Microsystems and Micro Electronics
Microsystems and Micro Electronics
Microsystems and Micro Electronics
It is a well-recognized fact that microelectronics is one of the most influential technologies of the twentieth century.
The boom of the microelectromechanical systems industry in recent years would not have been possible without the
maturity of microelectronics technology. Indeed, many engineers and scientists in today's MEMS industry are
veterans of the microelectronics industry, as the two technologies do share many common fabrication technologies.
However, overemphasis on the similarity of the two technologies is not only inaccurate, but it can also seriously
hinder further advances of microsystems development. We will notice that there are significant differences in the
design and packaging of microsystems from that of integrated circuits and microelectronics. It is essential that
engineers recognize these differences and develop the necessary methodologies and technologies accordingly. Table
1 summarizes the similarities and differences between the two technologies.
Table 1
S.No. Microelectronics Microsystems (silicon based)
1. Uses single crystal silicon die. Silicon compounds. Uses single-crystal silicon die and a few other
and plastic materials, such as GaAs, quartz, polymers, and
metals.
2. Transmits electricity for specific electrical Performs a great variety of specific biological,
functions chemical, electromechanical, and optical functions