVE/BEARING
connection
Purge gas inlet
(blind flanged)
Correct
10 mm
2 mm
40 mm
48 mm
Wrong
Caution
Install the splinter guard as shown. Installing the
splinter guard upside down may lead to contact
between splinter guard and rotor during fast
venting of the pump
Fig. 3.14 MAG W 2800: Connection elements, installing the splinter guard and fixing the intake flange
58
Installation
MAG W 3200
Inlet flange
Forevacuum flange
PK connection
Cooling water
connection
DRIVE/BEARING
connection
Purge gas inlet
(blind flanged)
395 mm
1
2
3
Housing
Splinter guard
Ring
318 mm
14 mm
40 mm
10 bolts M12 x 40
Installation torque per bolt 45+5 Nm
Bolt quality:12.9 according to EN ISO 898-1
with coating
0,2% yield strength > 1080 N/mm2
Fig. 3.15 MAG W 3200: Connection elements, installing the splinter guard and fixing the intake flange
59
Installation
Magnetic field
Radiation
60
Installation
1
2
Aluminum cover
Screws
Splinter guard
61
Installation
Correct
Wrong
Warning
The pump must be securely attached. If the pump should suddenly seize,
inadequate attachment could cause the pump to break away or allow
internal pump parts to be discharged. Never operate the pump (in bench
tests, for instance) without its being connected at the vacuum chamber.
If the pump should suddenly seize, a high decceleration torque will have
to be absorbed by the system. To accomplish this, use all bolts provided
by Oerlikon Leybold Vacuum for fastening the high-vacuum flange or use
bolts of the prescribed quality; see also the Fig. 3.1 to 3.19.
Pumps with ISO-K flange must not be attached with clamps.
Mount the MAG as close as possible to the vacuum chamber. If the MAG is
permanently flanged to a vacuum chamber with a weight exceeding 500 kg,
it will not be necessary to secure it in any other way.
The vacuum chamber must be securely attached to the floor or a solid wall.
In case of lighter vacuum vessels secure the pump additionally. The pumps
bottom is equipped with tappered holes for fastening a support; see dimensional drawings.
Earthquake protection
Vibration influence
62
For earthquake protection fix the pump as shown in Fig. 3.1 to 3.15.
Depending on the chambers weight and fixing use the boreholes in the
pumps bottom in addition. The standard fixing for the converter is shown in
Fig. 1.11.
If several turbomolecular pumps are installed to the vacuum chamber of the
same system, there is the risk of interference (vibration interference between
the pumps). If such a risk exists please contact Oerlikon Leybold Vacuum
Application Support.
Installation
Nut
ISO-F flange
ISO-F flange
Bolt
Nut
Fig. 3.19 For the MAG with ISO-K flange: Clamped flange connection with collar flanges
Isolation valve
Warning
63
Installation
The foreline isolation valve is recommended to protect the MAG from shock
venting in case of uncontrolled shut down of the backing pump. This valve
must be able to close fast enough to avoid pressure increase in the MAG.
In case of an oil-sealed backing pump the foreline isolation valve protects the
MAG from backstreaming oil vapor during standstill.
Connect the forevacuum flange of the MAG to the backing pump.
The torque on the forevacuum connection flange must not exceed the values
shown in Fig. 3.21.
Warning
64
The forevacuum line must be tight. Hazardous gases can escape at leaks
or the gases being pumped can react with the air or humidity. We recommend a leak check.
Installation
1
2
3
4
5
6
7
8
9
Turbomolecular pump
Forevacuum gauge point
Backing pump
Anti-vibration bellows
Forevacuum valve
High vacuum valve
Purge gas connection
Valve in the roughing line
Electronic frequency converter
M
Mq
M < 150 Nm
Mq < 150 Nm
Fig. 3.21 Maximum torques for the forevacuum connection
65
Installation
Pump cooling
Bypass
Fig. 3.22 Schematic of the cooling water flow for MAG (W) 1500, 2800, 3200 CT
3.5
10 - 30 C
Inlet pressure
2 to 7 bar absolute
Sediments
Particle size
< 150 m
Electrical conductivity
pH value
7 to 8.5
66
Installation
Cooling water
out
Cooling water
in
Coolingwater
water OUT
OUT
Cooling
Coolingwater
water IN
IN
Cooling
67
Installation
350
l/h
300
Operation window
250
Flow
200
150
120
100
50
0
5
10
15
20
25
30
35
40
Temperature
400
l/h
350
MAG 2000 C
MAG (W)
1500/2800/3200 CT:
Bypass operation
300
All pumps: Cooling
Flow
250
200
150
100
50
0
68
bar
Installation
Warning
Caution
With no voltage applied the purge gas and vent valve is closed.
The purge gas and vent valve will be open when switching on the
MAG.DRIVEdigital. The red LED at the purge gas valve lights.
69
Installation
Fo
the
L
rev
val EDs
ac
ve
ligh
uu
is o
tw
m
po
pe
he
rt
n
n
upper magnetic
bearing
Motor
lower magnetic
bearing
lower magnetic
bearing
24 V
Sensor PVW 2,4
Pu
Pre
Sin
Pu
Ch
wh op Ve
Pu
Tu
rbo
rge
rge
mp
ok
en ens nt v
ter
ssu
e
mo
e
t
a
ga
g
p
h
r
a
d
(
l
er
ca
v
a
u
e
b
e
lec
m
s,
s
r
pu yp : s
ge
eg
pill
eta
val
e.g
ula
m
a
h
u
a
g
ve:
ss ow
lato
l fil
ry)
p
a
rp
.N
s in
is t aro n c
ter
sh
um
r
2, A
l
o
e
o
p
t
wn
be und lose
ro
rd
op
ven the d;
ry
e
ted ch
n
air
ok
e
Fig. 3.25 Purge gas and vent valve assembly and turbomolecular pump (schematic)
Technical data
Purge gas pressure, absolute
Purge gas
Max. moisture content
Purge gas flow
Nitrogen or similar
10 ppm
36 sccm 5 sccm
(36 sccm = 0.6 mbarl/s)
480010% sccm
Leak rate
70
1/4
Installation
Purge gas
Choke (capillary)
Venting gas
MAG W 1300 C,
Part No. 400110V0017:
Purge gas connection with capillary
for flow reduction to 36 sccm at
1.5 bar abs.
Caution
71
Installation
G 1/4"
Filter mounted:
O-ring in the groove
Fi
O
lte
-ri
r
ng
(
fix
O
-ri
in
g)
ng
(s
ea
lin
g)
Ad
ap
te
Se
r
ali
n
Pu
g
rg
rin
e
g
ga
s
va
Ve
lve
nt
in
g
va
lve
Purge gas
or air
72
Installation
Fig. 3.29 Manually actuated venting valve at the MAG 2000 C/CT/CTS
DN 16 KF
0.6 mbarls-1
36 sccm
Caution
The pump may be operated only with a suitable frequency converter and
a suitable connector cable.
Warning
Peak voltages of up to 130 V may be present at the connector line between the frequency converter and the pump; mains voltage is present at
the heater.
Route all cables so as to protect them from damage.
73
Installation
Keep the protective caps on the cable connectors, during the routing process, to protect the pins and sockets.
Support the weight at the cables adequately, to protect the connector pins
and sockets from excessive strain. Example: Support the DRIVE/BEARING
cable within 24 to 30 inches from the pump or converter connection.
The protection rating for the connectors is IP 30.
Do not expose the pump, the frequency converter or the connections to dripping water.
Install 16 A fuses for the converter.
When connecting the frequency converter to a polyphase network between
two phases, provide additional external fuse protection for both phases (fuse
amperage: 16 A). The external fuse must have a minimum rated braking
capacity of 5 kA.
Warning
74
Installation
1 = Phase L
2 = Not assigned
3 = Neutral N
1 2 3
s
Caution
Warning
Connect the converter (X20) to the motor and magnetic bearing connection
of the pump (X23) and the PK communication connection (X24) using the
DRIVE/ BEARING cable.
Connect the converter (X21) to the TMS connection (X30) using the TMS
cable.
Also refer to Fig. 3.33.
Make sure that you have fixed all cables properly.
75
Installation
76
Installation
The selection of signals for the option relay and the adjustment of their
thresholds can be achieved via the operator control menu; see Section
4.11.4.
Analog output
The converter has an analog output which provides an analog signal (0..10 V)
with a 10-bit resolution. The analog output function can be alternatively used
to output
motor current
actual frequency
motor temperature
rotor displacement signals (PW24, PV13, PZ12)
The output value can be increased or reduced by a scale factor; see Section
4.11.4 Set Converter.
77
Installation
Analog inputs
The converter has two analog inputs with a 10-bit resolution.
Input signal:
0...10V
A supplementary function can be set for analog input 2 via the operator control menu; see Section 4.11.4:
No function:
78
Installation
DRIVE/BEARING
X24
X14
X23
X20
X19
X30
TMS
X21
MAINS
Control plug
X24
DRIVE/BEARING
X14
X23
X20
X19
X21
MAINS
Control plug
DRIVE/BEARING
X14
Purge
X20
Vent
X19
X23
Purge/Vent
X21
MAINS
Control plug
79
Installation
Relay 1 Failure
X14.18
No failure
X14.1
X14.34
Start command
applied
&
Actual frequency
X14.2
Normal operation
X14.35
Relay 3 Warning
X14.20
Warning
X14.3
X14.36
Relay 4 Acceleration
X14.21
Acceleration
X14.4
X14.37
Relay 5 Deceleration
X14.22
Deceleration
X14.5
X14.38
Function
analog input 2
Analog input 2
Frequency
setpoint
Analog input 2
X14.17
Analog input 1
Analog input 1
X14.16
Analog ground
Fig. 3.34 Function diagram outputs, Part 1 & inputs
80
X14.32/33
Installation
Motor- or bearingtemperature
Threshold
Motor current
Function
signal relay
Threshold
Act. frequency
1
2
Threshold
3
4
5
No cooling water
No purge gas
TMS temp. o.k.
Venting
Pump standstill
Start command
Power supply o.k.
Power failure
Stand-by
X14.23/24/25/26
X14.6/7/8/9
7
8
X14.39/40/41/42
9
10
11
Function
analog output
Scale
Analog output
Rotor displacement
PVW13peak
PVW24peak
PZ12peak
X14.50
4
5
Analog ground
X14.32/33
Current limiting
80 mA
+15 V
X14.28/29
1
2
3
4
5
6
7
8
9
81
Operation
Operation
Caution
Purge gas
All materials used inside the pump are compatible with typical gases used for
semiconductor processes.
Please consult Oerlikon Leybold Vacuum for recommendations on pump
models for specific processes and application requirements.
Corrosion protection
To protect the pump from corrosive gases it is mandatory to use dry Nitrogen
purge during operation of the pump.The purge gas protects the bearing section and the motor from corrosive gases.
The rotor and the stator of the pump are KEPLA-coated to prevent corrosive
attack caused by the process gases. The corrosion protection of the pump
is effective only when the pump is protected from moisture during standstill
and storage. If the process gas contains moisture, contact Oerlikon Leybold
Vacuum for recommendations.
Sublimation
Some media (e.g. AlCl3) can sublimate in the pump and form deposits. Thick
coatings can infringe on the required operating clearence and ultimately
cause the pump to seize. These deposits can also react with moisture and
generate corrosive gases (e.g. HCl).This can become very critical when the
pump is exposed to air. Deposits can be avoided in many processes by heating the pump with TMS (Temperature Management System).
The TMS is integrated in all CT-versions. The purpose of the TMS is to keep
the pump temperature in a constant range. To achieve the temperature the
pump is equipped with a heaterband.
Layers
Caution
Some media ( e.g. metall organic compounds ) can decompose at the hot
surface of the pump and build layers. Please direct any inqueries to the
manufacturer.
In order to handle gases or media (e.g. AlCl3) which can form deposits
inside the pump it is required to use the TMS (Temperature Management
System). The temperature selected for such processes has to be set to
the maximum value.
Ignition danger
During operation the pressure inside the MAG is so low that there is no danger of ignition (at pressures below about 100 mbar). A hazardous condition
will be created if flammable mixtures enter the hot pump at pressures above
100 mbar. During operation the pump can reach temperatures as high as
120 C (248 F). If the pump is damaged, sparks could occur which could
ignite explosive mixtures.
Also note the safety information provided by the gas supplier.
82
Operation
Protecting the
touch-down bearings
Warning
83
Operation
103
mbar
Forevacuum pressure
102
101
100
10-1
10-2
10-3
0
10
20
30
40
Time/s
50
60
Fig. 4.1 Curve for safe venting of the MAG; pressure rise as a function of venting time
Warning
The pump can become so hot during operation that it represents a burn
hazard:
Frequent acceleration and deceleration of the pump or operating cycles between stand-by and normal operation put pressure on the rotor. Therefore it
has to be changed after 5000 start or stand-by cycles.
Venting
As to suitable gases, see Section 4.1.
Venting Method
The pump must be vented via the purge gas and venting valve or the vent
port when shutting the pump down.
When additionally venting the vacuum chamber, the venting function of the
purge gas and venting valve must be opened before opening the chamber
valve. This will ensure the presence of a higher pressure in the magnetic
bearings compared to the remaining vacuum area. This will prevent particles,
dust or aggressive gases from being forced into the not yet vented motor
chamber of the pump.
84
Operation
Function description
The TMS is only in function, when a MAG CT version is connected. The heater will be activated when the mains is switched on. The TMS controls the
heating and water cooling to maintain the pump at the specified setpoint
temperature.
Heater ON OFF
Cooling OFF ON
TA > Tset + 2 K
Cooling ON OFF
TA < Tset + 1 K
TMS ok
Warning TMS
Settings
The temperature (TMS) setpoint can be programmed via the front panel keys
at every time.
Principally the factory presetting will be used. The setting is saved in the
pumps memory chip. Before changing any setpoint value request Oerlikon
Leybold Vacuum!
For the setting refer to 4.11.6 Operating menu, Set TMS.
85
Operation
TTMS
T +5 K
TA
T +2 K
T +1 K
Tset
T 1 K
T 5 K
TMS Code
3 4 3
6 4 6
34
3 2
Heater ON
Cooling ON
Warning
Signal TMS OK
Fig. 4.2 Typical function diagram TMS for the MAG.DRIVEdigital
Heat up
The setpoint temperature will be reached within 30 to 60 minutes depending
on cooling and environmental conditions. For temperature sensitive applications observe the cooling water specifications (refer to Section 1.5 and 3.5).
Caution
86
In order to guarantee correct temperature setting of the pump it is required to provide the cooling water within the envelope described in Section
3.5.
Operation
Code Description
H Heating pump
H O K Temp. TMS ok, heater ON
O K Temp. TMS ok
C O K Temp. TMS ok, cooling ON
W Temp. TMS > TMSSet +5K
O F F TMS cancelled via control plug X14
Actual temperature
The actual temperature is displayed on the operating display (refer to 4.11.1
Operating menu, Basic menu)
Signal TMS OK
If the actual TMS temperature lies in the range 5K from the setpoint temperature, the TMS OK signal can be output via the option relay. The option relay
must be programmed for this function (refer to Section 3.7.3 Control plug
X14, Relay outputs)
4.4
(only for MAG (W) 1500 CT, 2200 C, 2800 C/CT, 3200 CT)
For safety reasons, motor power is limited depending on the temperatures
within the pump. Motor power will be highest when the pump is cold.
87
Operation
4.5
Continuous operation at a high motor current will reduce the service life of
the rotor. In such cases additional safety measures need to be introduced
which must be co-ordinated with Oerlikon Leybold Vacuum.
Also warming up of the rotor due to other influences will reduce its service
life, for example, pumping of hot process gases.
Turbomolecular pumps contain a large amount of kinetic energy due to
the high rotational speed in combination with the mass of their rotors. In
case of a malfunction of the system for example rotor/stator contact or
even a rotor crash the rotational energy may be released.
In most applications the motor current will remain during continuous operation below the permitted maximum value. The alarm thresholds have been selected in consideration of this maximum value. Depending on the operation
conditions the maximum service life of the rotor is 40,000 h. The operation
conditions depend on type of the gas, throughput and pressure. With high
gas load, especially when pumping Ar and SF6, the maximum service life of
the rotor may be shorter. In this case we must ask you to consult us.
Also ensure that the high vacuum flange cannot warm up above the permissible temperature level.
4.6 Bakeout
Only for pumps with CF flange
If pressures in the range of 10-8 mbar or below are to be developed, the
vacuum chamber and the components installed therein will have to be baked
out.
Protect the rotor against intensive, direct heat radiation. When baking out at
the forevacuum side at a sorption trap, for example ensure that the components attached direct are not heated to more than 80 C.
The forevacuum pump must be in operation so as to eliminate the vapors
liberated at the sorption trap.
The maximum bakeout temperature of the pump is 120 C.
88
Operation
4.7
Switching on
Switch on the MAG.DRIVEdigital.
The MAIN LED lights green. Wait for approximately 20 to 30 seconds until
the MAG.DRIVE has been initiated.
If the pump has the optional TMS (including e.g. the red heater band) the
heater will be activated. The setpoint temperature will be reached within 30 60 minutes depending on cooling water temperature and flow.
In case of corresponding connection the backing pump will be activated
when switching on the MAG.DRIVEdigital.
Open the purge gas supply. With a converter with default settings the
pumps purge gas valve is open.
Open the cooling water supply.
Press the START key.
The pump runs-up. The STATUS LED is slowly flashing green. When the
STATUS LED is lit permanently green the pump is in normal operation.
Switching off
Press the STOP key.
The STATUS LED is fast flashing green. When the STATUS LED is off the
pump has come to a standstill.
Close the cooling water supply when the pump is switched off in order to
avoid condensate formation in the pump.
The backing pump may be switched off once the MAG has stopped.
If the MAG has been used for pumping corrosive gases it should be purged
with dry nitrogen for one hour before switching off. During down times of the
system take care that neither ambient air nor cleaning agents enter the
pump.
After a failure has occured and has been removed, acknowledge the failure
message by pressing the STOP key.
89
Operation
Remote
X14.11
X1.1
Remote
X1.2
StartStart X14.12
X1.3
GNDMasseX14.10
COM (green)
Is lit if communication has been established via the interface.
STATUS (green/red)
Red, steady light
Red, flashing
Green, flashing (slow)
Green, flashing (fast)
Green, steady light
=
=
=
=
=
Failure
Warning
Start delay, Acceleration
Deceleration, Kinetic buffering
Normal operation / Stand-by
MAIN (green)
This lamp is lit if the power is switched-on, and all of the supply voltages for
operation are available.
Flashes when the power fails as long as the power supply voltages in the
converter are maintained by the kinetic buffering.
4.8 Remote control
The pump can be switched-on or off using the START/ STOP keys or via
control connector X14.
X14.11 not connected = Start/Stop via the operator control panel
Jumper X14.11-X14.10 = Start/Stop via control input X14.12
90
Operation
+15 V
~ 3 kOhm
X14.48
Shutdown
=1
X14.47
REMOTE
START
X14.11
0V=0
15 V = 1
X14.12
-1
Operating mode:
Programming only via
serial interface
Start delay time
P12
X14.10
1
P36
0
START
interface
START
key pad
STOP
key pad
&
2
START
pump
1
0
STOP
interface
No
Failure
Failures
causes
braking operation
STOP
pump
(braking the pump
with the pulsed resistor)
91
Plug-in control
4.9
0 Hz
If the pump has the optional TMS (including e.g. the red heater band) the
heater will be activated. The setpoint temperature will be reached within 30 60 minutes depending on cooling water temperature and flow.
In case of corresponding connection the backing pump will be activated
when switching on the MAG.DRIVEdigital.
Open the purge gas supply.
Open the cooling water supply.
Press the START key.
The pump runs-up.
Acceleration
15.0 A
250 Hz
92
Plug-in control
Acceleration
14.5A 254Hz HOK
Esc
Mon
Start
Stop
Prog
Key
Function
Esc
Mon
No function
Prog
Enter
Start
Stop
<
>
Enter
+
_
Operating display
Acceleration
14.5A 254Hz HOK
Operating status
H Heating pump
H O K Temp. TMS ok, heater ON
O K Temp. TMS ok
C O K Temp. TMS ok, cooling ON
W Temp. TMS > TMSSet +5K
O F F TMS cancelled via control plug X14
Failure
Accel. Time
93
Plug-in control
Switching off
The MAG.DRIVEdigital controls the venting automatically provided purge gas is
connected to the MAG and the MAG.DRIVEdigital is programmed correspondingly (Vent on).
Press the STOP key.
Deceleration
15.0 A
400 Hz
0 Hz
If the MAG has been used for pumping corrosive gases it should be purged
with dry nitrogen for one hour before switching off. During down times of the
system take care that neither ambient air nor cleaning agents enter the
pump.
4.10 Operating statuses
Switch-On Guard
The converter goes into the Switch On Guard operating status after the
power is switched on and after initialization. If there is no warning or failure, it
changes over into the Ready condition.
After a failure has been acknowledged, the converter goes into the Switch
On Guard operating status. The failure must be acknowledged a second
time, so that it then goes into the Ready condition.
Ready
The converter is ready and waits for the START command. All parameters
can be interrogated or changed via the operator control panel.
The basic menu parameters (refer to 4.11, Operating menu) can be scanned
via the operator control panel.
Acceleration
The pump continuously accelerates with the maximum current. The acceleration time is monitored to ensure that it lies within a programmed value (refer
to the menu settings pump/Accel. Time). If the converter hasnt reached
the normal operating mode during the monitoring time, then it is shutdown
with the failure message Accel. Time.
Normal operation
After a programmable frequency threshold has been reached (refer to the
menu settings pump/Normal Operation), the converter goes into the normal
94
Plug-in control
Mains switched on
Initialization
Switch On Guard
After a failure, quit a second time
Ready
START command
STOP command
Start Delay
Mains ok
Acceleration
Mains failure
Option
command
Normal Operation
Mains Down
Mains failure
Overload
STOP command
Deceleration
Frequency < 5 Hz
Failure occurs
Failure
If a failure occurs
the pump is decelerated
Failure acknowledgement
only possible if f < 5 Hz
Parameter:
P24 = Frequency setpoint
P25 = Factor normal operation
95
Plug-in control
96
Plug-in control
Description
Ready
max.
value
standard
Unit
Operating display
Access
Ready
0.0 A
0 Hz
Enter
Freq. Setpoint
Motor Temp.
150
Motor temperature
Hz r/w on
Enter
actual value
Motor Temp.
50 C
Enter
Converter Temp.
actual value
Bearing Temp.
actual value
actual value
T_A
actual value
Freq. Setpoint
600 Hz
Converter Temp.
40 C
Enter
Cooling Temp.
actual value
Actual PVW 13
actual value
Actual PVW 24
actual value
Actual PZ 12
actual value
Power
actual value
Analog Input 1
actual value
Analog Input 2
actual value
Bearing Temp.
50 C
Enter
Actual Value TMS
70 C
Not Active
Enter
T_A
68 C
Enter
Cooling Temp.
38 C
Not Active
Enter
Actual PVW 13
10%
Enter
Actual PVW 24
10%
Enter
400
600
490
480
Hz
Hz
Hz
Hz
=
=
=
=
24,000
36,000
29,400
28,800
min-1
min-1
min-1
min-1
for
for
for
for
MAG
MAG
MAG
MAG
W
W
W
W
Actual PZ 12
5%
Enter
Power
400 W
Enter
830 C
830, W 1300 (C) & (W) 1500 CT
2200 (C)
2800 & 3200 (C/CT)
Analog Input 1
30.0%
Enter
Analog Input 2
1.5%
Enter
r (read)
r /w (read/write)
on (online)
off (offline)
=
=
=
=
value
value
value
value
can
can
can
can
only be read
be read and written
be changed always
only be changed when the pump stands still
97
Plug-in control
System Info
Enter
Real-Time Clock
99.12.31 23:59
Enter
4.11.2
Menu item
Description
Product Name
MD Digital
min.
value
Enter
Conv. Cat.-No.
99999999999
max.
value
default
Access
Unit
Real-Time Clock
99.12.31 23:59
Real-Time Clock
Format: YY.MM.DD HH:MM
Greenwich-Mean-Time (GMT)
Reference-Time for false memory
actual value -
Product Name
MD Digital
actual value -
Enter
Conv. SR SW-Rev.
6.55.35
Conv. Cat.-No.
99999999999
actual value -
Conv. Serial-No.
99999999999
actual value -
Conv.
SR SW-Rev.
6.55.35
actual value -
Conv.AMB
SW-Rev.
6.55.35
SW-Revision. of the
Magn. Bearing-Controller
actual value -
Conv.AMB
Data-R.
1.01
Data-Revision of the
Magn. Bearing Data Setting
actual value -
Conv. HW-Rev.
6.55.35
actual value -
actual value h
Pump Cat.-No.
99999999999
actual value -
Pump Ser.-No.
99999999999
actual value -
Pump Name
Pump name & type
MAG W 1500 CT
actual value -
actual value h
Start Cycles
1234
actual value -
Standby Cycles
1234
actual value -
Operation Cycles**
1234
actual value -
Enter
Conv. Serial-No.
99999999999
Enter
Conv.AMB SW-Rev.
6.55.35
Enter
Conv.AMB Data-R.
1.01
Enter
Conv. HW-Rev.
6.55.35
Enter
Conv. Op. Hours
167772.16
Enter
Pump Cat.-No.
99999999999
Enter
Pump Ser.-No.
99999999999
Enter
Pump Name
MAG W 1500 CT
Enter
Pump Op. Hours
16777 (40000)
Enter
Start Cycles
1234
Enter
Standby Cycles
1234
PK SW-Rev.
6.55.35
SW-Revision of the
pump-memory chip (PK)
actual value -
Enter
Operation Cycles
1234
PK HW-Rev.
6.55.35
HW-Revision
of the pump-memory chip (PK)
actual value -
Enter
PK Data Rev.
6.55.35
actual value -
PK SW-Rev.
6.55.35
Enter
PK HW-Rev.
6.55.35
Enter
PK Data Rev.
6.55.35
** For the permissible number of operating hours/operating cycles the system provides two
thresholds. Exceeding these thresholds will result in a warning message (default) or an alarm
message. The corresponding menu entry for setting up the required response can be found in
the section "Programming the frequency converter.
Threshold for system start If before starting the system the threshold is already exceeded,
starting the system will no longer be possible.
Threshold during operation The permissible threshold during operation is higher compared
to the threshold which is permissible during system start.
Enter
98
Plug-in control
4.11.3
Menu item
max.
value
default
Access
Unit
Failure Total
65535
actual value
Failure TMS
65535
actual value
Failure Storage
Enter
Failure Overload
65535
Failure Total
65535
Enter
actual value
Failure TMS
65535
Enter
actual value
Failure Mains
65535
actual value
F. Storage 0 10
Bearing Temp.
actual value
Failure Overload
65535
Enter
Fail. Temp.Bear.
65535
Enter
Failure Mains
65535
Enter
r
F. Storage 0 10
Bearing Temp.
99.12.31 00:00
167772.16 h
300 Hz
P125: 0
P123: 0
P127: 0
P7: 73
P11: 46
Enter
F. Storage 8 10
Bearing Temp.
Enter
99
Plug-in control
Set Converter
Enter
Menu item
Relay 6 Option
Bearing Temp.
Motor Current
Frequency
No Cooling Water
No Purgegas
TMS OK
Venting
Pump Stand Still
Start Command
Relay 6 Option
Powersupply OK
Mains Down
Relay 7 Option
Enter
Relay 8 Option
Relay 7 Option
Pump Stand Still
Description
Relay 9 Option
Access
min.
value
max.
value
standard
Unit
10
r/w on
10
r/w on
10
r/w on
10
10
r/w on
Enter
Relay 8 Option
Start Command
Enter
Relay 9 Option
Mains Down
Enter
Threshold
70 C
Threshold
200
70
C r/w on
Threshold
150
100
0.1 A r/w on
Threshold
Threshold frequency
for option relay
600
300
Hz r/w on
1023
125
r/w on
100.0
1.00
r/w on
Enter
Threshold
10.0 A
Enter
Threshold
300 Hz
Enter
P/N Analog Out
3 Param
Enter
Scaling Ana Out
1.00
Enter
Analog Input 2
No Function
Freq. Setpoint
Enter
Analog Input 2
no function
r/w off
Function frequency setpoint
Func. X14.45
r/w off
Func. X14.46
r/w off
Start Delay
3600
r/w off
Func. X14.45
Standby Mode
Enter
Func. X14.46
Failure Reset
Enter
Start Delay
0s
Enter
Display
English
German
Enter
Bus Adress
0
Enter
Display
Display language
Bus Address
See next
page
English
German
0
31
r/w on
0
r/w on
Plug-in control
Op.Hours/Cycles
Increases OpHrs
Increase value?
Warning (Default)
Alarm
r/w off
Op.Hours/Cycles
Warning
Enter
Increases OpHrs
Increase value?
w off
Description
4.11.6
Menu item
TMS Setpoint
max.
value
default
Unit
Standby
Setpoint
99
95
600
3600
Access
Enter
Normal Operation
95 %
r/w off
Enter
Max. Accel. time
1000 s
1000
r/w off
Hz r/w on
max.
value
default
20
80/90*
70
Enter
Standby Setpoint
250 Hz
Enter
Set Pump
Access
Unit
Set TMS
Enter
TMS Setpoint
70 C
C r/w on
Enter
4.11.7
Menu item
Set Purge/Vent
Purge / Vent
Option P / V
max.
value
default
Access
Unit
purge OFF
- r/w on
purge ON
Controlling purge / vent
via control plug X14
Installed option
Enter
Purge/Vent
Purge OFF
Purge ON
Via X14
Enter
Option P/V
Option 1
Enter
Plug-in control
General Sequence
Default Values
Freq. Setpoint
5 Hz
0 Hz
5 Hz
0 Hz
Standstill
Standstill
Plug-in control
operating cycles
Warning
System start
Operation
The numbers stated here are defaults which may differ depending on the type of
pump.
Delivery condition
Upon delivery, limits 2 and 3 are not enabled. In the menu System info limit
1 is indicated in brackets following the number of operating hours for the
pump.
Option operating hours and operating cycles alarm
In the menu Set converter limits 2 and 3 may be jointly set to Alarm thereby preventing starting of the MAG as soon as limit 2 is exceeded and switching the MAG off when limit 3 is exceeded. In the menu System info limit 3 is
indicated in brackets following the number of operating hours for the pump.
Option increase warning limit
(for operating hours only and for software version 3.03.11 and higher)
After the warning limit has been reached, a new menu item is indicated in the
menu Set converter: increase operating hours.
By selecting +, the warning limit can be increased by 5000 hours. Thereafter
the warning disappears and the increased limit 1 is indicated in brackets following the number of operating hours of the pump.
Menu
Set Converter
Menu
System Info
Op.Hours/Cycles
Warning
Op.Hours/Cycles
Alarm
Op.Hours/Cycles
Warning
Increases OpHrs
Increase value?
Increases OpHrs
No increase!
Upon reaching the increased warning limit, this step can be repeated, however, only up to a maximum warning limit of 70,000 hours.
The operator will have to bear the responsibility when increasing the warning limit. We recommend not to change the default setting.
Warning
Plug-in control
4.11.10
Function of the option relays
Refer to Set Converter/Relay option (section 4.11.4).
There are 4 option relays (relay 6...9) with change-over contact; the operator can select one of the functions
described in the following table.
If the condition of the selected functions is performed, the selected relay switches over.
Bit
Setting
Condition
Bearing Temp.
Motor Current
Frequency
No Cooling Water
No Purge gas
TMS temp. OK
((TMS on) and (TMS Setpoint -5 < TMS temp. (P123) < TMS Setpoint +5))
Venting
Pump standstill
Start Command
Power supply OK
Power supply OK
10
Mains down
11
Stand-by
Plug-in control
4.11.11
Parameter
min value
max value
unit
Frequency
1000
Hz
motor current
200
0.1 A
power
6553.5
0.1 W
motor temp.
150
11
converter temp.
1000
123
TMS temp.
140
125
bearing temp.
140
127
cooling temp.
140
386
140
220
0.00
199.99
221
0.00
199.99
222
0.00
199.99
209
analog input #1
0.00
100.00
210
analog input #2
0.00
100.00
Example: P/N Analog Out (section 4.11.4) is set to parameter P125 (bearing temp.).
Definition: UAna_out = P125current / P125max value * Scale factor * 10 V
P125current = UAna_out / P125max value / Scale factor / 10 V
P125 (bearing temp.) / C
UAna out / V
20
1.00
1.43
40
2.50
7.14
75
1.87
10.00
100
1.00
7.14
Plug-in control
4.11.12
Basic menu
Failure Storage
System Info
Ready
0.0 A
0 Hz
or
or
or
Enter
Enter
Enter
Freq. Setpoint
600 Hz
Real-Time Clock
99.12.31 23:59
Failure Total
65535
Enter
Enter
Motor Temp.
50 C
Product Name
MD Digital
Enter
Enter
Converter Temp.
40 C
Conv. Cat.-No.
99999999999
Enter
Enter
Bearing Temp.
50 C
Conv. Serial-No.
99999999999
Enter
Enter
Conv. SR SW-Rev.
6.55.35
Enter
Failure TMS
65535
Enter
Failure Overload
65535
Enter
Fail. Temp.Bear.
65535
Enter
Failure Mains
65535
Enter
Enter
Enter
T_A
68 C
Conv.AMB SW-Rev.
6.55.35
Enter
Enter
Cooling Temp.
38 C
Not Active
Enter
Conv.AMB Data-R.
1.01
Enter
Conv. HW-Rev.
6.55.35
Actual PVW 13
10%
Enter
Enter
Actual PVW 24
10%
Enter
Enter
Pump Cat.-No.
99999999999
Actual PZ 12
5%
Enter
F. Storage 0 10
Bearing Temp.
99.12.31 00:00
167772.16 h
300 Hz
P125: 0
P123: 0
P127: 0
P7: 73
P11: 46
Enter
F. Storage 8 10
Bearing Temp.
Enter
Pump Ser.-No.
99999999999
Power
400 W
Enter
Enter
Pump Name
MAG W 1500 CT
Analog Input 1
30.0%
Enter
Enter
Analog Input 2
1.5%
Enter
PK SW-Rev.
6.55.35
Start Cycles
1234
Enter
Enter
PK HW-Rev.
6.55.35
Enter
Enter
Standby Cycles
1234
Enter
Enter
PK Data Rev.
6.55.35
Operation Cycles
1234
Enter
Enter
Plug-in control
Programming menu
Set Converter
Set Pump
or
Enter
Relay 6 Option
Bearing Temp.
Motor Current
Frequency
No Cooling Water
No Purgegas
TMS OK
Venting
Pump Stand Still
Start Command
Set TMS
Set Purge/Vent
or
or
Enter
Enter
Enter
Normal Operation
95 %
TMS Setpoint
70 C
Enter
Enter
Purge/Vent
Purge OFF
Purge ON
Via X14
Enter
Enter
Option P/V
Option 1
Standby Setpoint
250 Hz
Enter
Enter
Powersupply OK
Mains Down
Enter
Stop
Relay 7 Option
Pump Stand Still
Data to Eeprom?
Prog=yes
Esc=no
Enter
Relay 8 Option
Start Command
Prog
Enter
Esc
Relay 9 Option
Mains Down
Enter
00.0 A
Threshold
70 C
Enter
Key
Function
Esc
Mon
No function
Prog
Threshold
10.0 A
Enter
Threshold
300 Hz
Enter
P/N Analog Out
3 Param
Start Delay
0s
Enter
Enter
Ready
0000 Hz
Stop
Bus Adress
0
Enter
Func. X14.45
Standby Mode
Op.Hours/Cycles
Warning
<
Enter
Enter
>
Func. X14.46
Failure Reset
Increases OpHrs
Increase value?
Enter
Enter
Display
English
German
Enter
r (read)
r /w (read/write)
on (online)
off (offline)
=
=
=
=
value
value
value
value
can
can
can
can
only be read
be read and written
be changed always
only be changed when the pump stands still
All menus can be invoked at all times for each operating mode;
in part they may be modified during operation.
Maintenance
Maintenance
5.1 Cleaning
If required clean the turbomolecular pump and the frequency converter of
dust with a dry cloth.
5.2 Changing the rotor
The rotor has to be changed at the latest
after 40,000 hours of operation or
after 5000 starts/stops or cycles
Refer also to Section 4.5 Operation at high gas throughput or high forevacuum pressure.
Warning
Due to high-speed and temperature, the service life of the rotor is limited.
If the rotor is changed too late, it may be destroyed. Thus in the flange
mounts high forces and torque conditions can occur.
The mounting screws for the pump may be torn off. When using
clamped flange connections at the housing or with components above
the housing, sudden twisting of the entire pump can be experienced.
The pumps operating hours are displayed at the frequency converter (see
Sectiont 4.11.2 ).
A warning message appears after 37,000 hours of operation and after 3700
starts/stops or cycles.
After reaching the warning limit for the operating hours, the limit can be
increased, see Chapter 4.11.9. The warning and alarm limits reflect the experience of Oerlikon Leybold Vacuum with most applications. In circumstances
where the load on the pump is particularly low, the warning limit may be
increased.
Warning
The operator will have to bear the responsibility when increasing the
warning limit. We recommend not to change the default setting.
Only the Oerlikon Leybold Vacuum service can change the rotor.
5.3 Changing the touch-down bearings
Wear occurs at the touch-down bearings when hard shocks have to be supported.
Maintenance is also required after removing the bearing cable during operation of the pump. Under these conditions the rotor can not be controlled by
the magnet bearing and the pump will have a full run down on the touchdown bearing.
Only the Oerlikon Leybold Vacuum service can change the touch-down bearings.
Maintenance
Warning
Proceed as follows to seal the turbomolecular pump immediately after removing it from your process.
Purge the pump for two hours with the backing pump running. This helps to
remove a large quantity of the process gases from the pump. We recommend purging the pump via the intake flange and the purge valve with
approx. 200 sccm.
Press the STOP button at the MAG.DRIVEdigital and wait until the pump has
come to a standstill.
Afterwards turn the mains switch to the 0 position.
The cables between the MAG and MAG.DRIVE may be disconnected only
after the MAG has come to a full stillstand and the mains is switched off.
When the pump has been pumping hazardous gases, ensure that proper
safety precautions are taken before opening the intake or exhaust
connections.
Use gloves or protective clothing to avoid skin contact with toxic or highly
corrosive substances. Work under a fume hood if available.
Warning
Maintenance
Clean the intake and forevacuum connection flange as necessary for good
adhesion of tape.
Place the dry cartridge into the forevacuum port. Dont use loose crystals.
Firmly seal all ports with plastic adhesive film.
Cover the forevacuum connection port with its plastic cap.
Seal the high-vacuum connection flange with the cover and the screws.
Pack the pump so that it may not be damaged during transportation.
Particularly protect the flanges, the cooling water connectors and the current
feedthrough.
Contamination
Form
Maintenance
bolts
collar flange
retaining ring
blank flange
nuts
Centering ring
with O-ring
desiccant
desiccant
centering ring
with O-ring
clamping
ring
blank flange
screw cap
with O ring
polyethylene bag
with cable tie
Fig. 5.1 Sealing the MAG tightly with the metal seal kit
Troubleshooting
6
Troubleshooting
In case of a malfunction, the MAG will be braked and the first line of the display shows
FAILURE
Malfunction messages can be cancelled once the pump has come to a stop
and after the malfunction has been rectified; do so with the STOP function
(button or remote control).
Warning
The MAG shall be stopped completely and the mains power cord detached before you open the MAG.DRIVEdigital. Since dangerous voltages
may nonetheless be encountered, the housing must be opened only by a
qualified electrician.
Troubleshooting
6.1
Warning messages
Warning Message
on Display
Possible Cause
Measures
Motor Temp.
Temperature sensor inside
the motor reads a higher
temperature value than the
warning threshold (130 C).
Bearing Temp.
Temperature sensor inside
the pump reads a higher temperature value than the warning threshold (98 C).
Converter Temp.
Temperature sensor inside of
the converter reads a higher
temperature value than the
warning threshold (70 C).
Cooling Temp.
Temperature sensor at cooling water block reads a higher temperature value than
the warning threshold
(50 C).
Apply cooling water according to specifications. Check cooling water tubes for deposits.
See also Section 3.5.
Operation Cycles
The registered number of
start and standby cycles
exceeds the permissible number (normal warning threshold). So as not to constantly
mask this warning by others,
it is only displayed during runup (up to approximately 150
Hz) and during standby operation.
The registered number of
start and standby cycles
exceeds the permissible number (warning threshold 2 and
3). The warning is now displayed constantly.
Apply cooling water according to specifications. Check cooling water tubes for deposits.
See also Section 3.5.
Allow pump to cool down between the
cycles.
Troubleshooting
Warning Message
on Display
Possible Cause
Measures
Unbalanc. PVW13
Unbalanc. PVW24
Unbalanc. PZ12
A rotor displacement exceeding the warning threshold
occured. The code designates the affected axis.
Converter failure.
Overload
The rotational speed dropped
below normal operation frequency.
Mains down
The converter is in the generator mode.
Protection
The pump drive is blocked.
PK Communication
Converter does not communicate with the memory chip
of the pump.
Check BEARING connector and cable for damages or bent pins. Contact Oerlikon Leybold
Vacuum service if the cable is damaged.
Contact Oerlikon Leybold Vacuum service.
Overspeed
Actual frequency exceeds the
setpoint more then 10 Hz.
The motor current drops to
"0A; the frequency decreases to the actual frequency
setpoint.
SPI Com.-Fail
Communication problem between main controller and
magnetic bearing controller
Converter failure
Converter failure
Converter failure
ABS Active
Converter failure
Troubleshooting
6.2
Failure messages
Failure Message on
Display
Motor Temp.
Temperature sensor inside
the motor reads a higher
temperature value than the
failure threshold (140 C).
Possible Cause
Measures
Converter failure.
Cooling Temp.
Temperature sensor at
cooling water block reads
a higher temperature value
than the failure threshold
(60 C).
Bearing Temp.
Temperature sensor inside
the pump reads a higher
temperature value than the
failure threshold (100 C).
Converter failure.
Converter failure.
Converter Temp.
Temperature sensor inside
of the converter reads a
higher temperature value
than the failure threshold
(90 C).
Converter failure.
Troubleshooting
Failure Message on
Display
Overload PZ 12
Overload PV 13
Overload PW 24
An abnormal displacement of
the rotor occured at frequencies between 0 and
5 Hz. The code designates
the affected axis.
Possible Cause
Measures
MB
MB, Purge ON
MB, Purge OFF
An abnormal displacement ot
the rotor occured at frequencies between 146 Hz and
600 Hz.
The additional message gives
information on the status of
the purge gas valve the
moment the failure occured. It
can be used to estimate the
run down time of the pump.
Starting Time
The frequency has not reached 40 Hz 2 minutes after
the start command was
applied.
Accel. Time
The pump does not reach the
normal operation frequency
after the set maximum acceleration time.
Overload Time
The rotational speed has
dropped below normal operation frequency and stays
there for longer than the
maximum Accel. Time.
Shutdown Freq.
Rotational speed dropped
below the shutdown frequency threshold (140 Hz).
Shock venting.
Converter failure.
Vibration influence of several pumps between each other.
Troubleshooting
Failure Message on
Display
Possible Cause
Measures
Cooling Temp. SC
The cooling water temperature sensor reads a temperature lower than 1 C.
Operating Cycles
The registered number of
start and stand-by cycles
exceeds the permissible
alarm limit during system
start. The system can no longer be started.
The registered number of
start and stand-by cycles has
reached the pre-set alarm
limit. The system is automatically shut down and can thereafter no longer be started.
Operating Hours
The number of operating
hours of the pump has reached the pre-set alarm limit
during system start. The
system can no longer be
started.
The number of operating
hours of the pump has reached the pre-set alarm limit.
The system is automatically
shut down and can thereafter
no longer be started.
! Firmware Update !
This failure message is displayed directly after switching
on the mains. The system
cannot be started.
Troubleshooting
3
1
Failure Message on
Display
Possible Cause
Measures
Bearing Temp. SC
The magnetic bearing temperature sensor reads a temperature
lower than 1 C.
Motor Temp. SC
The motor temperature sensor
reads a temperature lower than
1 C.
Converter failure.
Frequency XX*
Abnormal motor current or frequency
*XX is a code no. between 43
and 55. It helps the Oerlikon
Leybold Vacuum service to find
the cause of the failure.
No Motor Current
Converter failure.
Troubleshooting
Failure Message on
Display
TMS 1
The converter measures a
heating current of less than
300 mA when heater is on.
Possible Cause
Measures
Converter failure.
TMS 2
The converter measures a
heating current of more than
4 A.
Overvoltage.
Heating element defective.
Converter failure.
TMS 3
TMS temperature sensor
reads a temperature higher
than 139 C.
Converter failure.
TMS 4
TMS temperature sensor
reads a temperature lower
than 1 C.
Converter failure.
Troubleshooting
Failure Message on
Display
Possible Cause
Measures
Pt 100 damaged.
SPI Com.-Fail
Communication problem between main controller and magnetic bearing controller
Converter failure
SPI-Timeout
Communication problem between main controller and magnetic bearing controller
Converter failure
Bearing Overload
Magnetic Bearing output current
is overloaded
Converter failure
Internal Overload
DC/DC Converter is overheated
Converter failure
Converter failure
PK-Communication
Converter does not communicate
with the memory chip of the
pump.
The failure occurs when the frequency is lower than 5 Hz.
In case of a frequency above 5
Hz a warning will occur.
Troubleshooting
6.3
Malfunctions
Malfunction
Possible Cause
Measures
No power supply.
Fuse F1 blown or converter failure.
Converter failure.
Valve malfunctioning.
TMS failure.
Display blurred.
No measures required.
Disposal
Contamination
7
Waste Disposal
The equipment may have been contaminated by the process or by environmental influences. In this case the equipment must be decontaminated in
accordance with the relevant regulations. We offer this service at fixed prices.
Further details are available on request.
Warning
Contaminated parts can be detrimental to health and environment. Before
beginning with any work , first find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.
Separate clean components according to their materials, and dispose of
these accordingly. We offer this service. Further details are available on
request.
When sending us any equipment, observe the regulations given in Section
5.6 Oerlikon Leybold Vacuum service.
EC Manufacturers Declaration
in the spirit of Appendix IIb to the 98/37/EG Machinery Guidelines
We - LEYBOLD Vacuum GmbH - herewith declare that operation of the incomplete machine defined below, is not
permissible until it has been determined that the machine into which this incomplete machine is to be installed,
meets the regulations of the EEC Directive on Machinery.
When using the appropriate Leybold accessories, e.g. connector lines and when powering the pump with the specified Leybold frequency converters, the protection level prescribed in the EMC Guidelines will be attained.
Designation: Turbomolecular pump MAGdigital LINE
Models:
MAG
MAG
MAG
MAG
MAG
MAG
W 830 C
W 1300 C
(W) 1500 CT
W 2200 C
W 2800 C(T)
W 3200 CT
Part Nos.:
MAG W 830
MAG W 1300
MAG W 2200
MAG W 2800
400000Vxxxx
400003V0002
400006V0071
400020Vxxxx
400021Vxxxx
400026Vxxxx
400027Vxxxx
400030Vxxxx
400081Vxxxx
400100Vxxxx
400110Vxxxx
x = 0 to 9
Marcus Eisenhuth
Vice-President
Head of Product Development
Ralf Adamietz
Head of Design
vacuum
Leybold Vacuum GmbH
Bonner Strae 498 (Bayenthal)
D-50968 Kln
Tel.:
++49 (0)221 347-0
Fax:
++49 (0)221 347-1250
[email protected]
www.leybold.com
EC Conformance Declaration
We, the Leybold Vacuum GmbH, declare herewith that the products listed below, in the embodiment which we
have placed on the market, comply with the applicable EC guidelines.
This declaration becomes invalid if modifications are made to the product without consultation with us.
Maintaining the EMC guideline assumes an EMC adapted installation of component within the plant or machine.
Test were run using a typical construction in a test assembly that conforms with the standards.
Time of the CE label (year):
2004
Model:
MAG.DRIVEdigital
Part No.
400035V0011 / 121 36
2002
EN 61000-6-4
2001
EN 61000-6-2
2001
Marcus Eisenhuth
Vice-President
Head of Product Development
Manfred Kieffer
Development Design
vacuum
Leybold Vacuum GmbH
Bonner Strae 498 (Bayenthal)
50968 Kln
Tel.:
++49 (0)221 347-0
Fax:
++49 (0)221 347-1250
[email protected]
www.leybold.com
Certificates
The system MAGdigital LINE
turbomolecular pump
connecting cables
frequency converter
has been tested by the TV Rheinland of North America according to the
requirements of
NRTL
(used standards UL 61010A-1 and IEC 61010-1/A2) and
SEMI S2
The components are in compliance to the tested standards.
Certificate No. US 2271305 01, 02 and 03
Customer/Dep./Institute: ________________________________
___________________________________________________
Address
___________________________________________
___________________________________________
Person to contact:
___________________________________
Phone:
End user:
__________________________________________
Failure description:
___________________________________________________
Catalog number:
_______________________________________
Additional parts:
_____________________________________
Serial number:
_______________________________________
Application Tool:
_____________________________________
___________________________________
Application Process:
__________________________________
used1)
No1)
Yes
No
_______________________________________
_______________________________________
Contamination:
toxic
corrosive
flammable
explosive2)
radioactive2)
microbiological2)
other harmful substances
No1)
Yes
____________________________
Service Center:
Customer:
Turbopump Model:
Process:
OEM Equipment Name and Model:
Process Gas:
Was the turbopump replaced?
If yes, replacement pump P/N:
Date Installed:
Yes;
No.
replacement pump S/N:
Date Removed:
Date Received:
Date Examined:
Examined by:
Received Condition:
Findings:
Cause of Failure:
Recommendations:
Remarks/Questions:
Overviews
GA 05141_0701
German
Sept. 2004
GA 05141_0702
English
Sept. 2004
MAG W 830 C
MAG W 1300 C
MAG (W) 1500 CT
MAG W 2200 C
MAG W 2800 C, CT
MAG W 3200 CT
MAG W 830
MAG W 1300
MAG W 2200
MAG W 2800
KA 05158_0101
German
Jan. 2005
KA 05158_0102
English
Jan. 2005
MAG W 2800 CT
CF flange
KA05160_0301
German
March 2006
KA05160_0302
English
March 2006
MAG W 830 C
17200053_002_00
English
June 2006
MAG W 3200
KA05164_0301
German
Sept. 2006
KA05164_0302
English
Sept. 2006
17200147_001_00
German
Okt. 2006
17200147_002_00
English
Okt. 2006
MAG W 2000 C, CT
GA05141_0801
GA05141_0802
German
June 2007
English
June 2007
MAG W 830 C
MAG W 1300 C
MAG (W) 1500 CT
MAG 2000 C, CT, CTS
MAG W 2000 C, CT
MAG W 2200 C
MAG W 2800 C, CT
MAG W 3200 CT
MAG W 830
MAG W 1300
MAG W 2200
MAG W 2800
MAG W 3200
MAG.DRIVEdigital
from software version
3.03.11
List of Figures
List of Figures
Fig. 3.11 MAG W 830: Connection elements, installing the splinter guard
and fixing the intake flange
55
Fig. 3.12 MAG W 1300: Connection elements, installing the splinter guard
and fixing the intake flange
56
Fig. 3.13 MAG W 2200: Connection elements, installing the splinter guard
and fixing the intake flange
57
11
13
13
21
Fig. 3.15 MAG W 3200: Connection elements, installing the splinter guard
and fixing the intake flange
59
22
61
27
62
28
63
28
29
Fig. 3.19 For the MAG with ISO-K flange: Clamped flange connection with
collar flanges
63
30
31
Fig. 3.14 MAG W 2800: Connection elements, installing the splinter guard
and fixing the intake flange
58
65
65
32
Fig. 3.22 Schematic of the cooling water flow for MAG (W) 1500, 2800,
3200 CT
66
33
67
34
68
35
36
Fig. 3.25 Purge gas and vent valve assembly and turbomolecular pump
(schematic)
70
37
71
38
71
39
72
40
Fig. 3.29 Manually actuated venting valve at the MAG 2000 C/CT/CTS
73
41
75
42
77
43
77
Fig. 3.1 MAG W 830 C: Connection elements, installing the splinter guard
and fixing the intake flange
45
79
80
Fig. 3.2 MAG W 830 C: Connection elements, installing the splinter guard
and fixing the intake flange
46
81
81
Fig. 3.3 MAG W 1300 C: Connection elements, installing the splinter guard
and fixing the intake flange
47
Fig. 3.4 MAG (W) 1500 CT: Connection elements, installing the splinter
guard and fixing the intake flange
48
Fig. 3.5 MAG 2000 C, CT, CTS: Connection elements, installing the splinter
guard and fixing the intake flange
49
Fig. 3.6 MAG W 2000 C, CT: Connection elements, installing the splinter
guard and fixing the intake flange
50
Fig. 3.7 MAG W 2200 C: Connection elements, installing the splinter guard
and fixing the intake flange
51
Fig. 3.8 MAG W 2800 C, CT: Connection elements, installing the splinter
guard and fixing the intake flange
52
Fig. 3.9 MAG W 2800 CT with CF flange: Connection elements, installing
the splinter guard and fixing the intake flange
53
Fig. 4.1 Curve for safe venting of the MAG; pressure rise as a function of
venting time
84
Fig. 4.2 Typical function diagram TMS for the MAG.DRIVE
86
90
91
93
93
95
102
Fig. 5.1 Sealing the MAG tightly with the metal seal kit
111
118
Fig. 3.10 MAG W 3200 CT with DN 320 ISO-F flange: Connection elements, installing the splinter guard and fixing the intake flange 54
Dimensional
drawing
Connection
elements
Purge gas
connection
MAG W 830 C
15
29
45, 46
71
MAG W 1300 C
15
29
47
71
MAG 1500 CT
16
30
48
69,70
16
30
48
69,70
MAG 2000 C
17
31
49
73
MAG 2000 CT
17
32
49
73
17
33
49
73
MAG W 2000 C
17
34
50
69, 70
MAG W 2000 CT
17
35
50
69, 70
MAG W 2200 C
18
36, 37
51
69 - 72
MAG W 2800 C
18
38
52
69, 70
MAG W 2800 CT
18
38
52, 53
69, 70
MAG W 3200 CT
18
38
54
69, 70
MAG W 830
19
39
55
71
MAG W 1300
19
40
56
71
MAG W 2200
19
41
57
71
MAG W 2800
19
42
58
71
MAG W 3200
19
43
59
71
Pump
Index
Index
generate 82
radiation 60, 88
hot components 5, 63
B
backing pressure 64, 114, 116, 121
backing pump 15-18, 64-65, 89, 92,
94, 109
C
contamination 20, 109-110, 122, 126
cooling water 15-18, 24-25, 45-59, 6668, 76, 85-86, 89, 92, 94, 97, 100,
104, 107, 110, 113, 115, 117-118,
120, 129
purge gas 13, 20-21, 23, 45-59, 65, 6973, 76-78, 82-84, 89, 92, 94, 104,
114, 116, 121, 129-131
S
seal kit 14, 23, 109, 111, 129
serial interface 12, 74, 78, 100, 114
K
key 83, 89, 92-94, 96, 99, 107, 114
stand-by 20, 76, 84, 90, 95-96, 100102, 104, 117, 121
magnetic field 60
dangerous voltage 5
data storage 10, 97
DC motor 10, 12
media 69, 82
motor current 76-77, 88, 93, 100, 104105, 107, 114, 118
noise level 60
earthquake protection 62
F
forevacuum 4, 14-19, 22, 29, 45-59,
64-65, 70, 84, 88, 108, 110, 126,
129
forevacuum flange 14-19, 45-59, 64
fuse 14, 20, 74, 119, 121
P
PE bag 14, 44, 61
PK 26, 45-59, 75, 98, 106, 114, 120
plug-in control 7, 12-13, 23, 81, 92-107,
124
Pumping speed 10, 15-19, 21, 129
Europe
Oerlikon
Leybold Vacuum GmbH
Bonner Strasse 498
D-50968 Cologne
Phone: +49-(0)221-347 1234
Fax: +49-(0)221-347 1245
[email protected]
www.oerlikon.com
Belgium
Oerlikon
Leybold Vacuum Nederland B.V.
Belgisch bijkantoor
Leuvensesteenweg 542-9A
B-1930 Zaventem
Sales:
Phone: +32-2-711 00 83
Fax: +32-2-720 83 38
[email protected]
Service:
Phone: +32-2-711 00 82
Fax: +32-2-720 83 38
[email protected]
Oerlikon
Leybold Vacuum GmbH
Sales Area North/Northeast
Branch Office Berlin
Buschkrugallee 33
1. Obergeschoss
D-12359 Berlin
Phone: +49-(0)30-435 609 0
Fax: +49-(0)30-435 609 10
[email protected]
Oerlikon
Leybold Vacuum GmbH
Sales Area South/Southwest
Branch Office Munich
Sendlinger Strasse 7
D-80331 Munich
Phone: +49-(0)89-357 33 9-10
Fax: +49-(0)89-357 33 9-33
[email protected]
service.vacuum.mn
@oerlikon.com
Oerlikon
Leybold Vacuum GmbH
Sales Area West & Benelux
Branch Office Cologne
Bonner Strasse 498
D-50968 Cologne
Phone: +49-(0)221-347 1270
Fax: +49-(0)221-347 1291
[email protected]
Oerlikon
Leybold Vacuum GmbH
Service Competence Center
Emil-Hoffmann-Strasse 43
D-50996 Cologne-Suerth
Phone: +49-(0)221-347 1439
Fax: +49-(0)221-347 1945
[email protected]
Oerlikon
Leybold Vacuum GmbH
Mobil Customer Service
Emil-Hoffmann-Strasse 43
D-50996 Cologne-Suerth
Phone: +49-(0)221-347 1765
Fax: +49-(0)221-347 1944
[email protected]
Oerlikon
Leybold Vacuum France S.A.
Valence Factory
640, Rue A. Bergs - B.P. 107
F-26501 Bourg-ls-Valence Cedex
Phone: +33-4-75 82 33 00
Fax: +33-4-75 82 92 69
[email protected]
Great Britain
Oerlikon
Leybold Vacuum UK Ltd.
Unit 2
Silverglade Business Park
Leatherhead Road
UK-Chessington, Surrey KT9 2QL
Sales:
Phone: +44-13-7273 7300
Fax: +44-13-7273 7301
[email protected]
Service:
Phone: +44-20-8971 7030
Fax: +44-20-8971 7003
[email protected]
Italy
Oerlikon
Leybold Vacuum Italia S.p.A.
8, Via Trasimeno
I-20128 Milano
Sales:
Phone: +39-02-27 22 31
Fax: +39-02-27 20 96 41
[email protected]
Service:
Phone: +39-02-27 22 31
Fax: +39-02-27 22 32 17
[email protected]
Oerlikon
Leybold Vacuum Italia S.p.A.
Field Service Base
Z.I. Le Capanne
I-05021 Acquasparta (TR)
Phone: +39-0744-93 03 93
Fax: +39-0744-94 42 87
[email protected]
Netherlands
Oerlikon
Leybold Vacuum Nederland B.V.
Proostwetering 24N
NL-3543 AE Utrecht
Sales and Service:
Phone: +31-(30) 242 6330
Fax: +31-(30) 242 6331
[email protected]
[email protected]
Spain
Oerlikon
Leybold Vacuum Spain, S.A.
C/. Huelva, 7
E-08940 Cornell de Llobregat
(Barcelona)
Sales:
Phone: +34-93-666 46 16
Fax: +34-93-666 43 70
[email protected]
Service:
Phone: +34-93-666 49 51
Fax: +34-93-685 40 10
[email protected]
Sweden
Oerlikon
Leybold Vacuum Scandinavia AB
Box 9084
SE-40092 Gteborg
Sales and Service:
Phone: +46-31-68 84 70
Fax: +46-31-68 39 39
[email protected]
Visiting/delivery address:
Datavgen 57B
SE-43632 Askim
Switzerland
Oerlikon
Leybold Vacuum Schweiz AG
Leutschenbachstrasse 55
CH-8050 Zrich
Sales:
Phone: +41-044-308 40 50
Fax: +41-044-302 43 73
[email protected]
Service:
Phone: +41-044-308 40 62
Fax: +41-044-308 40 60
[email protected]
America
USA
Oerlikon
Leybold Vacuum USA Inc.
5700 Mellon Road
USA-Export, PA 15632
Phone: +1-724-327-5700
Fax: +1-724-325-3577
[email protected]
Sales:
Eastern & Central time zones
Phone: +1-724-327-5700
Fax: +1-724-333-1217
Pacific, Mountain, Alaskan &
Hawaiian time zones
Phone: +1-480-752-9191
Fax: +1-480-752-9494
Service:
Phone: +1-724-327-5700
Fax: +1-724-325-3577
LV_09040_2007
06.07
Oerlikon
Leybold Vacuum GmbH,
Dresden
Zur Wetterwarte 50, Haus 304
D-01109 Dresden
Service:
Phone: +49-(0)351-88 55 00
Fax: +49-(0)351-88 55 041
[email protected]
France
Oerlikon
Leybold Vacuum France S.A.
7, Avenue du Qubec
Z.A. Courtaboeuf 1 - B.P. 42
F-91942 Courtaboeuf Cedex
Sales and Service:
Phone: +33-1-69 82 48 00
Fax: +33-1-69 07 57 38
[email protected]
Asia
Oerlikon
Leybold Vacuum USA Inc.
5700 Mellon Road
USA-Export, PA 15632
Phone: +1-724-327-5700
Fax:
+1-724-325-3577
[email protected]
Oerlikon
Leybold Vacuum GmbH
Bonner Strasse 498
D-50968 Cologne
Phone: +49-(0)221-347 0
Fax:
+49-(0)221-347 1250
[email protected]
P.R. China
Oerlikon
Leybold Vacuum (Tianjin)
International Trade Co. Ltd.
Beichen Economic
Development Area (BEDA),
Shanghai Road
Tianjin 300400
China
Sales and Service:
Phone: +86-22-2697 0808
Fax: +86-22-2697 4061
Fax: +86-22-2697 2017
[email protected]
[email protected]
Japan
Oerlikon
Leybold Vacuum
Japan Co., Ltd.
Headquarter
23-3, Shin-Yokohama
3-chome
Tobu A.K. Bldg. 4th Floor
Kohoku-ku
Yokohama-shi 222-0033
Sales:
Phone: +81-45-471-3330
Fax: +81-45-471-3323
[email protected]
[email protected]
Oerlikon
Leybold Vacuum
(Tianjin) Co. Ltd.
Beichen Economic
Development Area (BEDA),
Shanghai Road
Tianjin 300400
China
Sales and Service:
Phone: +86-22-2697 0808
Fax: +86-22-2697 4061
Fax: +86-22-2697 2017
[email protected]
[email protected]
Oerlikon
Leybold Vacuum
Japan Co., Ltd.
Osaka Sales Office
5-13, Kawagishi-machi
Suita-chi
Osaka 564-0037
Phone: +81-6-6393-5211
Fax: +81-6-6393-5215
[email protected]
[email protected]
Oerlikon
Leybold Vacuum (Tianjin)
International Trade Co. Ltd.
Shanghai Branch:
Add: No.33
76 Futedong San Rd.
Waigaoqiao FTZ
Shanghai 200131
China
Sales and Service:
Phone: +86-21-5064-4666
Fax: +86-21-5064-4668
[email protected]
[email protected]
Oerlikon
Leybold Vacuum (Tianjin)
International Trade Co. Ltd.
Guangzhou Office and
Service Center
1st F, Main Building
Science City Plaza,
No.111 Science Revenue,
Guangzhou Science City
(GZSC) 510663, Guangzhou,
China
Sales:
Phone: +86-20-8723-7873
Phone: +86-20-8723-7597
Fax: +86-20-8723-7875
[email protected]
[email protected]
Oerlikon
Leybold Vacuum (Tianjin)
International Trade Co. Ltd.
Beijing Branch:
1-908, Beijing Landmark Towers
8 North Dongsanhuan Road
Chaoyang District
Beijing 100004
China
Sales:
Phone: +86-10-6590-7622
Fax: +86-10-6590-7607
[email protected]
India
Oerlikon
Leybold Vacuum India Pvt Ltd.
EL-22, J Block
MIDC Bhosari
Pune 411026
India
Sales and Service:
Phone: +91-20-3061 60000
Fax: +91-20-2712 1571
[email protected]
[email protected]
Oerlikon
Leybold Vacuum
Japan Co., Ltd.
Tsukuba Technical Service Center
Kogyo Danchi
21, Kasuminosato,
Ami-machi, Inashiki-gun
Ibaraki-ken, 300-0315
Service:
Phone: +81-298 89 2841
Fax: +81-298 89 2838
[email protected]
[email protected]
Korea
Oerlikon
Leybold Vacuum Korea Ltd.
3F. Jellzone 2 Tower, 159-4
Jeongja-Dong, Bundang-Gu
Sungnam-Si, Gyeonggi-Do
Korea 463-384
Sales:
Phone: +82-31 785 1367
Fax: +82-31 785 1359
623-7, Upsung-Dong
Cheonan-Si
Chungcheongnam-Do
Korea 330-290
Service:
Phone: +82-41 589 3035
Fax: +82-41 588 0166
Singapore
Oerlikon
Leybold Vacuum
Singapore Pte Ltd.
No.1, International Business Park
B1-20B, The Synergy
Singapore 609917
Sales and Service:
Phone: +65-6303 7000
Fax: +65-67730 039
[email protected]
[email protected]
Taiwan
Oerlikon
Leybold Vacuum Taiwan Ltd.
No 416-1, Sec. 3
Chung-Hsin Rd., Chu-Tung
Hsin-Chu, Taiwan, R.O.C.
Sales and Service:
Phone: +886-3-500 1688
Fax: +886-3-583 3999
[email protected]
[email protected]
www.oerlikon.com