What Is Scanning Electron Micros

What is Scanning Electron Microscopy (SEM)
The scanning electron microscope (SEM) uses a focused beam of high-

energy electrons to generate a variety of signals at the surface of solid
specimens. The signals that derive from electron-sample interactions
reveal information about the sample including external morphology
(texture), chemical composition, and crystalline structure and orientation
of materials making up the sample. In most applications, data are
collected over a selected area of the surface of the sample, and a 2-
dimensional image is generated that displays spatial variations in these
properties. Areas ranging from approximately 1 cm to 5 microns in
width can be imaged in a scanning mode using conventional SEM
techniques (magnification ranging from
20X to approximately 30,000X, spatial
resolution of 50 to 100 nm). The SEM is
also capable of performing analyses of
selected point locations on the sample;
this approach is especially useful in
qualitatively or semi-quantitatively
Image of pollen grains taken on an SEM shows
determining chemical compositions the characteristic depth of field of SEM
micrographs
(using EDS), crystalline structure, and
crystal orientations (using EBSD). The design and function of the SEM
is very similar to the EPMA and considerable overlap in capabilities
exists between the two instruments.
Fundamental Principles of Scanning Electron Microscopy

(SEM)
Accelerated electrons in an SEM carry
significant amounts of kinetic energy, and
this energy is dissipated as a variety of
signals produced by electron-sample
interactions when the incident electrons
are decelerated in the solid sample. These
signals include secondary electrons (that
produce SEM images), backscattered
electrons (BSE), diffracted backscattered
electrons (EBSD that are used to
determine crystal structures and
orientations of minerals), photons (characteristic X-rays that are used for
elemental analysis and continuum X-rays), visible light
(cathodoluminescence--CL), and heat. Secondary electrons and
backscattered electrons are commonly used for imaging samples:
secondary electrons are most valuable for showing morphology and
topography on samples and backscattered electrons are most valuable
for illustrating contrasts in composition in multiphase samples (i.e. for
rapid phase discrimination). X-ray generation is produced by inelastic
collisions of the incident electrons with electrons in discrete ortitals
(shells) of atoms in the sample. As the excited electrons return to lower
energy states, they yield X-rays that are of a fixed wavelength (that is
related to the difference in energy levels of electrons in different shells
for a given element). Thus, characteristic X-rays are produced for each
element in a mineral that is "excited" by the electron beam. SEM
analysis is considered to be "non-destructive"; that is, x-rays generated
by electron interactions do not lead to volume loss of the sample, so it is
possible to analyze the same materials repeatedly.
Scanning Electron Microscopy (SEM) Instrumentation - How

Does It Work?
Essential components of all SEMs include the following:
- Electron Source ("Gun") .

- Electron Lenses.
- Sample Stage.
- Detectors for all signals of
interest.
- Display / Data output devices.
Infrastructure Requirements:
1- Power Supply.
2- Vacuum System.
3- Cooling system.
4- Vibration-free floor.
5- Room free of ambient magnetic and electric fields.
SEMs always have at least one detector (usually a secondary electron
detector), and most have additional detectors. The specific capabilities
of a particular instrument are critically dependent on which detectors it
accommodates.
Applications
SEMs have a variety of applications in a number of scientific and

industry-related fields, especially where characterizations of solid
materials is beneficial.
In addition to topographical, morphological and compositional
information, a Scanning Electron Microscope can detect and analyze
surface fractures, provide information in microstructures, examine
surface contaminations, reveal spatial variations in chemical
compositions, provide qualitative chemical analyses and identify
crystalline structures.
SEMs can be as essential research tool in fields such as life science,
biology, gemology, medical and forensic science, metallurgy.
In addition, SEMs have practical industrial and technological
applications such as semiconductor inspection, production line of
miniscule products and assembly of microchips for computers.
Sample Collection and Preparation
Sample preparation can be minimal or elaborate for SEM analysis,

depending on the nature of the samples and the data required. Minimal
preparation includes acquisition of a sample that will fit into the SEM
chamber and some accommodation to prevent charge build-up on
electrically insulating samples. Most electrically insulating samples are
coated with a thin layer of conducting material, commonly carbon, gold,
or some other metal or alloy. The choice of material for conductive
coatings depends on the data to be acquired: carbon is most desirable if
elemental analysis is a priority, while metal coatings are most effective
for high resolution electron imaging applications. Alternatively, an
electrically insulating sample can be examined without a conductive
coating in an instrument capable of "low vacuum" operation.
SEM Advantages
Advantages of a Scanning Electron Microscope include its wide-array of

applications, the detailed three-dimensional and topographical imaging
and the versatile information garnered from different detectors.
SEMs are also easy to operate with the proper training and advances in
computer technology and associated software make operation user-
friendly.
This instrument works fast, often completing SEI, BSE and EDS
analyses in less than five minutes. In addition, the technological
advances in modern SEMs allow for the generation of data in digital
form.
Although all samples must be prepared before placed in the vacuum
chamber, most SEM samples require minimal preparation actions.
SEM Disadvantages
The disadvantages of a Scanning Electron

Microscope start with the size and cost.
SEMs are expensive, large and must be
housed in an area free of any possible
electric, magnetic or vibration
interference.
Maintenance involves keeping a steady
voltage, currents to electromagnetic coils and
circulation of cool water.
Special training is required to operate an SEM as
well as prepare samples.
The preparation of samples can result in artifacts.
The negative impact can be minimized with
knowledgeable experience researchers being able
to identify artifacts from actual data as well as
preparation skill. There is no absolute way to
eliminate or identify all potential artifacts.
In addition, SEMs are limited to solid, inorganic samples small enough
to fit inside the vacuum chamber that can handle moderate vacuum
pressure.
Finally, SEMs carry a small risk of radiation exposure associated with
the electrons that scatter from beneath the sample surface.
The sample chamber is designed to prevent any electrical and magnetic
interference, which should eliminate the chance of radiation escaping the
chamber. Even though the risk is minimal, SEM operators and
researchers are advised to observe safety precautions.

What Is Scanning Electron Micros

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What Is Scanning Electron Micros

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What is Scanning Electron Microscopy (SEM)

The scanning electron microscope (SEM) uses a focused beam of high-

Fundamental Principles of Scanning Electron Microscopy

Scanning Electron Microscopy (SEM) Instrumentation - How

Essential components of all SEMs include the following:

- Electron Source ("Gun") .

SEMs have a variety of applications in a number of scientific and

Sample preparation can be minimal or elaborate for SEM analysis,

Advantages of a Scanning Electron Microscope include its wide-array of

The disadvantages of a Scanning Electron

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