A New Concept in Non-Contact Thickness Measurement: Confocal Displacement Sensors
A New Concept in Non-Contact Thickness Measurement: Confocal Displacement Sensors
A New Concept in Non-Contact Thickness Measurement: Confocal Displacement Sensors
in Non-Contact
Thickness
Measurement
Confocal Displacement Sensors
CL-3000 Series
The switch to non-contact measurement
systems instantly resolves conventional issues
The most common “thickness measurement systems” are contact sensors such as calipers and micrometers.
In recent years, customers who use thickness measurement systems have increasingly been asking about switching to
non-contact measurement systems. In this booklet, we explain the issues with conventional approaches and the
advantages to switching to non-contact measurement.
Supports quality
improvement
Non-contact measuring
The non-contact method is capable of measuring even soft targets
accurately, and eliminates human errors since measurement values are
displayed digitally.
2
A New
Concept in
Non-Contact
Thickness
Measurement
Supports faster
inspection cycle times
High-speed sampling
Absence of a mechanical assembly makes high-speed measuring
possible.
This leads to reduced inspection cycle time, since targets can be
inspected without stopping.
3
case
Resin sheet thickness
1 measurement
Conventional
mode Sample inspections with calipers or micrometers
Common concerns
Human measuring errors
Common requests
We want to increase measurement accuracy and
eliminate human measuring errors
Attach opposing
The (A + B) value will
sensors facing the
remain fixed even if the
target surface.
target moves up or down,
absorbing run-out.
A
C
B
Thickness t = C − (A + B)
Calculated
automatically on the
controller.
4
Confocal Displacement Sensors
CL-3000 Series
❙ Triangulation ❙ CL Series
method Thickness 1000 µm Thickness 1000 µm
Optical axis Optical axis
misalignment
500 µm misalignment
0 µm
Zero optical
Optical axis Thickness Error axis Thickness Error
Angle measurement Angle measurement
misalignment result (µm) (µm) misalignment result (µm) (µm)
1.5 987.2 -12.8 1.5 1000.3 0.3
1.0 991.1 -8.6 1.0 1000.2 0.2
0.5 995.7 -4.3 0.5 1000.0 0.0
0.3 997.4 -2.6 0.3 1000.0 0.0
0.0 1000.0 0.0 0.0 1000.0 0.0
-0.3 1002.6 2.6 -0.3 1000.0 0.0
-0.5 1004.4 4.4 -0.5 1000.0 0.0
-1.0 1008.9 8.9 -1.0 1000.2 0.2
-1.5 1013.4 13.4 -1.5 1000.3 0.3
Advantage 2
5
case
Wafer blank thickness
2 measurement
Conventional
mode Management by contact sensors
Common concerns
Mechanical assemblies cause cycle time bottlenecks
Common requests
We want to measure without stopping targets
Spectrometer
6
Confocal Displacement Sensors
CL-3000 Series
Advantage 1
Advantage 2
Advantage 3
7
case
Glass or film thickness
3 measurement
Conventional
mode Triangulation method laser displacement sensors
Common concerns
Misalignment of position for measurement when
target height changes
Common requests
We want to conduct accurate thickness measurement
of targets during motion
8
Confocal Displacement Sensors
CL-3000 Series
Advantage 2
Measuring using triangulation can produce measurement errors in The CL Series produces high accuracy measurements even on
the event of warpage to or tilting of transparent or mirrored targets. targets that are tilted or warped, thanks to its use of the coaxial
confocal method.
2.0 2.0
1.0 1.0
0.0 0.0
-1.0 -1.0
[μm] -2.0 [μm] -2.0
-3.0 -3.0
-4.0 -4.0
-5.0 -5.0
-1.2 -1.0 -0.8 -0.6 -0.4 -0.2 -0.0 0.2 0.4 0.6 0.8 1.0 1.2 -1.2 -1.0 -0.8 -0.6 -0.4 -0.2 -0.0 0.2 0.4 0.6 0.8 1.0 1.2
Measuring distance [mm] Measuring distance [mm]
Advantage 3
from
15 µm*
-50 -40 -30 -20 -10 0 10 20 30 40 50
Height (µm)
*For CL-PT010
9
CL-3000 Series Technology Guide
The CL-3000 Series was developed around the concept of stable, inline measurement of any target, regardless of colour,
material or surface condition. It minimises latent measuring risks and achieves the goal of accurate measurement.
Transmitting
Short Red
Range
Long A dynamic range 26 times greater than The received light is split by
Blue
Range conventional units. Light is received by four wavelength and focused onto the
high-resolution CMOSs, allowing for high Quad CMOS.
accuracy measurement on all kinds of materials.
10
Measures any material or colour accurately
Capable of accurately measuring a variety of target materials and colours with a single sensor head.
High-precision measurement
Stable measured values
Quad
on any material without Processing Unique calculation processing
System
needing specialised heads Reliability ▶ High Low High Low
Spectrometer
CL Series
1/50th
11
❙ CL-3000 Series Head Lineup
Compact ø8 Model Ultra High-Accuracy Model High-Accuracy Model Mid-Range Model Profile Measurement Model
[mm] CL-L007/CL-P007 CL-L015/CL-P015 CL-L030/CL-P030 CL-L070/CL-P070 CL-PT010
100
80
Measurement
range Measurement
60 70 ± 10 range
Measurement mm 10 ± 0.3
range mm
30 ± 3.7
40 Measurement mm
range
Measurement 15 ± 1.3
range mm 60 mm
7 ± 1.5
20 mm
26.3 mm
70 mm 9.7 mm
5.5 mm 13.7 mm
0 30 mm 10 mm
7 mm 15 mm
80 mm 10.3 mm
8.5 mm 16.3 mm 33.7 mm
Quad type Spot type Quad/Spot type Quad/Spot type Quad/Spot type Spot type
Linearity
(Standard)
±2.1 µm ±0.96 µm ±0.49 µm ±0.94 µm ±2.2 µm ±0.22 µm
Linearity
(High precision)
±0.91 µm ±0.55 µm ±0.41 µm ±0.72 µm ±2.0 µm ±0.2 µm
❙ Optional
SAFETY INFORMATION
Please visit: www.keyence.com Please read the instruction manual carefully in
order to safely operate any KEYENCE product.
The information in this publication is based on KEYENCE’s internal research/evaluation at the time of release and is subject to change without notice. WW11-1037
Company and product names mentioned in this catalogue are either trademarks or registered trademarks of their respective companies.
Copyright © 2018 KEYENCE CORPORATION. All rights reserved. CL3000ThicknessMeasurement-WW-TG-GB 1128-1 600S29