Obsolete: High Performance, Wide Bandwidth Accelerometer ADXL001
Obsolete: High Performance, Wide Bandwidth Accelerometer ADXL001
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The ADXL001 also has a self-test (ST) pin that can be asserted to
High resistance to EMI/RFI
verify the full electromechanical signal chain for the accelerometer
Complete electromechanical self-test
channel.
Output ratiometric to supply
Velocity preservation during acceleration input overload The ADXL001 is available in the industry-standard 8-terminal
Low power consumption: 2.5 mA typical LCC and is rated to work over the extended industrial temperature
8-terminal, hermetic ceramic, LCC package range (−40°C to +125°C).
15
APPLICATIONS
Vibration monitoring
Shock detection
Sports diagnostic equipment
LE RESPONSE (dB)
12
3
Medical instrumentation
0
Industrial monitoring
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–3
GENERAL DESCRIPTION –6
07510-102
–12
This part is ideal for industrial, medical, and military applications –15
1 10 100 1k 10k 100k
where wide bandwidth, small size, low power, and robust
FREQUENCY (Hz)
performance are essential.
Figure 1. Sensor Frequency Response
B
VDD
ADXL001
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TIMING
GENERATOR
VDD2
SELF-TEST
07510-001
ST COM
Figure 2.
Rev. A
Information furnished by Analog Devices is believed to be accurate and reliable. However, no
responsibility is assumed by Analog Devices for its use, nor for any infringements of patents or other
rights of third parties that may result from its use. Specifications subject to change without notice. No One Technology Way, P.O. Box 9106, Norwood, MA 02062-9106, U.S.A.
license is granted by implication or otherwise under any patent or patent rights of Analog Devices. Tel: 781.329.4700 www.analog.com
Trademarks and registered trademarks are the property of their respective owners. Fax: 781.461.3113 ©2010 Analog Devices, Inc. All rights reserved.
ADXL001
TABLE OF CONTENTS
Features .............................................................................................. 1 Design Principles........................................................................ 11
Applications ....................................................................................... 1 Mechanical Sensor ..................................................................... 11
General Description ......................................................................... 1 Applications Information .............................................................. 12
Functional Block Diagram .............................................................. 1 Application Circuit..................................................................... 12
Revision History ............................................................................... 2 Self-Test ....................................................................................... 12
Specifications..................................................................................... 3 Acceleration Sensitive Axis ....................................................... 12
Specifications for 3.3 V Operation ............................................. 3 Operating Voltages Other Than 5 V ........................................ 12
Specifications for 5 V Operation ................................................ 4 Layout, Grounding, and Bypassing Considerations .................. 13
Recommended Soldering Profile ............................................... 5 Clock Frequency Supply Response .......................................... 13
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Absolute Maximum Ratings............................................................ 6 Power Supply Decoupling ......................................................... 13
ESD Caution .................................................................................. 6 Electromagnetic Interference ................................................... 13
Pin Configuration and Function Descriptions ............................. 7 Outline Dimensions ....................................................................... 14
Typical Performance Characteristics ............................................. 8 Ordering Guide .......................................................................... 14
Theory of Operation ...................................................................... 11
REVISION HISTORY
2/10—Rev. 0 to Rev. A
Added -250 and -500 models ............................................ Universal
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Changes to Table 1 ............................................................................ 3
Changes to Table 2 ............................................................................ 4
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Added Figure 9 through Figure 18 ................................................. 8
Changes to Ordering Guide .......................................................... 14
Rev. A | Page 2 of 16
ADXL001
SPECIFICATIONS
SPECIFICATIONS FOR 3.3 V OPERATION
TA = −40°C to +125°C, VS = 3.3 V ± 5% dc, acceleration = 0 g, unless otherwise noted.
Table 1.
ADXL001-70 ADXL001-250 ADXL001-500
Parameter Conditions Min Typ Max Min Typ Max Min Typ Max Unit
SENSOR
Nonlinearity 0.2 2 0.2 2 0.2 2 %
Cross-Axis Sensitivity Includes package 2 2 2 %
alignment
Resonant Frequency 22 22 22 kHz
Quality Factor 2.5 2.5 2.5
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SENSITIVITY
Full-Scale Range IOUT ≤ ±100 μA −70 +70 −250 +250 −500 +500 g
Sensitivity 100 Hz 16.0 4.4 2.2 mV/g
OFFSET Ratiometric
Zero-g Output 1.35 1.65 1.95 1.35 1.65 1.95 1.35 1.65 1.95 V
NOISE
Noise
Noise Density
FREQUENCY RESPONSE
−3 dB Frequency
−3 dB Frequency Drift
10 Hz to 400 Hz
10 Hz to 400 Hz LE 85
3.3
32
2
95
3.65
32
2
105
4.25
32
2
mg rms
mg/√Hz
kHz
%
Over Temperature
SELF-TEST
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Output Voltage Change 400 125 62 mV
Logic Input High 2.1 2.1 2.1 V
Logic Input Low 0.66 0.66 0.66 V
Input Resistance To ground 30 50 30 50 30 50 kΩ
OUTPUT AMPLIFIER
Output Swing IOUT = ±100 μA 0.2 VS − 0.2 0.2 VS − 0.2 0.2 VS − 0.2 V
Capacitive Load 1000 1000 1000 pF
PSRR (CFSR) DC to 1 MHz 0.9 0.9 0.9 V/V
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Rev. A | Page 3 of 16
ADXL001
SPECIFICATIONS FOR 5 V OPERATION
TA = -40°C to +125°C, VS = 5 V ± 5% dc, acceleration = 0 g, unless otherwise noted.
Table 2.
ADXL001-70 ADXL001-250 ADXL001-500
Parameter Conditions Min Typ Max Min Typ Max Min Typ Max Unit
SENSOR
Nonlinearity 0.2 2 0.2 2 0.2 2 %
Cross-Axis Sensitivity Includes package 2 2 2 %
alignment
Resonant Frequency 22 22 22 kHz
Quality Factor 2.5 2.5 2.5
SENSITIVITY
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Full-Scale Range IOUT ≤ ±100 μA −70 +70 −250 +250 −500 +500 g
Sensitivity 100 Hz 24.2 6.7 3.3 mV/g
OFFSET Ratiometric
Zero-g Output 2.00 2.5 3.00 2.00 2.5 3.00 2.00 2.5 3.00 V
NOISE
Noise 10 Hz to 400 Hz 55 60 70 mg rms
Noise Density 10 Hz to 400 Hz 2.15 2.35 2.76 mg/√Hz
FREQUENCY RESPONSE
−3 dB Frequency
−3 dB Frequency Drift
Over Temperature
SELF-TEST
2
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32 32
2
32
2
kHz
%
Rev. A | Page 4 of 16
ADXL001
RECOMMENDED SOLDERING PROFILE
Table 3. Soldering Profile Parameters
Profile Feature Sn63/Pb37 Pb-Free
Average Ramp Rate (TL to TP) 3°C/sec maximum 3°C/sec maximum
Preheat
Minimum Temperature (TSMIN) 100°C 150°C
Maximum Temperature (TSMAX) 150°C 200°C
Time (TSMIN to TSMAX), ts 60 sec to 120 sec 60 sec to 150 sec
TSMAX to TL
Ramp-Up Rate 3°C/sec 3°C/sec
Time Maintained Above Liquidous (tL)
Liquidous Temperature (TL) 183°C 217°C
Liquidous Time (tL) 60 sec to 150 sec 60 sec to 150 sec
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Peak Temperature (TP) 240°C + 0°C/−5°C 260°C + 0°C/−5°C
Time Within 5°C of Actual Peak Temperature (tP) 10 sec to 30 sec 20 sec to 40 sec
Ramp-Down Rate 6°C/sec maximum 6°C/sec maximum
Time 25°C to Peak Temperature (tPEAK) 6 minute maximum 8 minute maximum
TP
LE RAMP-UP
tP
CRITICAL ZONE
TL TO TP
TEMPERATURE (T)
TL
TSMAX tL
TSMIN
SO
tS
PREHEAT RAMP-DOWN
07510-022
tPEAK
TIME (t)
Rev. A | Page 5 of 16
ADXL001
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rating only; functional operation of the device at these or any
other conditions above those indicated in the operational
section of this specification is not implied. Exposure to absolute
maximum rating conditions for extended periods may affect
device reliability.
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Rev. A | Page 6 of 16
ADXL001
07510-004
COM 3 5 DNC
4
ST
DNC = DO NOT CONNECT
ADXL001
TOP VIEW
(Not to Scale)
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Table 5. Pin Function Descriptions
Pin No. Mnemonic Description
1, 2, 5 DNC Do Not Connect.
3 COM Common.
4 ST Self-Test Control (Logic Input).
6
7
8
XOUT
VDD
VDD2
X-Axis Acceleration Output.
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3.135 V to 6 V. Connect to VDD2.
3.135 V to 6 V. Connect to VDD.
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Rev. A | Page 7 of 16
PERCENT OF POPULATION PERCENT OF POPULATION PERCENT OF POPULATION
10
15
20
25
10
15
20
25
30
35
40
45
10
20
30
40
50
60
0
5
0
5
0
15.2 –0.07 –0.07
ADXL001
16.0 0 0
(mV/g)
VOLTS
VOLTS
16.1 0.01 0.01
16.2
O 0.02 0.02
16.3
0.03 0.03
VS = 3.3 V, TA = 25°C, unless otherwise noted.
16.4
0.04 0.04
16.5
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Rev. A | Page 8 of 16
PERCENT OF POPULATION PERCENT OF POPULATION PERCENT OF POPULATION
10
15
20
25
30
10
15
20
25
30
35
10
15
20
25
0
5
0
5
0
5
4.32 15.3
4.32
15.4
4.34 4.34
15.5
4.36
4.36 15.6
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4.38 15.7
4.38
4.40 15.8
4.40
15.9
4.42
4.42 16.0
(mV/g)
(mV/g)
(mV/g)
4.44
16.1
4.44
4.46 16.2
4.46
4.48 16.3
4.48 16.4
4.50
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4.50 16.5
4.52
4.56 4.54
10
15
20
25
10
15
20
25
30
10
15
20
25
30
0
5
0
5
0
5
360 2.17 2.17
365
2.18
370 2.18
375 2.19
2.19
380 2.20
385 2.20
2.21
390
2.21
395 2.22
400
O 2.23 2.22
(mV)
(mV/g)
(mV/g)
405
2.24 2.23
410
415 2.25
2.24
420 2.26
B 2.25
Rev. A | Page 9 of 16
PERCENT OF POPULATION PERCENT OF POPULATION PERCENT OF POPULATION
10
15
20
25
30
10
15
20
25
30
35
40
10
15
20
25
30
0
5
0
5
0
5
110
55
2.000
112
56
2.075
114
57
2.150
116
LE
118
58
2.225
120
2.300
59 122
2.375
60
124
2.450
61
126
(mV)
(mV)
(mA)
128
2.525
62
130
2.600
63
132
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134
Figure 15. ADXL001-500, Self-Test Delta
Figure 14. ADXL001-250, Self-Test Delta
2.750 136
65
138
2.825
66
140
2.900
67
142
07510-010 07510-029 07510-028
ADXL001
ADXL001
40
35
PERCENT OF POPULATION
30
25
20
15
10
07510-012
5
07510-011
0
CH1 500mV BW CH2 500mV BW M10.0µs A CH2 1.38V
2.100
2.175
2.250
2.325
2.400
2.475
2.550
2.625
2.700
2.775
2.850
2.925
3.000
T 42.80%
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(mA)
Figure 17. ISUPPLY at 125°C Figure 18. Turn-On Characteristic (10 μs per DIV)
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Rev. A | Page 10 of 16
ADXL001
THEORY OF OPERATION
DESIGN PRINCIPLES MECHANICAL SENSOR
The ADXL001 accelerometer provides a fully differential sensor The ADXL001 is built using the Analog Devices SOI MEMS
structure and circuit path for excellent resistance to EMI/RFI sensor process. The sensor device is micromachined in-plane
interference. in the SOI device layer. Trench isolation is used to electrically
This latest generation SOI MEMS device takes advantage isolate, but mechanically couple, the differential sensing elements.
of mechanically coupled but electrically isolated differential Single-crystal silicon springs suspend the structure over the
sensing cells. This improves sensor performance and size handle wafer and provide resistance against acceleration forces.
because a single proof mass generates the fully differential
ANCHOR
signal. The sensor signal conditioning also uses electrical
feedback with zero-force feedback for improved accuracy MOVABLE
PLATE FRAME
and stability. This force feedback cancels out the electrostatic CAPACITORS
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forces contributed by the sensor circuitry. UNIT
FIXED
ACCELERATION
SENSING
CELL PLATES
Figure 19 is a simplified view of one of the differential sensor
cell blocks. Each sensor block includes several differential
capacitor unit cells. Each cell is composed of fixed plates attached UNIT
FORCING
MOVING
to the device layer and movable plates attached to the sensor PLATE
CELL
07510-019
ANCHOR
Rev. A | Page 11 of 16
ADXL001
APPLICATIONS INFORMATION
APPLICATION CIRCUIT ACCELERATION SENSITIVE AXIS
Figure 20 shows the standard application circuit for the ADXL001. The ADXL001 is an x-axis acceleration and vibration-sensing
Note that VDD and VDD2 should always be connected together. device. It produces a positive-going output voltage for vibration
The output is shown connected to a 1000 pF output capacitor toward its Pin 8 marking.
for improved EMI performance and can be connected directly PIN 8
to an ADC input. Use standard best practices for interfacing
with an ADC and do not omit an appropriate antialiasing filter.
VS
CVDD
07510-002
0.1µF VDD2
8 VDD
DNC 1 7 Figure 21. XOUT Increases with Acceleration in the Positive X-Axis Direction
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ADXL001 XOUT
OPERATING VOLTAGES OTHER THAN 5 V
DNC 2 TOP VIEW 6 XOUT
(Not to Scale) COUT The ADXL001 is specified at VS = 3.3 V and VS = 5 V. Note that
COM 1nF
3 5 DNC some performance parameters change as the voltage is varied.
4
In particular, the XOUT output exhibits ratiometric offset and
ST
ST sensitivity with supply. The output sensitivity (or scale factor) scales
07510-023
SELF-TEST
Figure 20. Application Circuit
The fixed fingers in the forcing cells are normally kept at the
same potential as that of the movable frame. When the digital
LE sensitivity is typically 16 mV/g. At VS = 5 V, the output sensitivity
is nominally 24.2 mV/g. XOUT zero-g bias is nominally equal to
VS/2 at all supply voltages.
3.5
HIGH LIMIT
plate. This potential creates an attractive electrostatic force, causing 2.5
the sensor to move toward those fixed fingers. The entire signal
channel is active; therefore, the sensor displacement causes a
2.0
change in XOUT. The ADXL001 self-test function verifies proper
operation of the sensor, interface electronics, and accelerometer
LOW LIMIT
channel electronics. 1.5
07510-016
Do not expose the ST pin to voltages greater than VS + 0.3 V. If
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this cannot be guaranteed due to the system design (for instance, if 1.0
3.2 3.7 4.2 4.7 5.2 5.7
there are multiple supply voltages), then a low VF clamping SUPPLY VOLTAGE (V)
diode between ST and VS is recommended. Figure 22. Typical Zero-g Bias Levels Across Varying Supply Voltages
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Rev. A | Page 12 of 16
ADXL001
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as the accelerometer clock, the term appears as an offset. If the the 1 MHz internal clock frequency (or any harmonic thereof),
difference frequency is outside the signal bandwidth, the output noise on the supply can cause interference on the ADXL001
filter attenuates it. However, both the power supply clock and output. If additional decoupling is needed, a 50 Ω (or smaller)
the accelerometer clock may vary with time or temperature, resistor or ferrite bead can be inserted in the supply line.
which can cause the interference signal to appear in the output Additionally, a larger bulk bypass capacitor (in the 1 μF to
filter bandwidth. 4.7 μF range) can be added in parallel to CDC.
The ADXL001 addresses this issue in two ways. First, the high ELECTROMAGNETIC INTERFERENCE
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clock frequency, 125 kHz for the output stage, eases the task of
choosing a power supply clock frequency such that the difference
between it and the accelerometer clock remains well outside the
filter bandwidth. Second, the ADXL001 has a fully differential
The ADXL001 can be used in areas and applications with high
amounts of EMI or with components susceptible to EMI emissions.
The fully differential circuitry of the ADXL001 is designed to be
robust to such interference. For improved EMI performance,
signal path, including a pair of electrically isolated, mechanically especially in automotive applications, a 1000 pF output capacitor is
coupled sensors. The differential sensors eliminate most of the recommended on the XOUT output.
power supply noise before it reaches the demodulator. Good
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high frequency supply bypassing, such as a ceramic capacitor
close to the supply pins, also minimizes the amount of interference.
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Rev. A | Page 13 of 16
ADXL001
OUTLINE DIMENSIONS
0.031 (PLATING OPTION 1,
SEE DETAIL A
0.025 FOR OPTION 2)
TE 111808-C
DETAIL A
(OPTION 2)
ORDERING GUIDE
Model 1
ADXL001-70BEZ
ADXL001-70BEZ-R7
ADXL001-250BEZ
Temperature Range
−40°C to +125°C
−40°C to +125°C
−40°C to +125°C
LE g Range
±70 g
±70 g
±250 g
Package Description
8-Terminal LCC
8-Terminal LCC
8-Terminal LCC
Package Option
E-8-1
E-8-1
E-8-1
ADXL001-250BEZ-R7 −40°C to +125°C ±250 g 8-Terminal LCC E-8-1
ADXL001-500BEZ −40°C to +125°C ±500 g 8-Terminal LCC E-8-1
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ADXL001-500BEZ-R7 −40°C to +125°C ±500 g 8-Terminal LCC E-8-1
EVAL-ADXL001-250Z Evaluation Board
EVAL-ADXL001-500Z Evaluation Board
EVAL-ADXL001-70Z Evaluation Board
1
Z = RoHS Compliant Part.
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Rev. A | Page 14 of 16
ADXL001
NOTES
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Rev. A | Page 15 of 16
ADXL001
NOTES
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Rev. A | Page 16 of 16