Indentation-Based Analysis of Interfacial Properties of The Film-Substrate Structure and Instrument Development
Indentation-Based Analysis of Interfacial Properties of The Film-Substrate Structure and Instrument Development
Indentation-Based Analysis of Interfacial Properties of The Film-Substrate Structure and Instrument Development
Indentation-based
analysis of interfacial
31
properties of the
film-substrate structure
and instrument
development
Xu, Long, PhD, Northwestern Polytechnical
University, Professor, School of Mechanics,
Civil Engineering and Architecture, Xi'an,
China, Yangtze Delta Region Institute of
Tsinghua University, Scientist, Jiaxing, China
I Introduction
As multi-material science research progresses, traditional mechanical
material characterization methods for substrate materials increasingly
fall short of current testing requirements. Nanoindentation technique,
known for its use of its ultra-low loads and monitoring sensors with dis-
placement resolution better than 1 nm, has been widely used in measuring
the mechanical properties of substrate materials at micro and nanoscale
(Lin et al., 2009; Nagamura and Tanaka, 2009; Gizatulin and Sultanov, 2018;
Long, Li, et al., 2022). Numerical simulations have been used to study the
intrinsic relationship between the morphology, mechanical properties
of elastoplastic materials, and the applied load–penetration depth curve
(P–h curve) has been studied through dimensionless analysis (Long, Hu,
1
2 Small-Scale Mechanical Testing
et al., 2019; Long, Du, et al., 2018; Long, Zhang, et al., 2019). The plastic zone
radius proposed in dimensionless analysis helps overcome the challenging
uniqueness issue (Long, Shen, et al., 2022). Given the difficulties of tradi-
tional numerical simulations, researchers have proposed deep learning
methods to learn the time series of P–h curves, thereby mapping the P–h
curves to the stress-strain response of elastoplastic materials (Long et al.,
2023). Sintered silver nanoparticles (AgNPs) can form thin films with suf-
ficiently high thermal conductivity, which can be widely applied in high-
power fields. Long et al. (Long et al., 2021; Long, Tang, et al., 2018) evaluated
the stress-strain relationship of AgNPs materials under different strain
rates using Berkovich nanoindentation method, revealing the advantage of
evaluating the sensitivity of AgNPs to strain rates. Furthermore, due to the
intrinsic differences between layered materials, mechanical and thermal
effects can lead to mismatches in stress and strain between two materials,
resulting in functional failure of thin film materials (Dean, Aldrich-Smith
and Clyne, 2011).
Due to the advantages of simplicity in adhesive use, lightweight, corro-
sion resistance, and good fatigue performance, the film-substrate structure
is widely used in industries such as automotive, aerospace, and micro-
electronics (He, 2011). For more reliable application of the film-substrate
structures, precise analysis and prediction of the influence of the cohesive
force of the film on the substrate are essential. Cohesive force models are
used to simulate and predict the cracking and crack propagation processes
of adhesive structures. This model was first proposed by Barenblatt (Baren-
blatt, 1959) and Dugdale (Dugdale, 1960). When the tensile force reaches a
critical value, cracks begin to initiate, then the tensile force decreases, and
the cracks propagate forward until complete detachment. Cohesive force
models are also widely used in analyzing the fracture failure of metals,
ceramics, polymer materials, and composite materials. They can accurately
analyze phenomena such as the plastic zone at the crack tip, cracking, and
creep behavior (Feraren and Jensen, 2004; Park, Paulino and Roesler, 2008).
Campilho et al. (Campilho et al., 2013) studied the influence of cohesive
force model shape (triangular, exponential, or trapezoidal) on modeling
of single-lap adhesive joint with thin adhesive layer. The study showed
that the shape of the cohesive force model has a significant effect on the
overlap structure bonded with ductile adhesives but has little effect on
brittle adhesives. Currently, widely adopted cohesive force models include
the parabolic model in exponential form, the elastic perfectly plastic tri-
linear model (Feraren and Jensen, 2004), and the elastic bilinear model
(Park, Paulino and Roesler, 2008). Tvergaard and Hutchinson (Tvergaard
and Hutchinson, 1992) proposed elastic and ideal plastic trilinear cohesive
force models, while Camacho and Oritiz proposed a bilinear cohesive force
model for brittle fracture. Evers and Parks (Evers et al., 2002) established
Chapter 31 | Indentation-based analysis of i 3
Ⅱ Cohesive interface
Various parameters within the cohesive layer describe the mechanical state
of the cohesive zone. The traction–separation relationship within the cohe-
sive zone mainly includes bilinear, exponential, and trapezoidal relation-
ships. Figure 31.1 shows the typical traction–separation curve, illustrating
the relationship between the normal stress on the crack surface and the
4 Small-Scale Mechanical Testing
Starting with the premise that stress at the crack tip cannot be infinitely
large, Dugdale (Dugdale, 1960) introduced the material's yield stress as the
cohesive stress but stipulated that the stress required to open the crack must
be significantly greater than the equivalent stress under multiaxial stress
states. Delamination between thin films and substrates is a critical factor
in device failure, making in-depth study of delamination phenomena in
thin films highly significant. In order to better simulate this delamination
behavior between thin films and substrates, a layer of cohesive elements
was added between the thin film and the substrate in the finite element
model of this study.
Chapter 31 | Indentation-based analysis of i 5
In the study of the cohesive zone, it was found that since the attraction
between atoms is a function of the distance between atoms being pulled
apart, a certain crack tensile displacement δ less than a certain critical
value can exist on the crack surface in this tiny region. The stress σ on the
crack surface is thus a function of this opening displacement. Therefore,
within the cohesive zone, the normal stress on the crack surface is typically
defined as a function of the displacement on the crack surface, known as
the Traction–Separate Law (TSL) on the crack interface, or the constitu-
tive relationship of the cohesive zone model. The functional expression
is as follows:
σ = f(δ) (31.)
From an energy perspective, the energy released during the formation of
new crack surfaces in the cracking process is defined as its fracture energy
φ. The general formula is:
ϕ = ∫ σdδ = ∫ f(δ)dδ (31.)
not as important. However, recent studies have shown that the shape of
the TSL constitutive relationship curve in the cohesive zone has a signifi-
cant impact on the macroscopic mechanical behavior of crack surfaces in
material structures (Alfano, 2006).
In the continuous application and research of cohesive force models,
various TSL constitutive relationships have been developed. Among them,
the most commonly used ones include bilinear, trapezoidal (tri-linear),
exponential, and polynomial TSL constitutive relationships. In the material
property module of the finite element software ABAQUS, only bilinear and
exponential TSL constitutive relationships are included. If one wishes to
utilize other forms of TSL constitutive relationships for numerical simu-
lations in ABAQUS, they must make use of the subroutine interface pro-
vided by ABAQUS and write the necessary subroutine for the desired TSL
constitutive relationship implementation.
where σn represents the normal stress value, and τn represents the tan-
gential stress value. σ max and τ max are the maximum normal and tangential
stress values, respectively, corresponding to the crack interface opening
displacement values δ 0n a nd δ 0t , which are characteristic displacement values
of the cracking process. When reaching their maximum values, the stress
begins to decrease to zero, indicating the completion of crack initiation,
with corresponding displacement values of the final crack initiation dis-
placements δ fna nd δ ft. The critical fracture energy thresholds in all direc-
tions, ϕ cn and ϕ ct , are calculated as:
ϕ cn = _ 1 σ max · δ fn (31.)
_ 2
1
ϕ t c
=
τ · δ f
(31.)
2 max t
material is the same, then the two indenters are considered to follow the
principle of equivalent area. This criterion is particularly suitable for the
contact problem of nanoindentation in this study. The entire model con-
sists of 94,054 nodes and 93,916 elements, with a maximum mesh size of
0.05 mm and a minimum mesh size of 0.001 mm. As shown in Figure 31.2,
the thin film is made of linear elastic metal material with a thickness of
10 μm, a Young's modulus range of 10 to 50 GPa and a Poisson's ratio range
of 0.1 to 0.5; the range for the metal substrate is from 80 to 120 GPa. For
the Berkovich indenter, an elastic model with a Young's modulus of 1060
GPa and a Poisson's ratio of 0.07 is used to describe the diamond material.
The cohesive zone model parameters are taken from reference (Li and Suo,
2007) as τmax = 100 MPa,δ = 0.1 μm,𝜙 = 5 J/m2.
The cohesive zone model is commonly used to simulate the bonding
behavior of interfaces. Its main feature is that it can not only predict the
fracture behavior of structures but also be used to study crack initiation
and propagation. Traditional cohesive zone models are independent of
loading history when studying delamination crack propagation, cannot
record the damage behavior of interfaces, and are reversible. Moreover,
they cannot handle the coupling behavior between normal and tangential
directions well when the normal opening displacement is negative (due
to mutual penetration of the thin layer and substrate under compressive
loading). Therefore, the cohesive zone model used in this study employs
the bilinear cohesive zone model proposed by Camanho (Camanho, Davila
and de Moura, 2003) for interface failure analysis. In the two-dimensional
10 Small-Scale Mechanical Testing
IV Development of nanoindentation
instrumentation
Based on the mechanical performance characteristics of electronic pack-
aging materials, this study developed a set of dimensionless functions
comprising parameters such as temperature, strain rate, elastic modulus,
yield stress, void volume fraction, characteristic stress, characteristic strain,
and plastic zone radius, along with corresponding indentation analysis
reversion algorithms. These were used to evaluate the in-situ interface
properties of electronic packaging materials based on TSLs. By considering
the plastic zone radius under the indenter as a key variable, the constitutive
parameter values corresponding to different microstructural morphol-
ogies of packaging materials were obtained from the P–h curves of the
indentation, thus avoiding the uniqueness issue in traditional indentation
reversion analysis. Furthermore, statistical machine learning and analysis
were performed on a large amount of experimental and simulation data
to further refine the quantitative deformation laws of the plastic zone size
under the indenter, depicting the unique characteristics of indentation
conditions in three-dimensional phase diagrams and proposing a funda-
mental solution to the uniqueness problem of constitutive relationships
and parameters of packaging materials. An efficient testing instrument,
the electronic packaging material mechanical property nanoindentation
12 Small-Scale Mechanical Testing
tester, and its supporting testing instruments were developed for in-situ
measurement of local material mechanical properties.
Furthermore, based on the proposed reversion algorithm for electronic
packaging material mechanical properties, this study aims to develop an
efficient testing instrument capable of in-situ measurement of local mate-
rial mechanical properties–the electronic packaging material mechanical
property nanoindentation tester. As shown in Figure 31.5, the instrument
mainly consists of components such as the indenter, connecting rod, spec-
imen stage, upper computer, lower computer, force sensor, displacement
sensor, fixation device, and display screen. Leveraging extensive finite
element simulations and optimized machine learning algorithms con-
ducted in this project, a complete set of inversion algorithms has been
embedded into the control system of the instrument's upper computer.
When users operate the instrument, the surface of the specimen to be
tested is fixed facing upward on the specimen stage, and the indentation
conditions are set via the display screen. The upper computer controls
the force sensor and displacement sensor, while the lower computer con-
ducts the indentation test on the specimen. Based on the P–h curve of the
indentation process, the upper computer can instantaneously calculate
the elastic and plastic mechanical parameters of the material, obtain the
material's complete constitutive characteristics, and display and save the
data files on the display screen.
(Er Ed )
1 − υ 2d
1 − _
E = ( 1 − υ 2) / _ (31.)
VI Conclusions
Film-substrate systems are significant in many critical engineering applica-
tions. Accurate analysis of the cohesive effects on the mechanical response
of the film-substrate structure is challenging yet critical for reliable appli-
cations. In this study, the damage mechanism and evolution behavior
of the cohesive layer in the film-substrate structure are presented. As a
Chapter 31 | Indentation-based analysis of i 15
REFERENCES
Alfano, Giulio (2006) “On the influence of the shape of the interface law on the application of
cohesive-zone models,” Composites Science and Technology. Elsevier BV, 66(6), pp. 723–730.
doi: 10.1016/j.compscitech.2004.12.024.
Barenblatt, G.I (1959) “The formation of equilibrium cracks during brittle fracture. General
ideas and hypotheses. Axially-symmetric cracks,” Journal of Applied Mathematics and
Mechanics. Elsevier BV, 23(3), pp. 622–636. doi: 10.1016/0021-8928(59)90157-1.
Bittencourt, E. et al. (2003) “A comparison of nonlocal continuum and discrete dislocation
plasticity predictions,” Journal of the Mechanics and Physics of Solids. Elsevier BV, 51(2), pp.
281–310. doi: 10.1016/s0022-5096(02)00081-9.
Camanho, P. P., Davila, C. G. and de Moura, M. F. (2003) “Numerical Simulation of Mixed-
Mode Progressive Delamination in Composite Materials,” Journal of Composite Materials.
SAGE Publications, 37(16), pp. 1415–1438. doi: 10.1177/0021998303034505.
Campilho, R.D.S.G. et al. (2013) “Modelling adhesive joints with cohesive zone models:
effect of the cohesive law shape of the adhesive layer,” International Journal of Adhesion
and Adhesives. Elsevier BV, 44, pp. 48–56. doi: 10.1016/j.ijadhadh.2013.02.006.
Dattaguru, B. et al. (1994) “Finite element estimates of strain energy release rate components
at the tip of an interface crack under mode I loading,” Engineering Fracture Mechanics.
Elsevier BV, 49(3), pp. 451–463. doi: 10.1016/0013-7944(94)90273-9.
16 Small-Scale Mechanical Testing
Dean, J., Aldrich-Smith, G. and Clyne, T.W. (2011) “Use of nanoindentation to measure
residual stresses in surface layers,” Acta Materialia. Elsevier BV, 59(7), pp. 2749–2761. doi:
10.1016/j.actamat.2011.01.014.
Dugdale, D.S. (1960) “Yielding of steel sheets containing slits,” Journal of the Mechanics and
Physics of Solids. Elsevier BV, 8(2), pp. 100–104. doi: 10.1016/0022-5096(60)90013-2.
Evers, L.P. et al. (2002) “Crystal plasticity model with enhanced hardening by geometrically
necessary dislocation accumulation,” Journal of the Mechanics and Physics of Solids. Elsevier
BV, 50(11), pp. 2403–2424. doi: 10.1016/s0022-5096(02)00032-7.
Feraren, P. and Jensen, H.M. (2004) “Cohesive zone modelling of interface fracture near
flaws in adhesive joints,” Engineering Fracture Mechanics. Denmark, 71(15), pp. 2125–2142.
doi: 10.1016/j.engfracmech.2003.12.003.
Gizatulin, A.R. and Sultanov, A.K. (2018) “Application of whispering gallery modes (WGM)
in optical communications,” Proceedings of SPIE - The International Society for Optical
Engineering. Russian Federation: SPIE. doi: 10.1117/12.2317739.
Gurtin, M.E. (2000) “On the plasticity of single crystals: Free energy, microforces, plastic-
strain gradients,” Journal of the Mechanics and Physics of Solids. United States: Elsevier
Science Ltd, 48(5), pp. 989–1036. doi: 10.1016/S0022-5096(99)00059-9.
He, X. (2011) “A review of finite element analysis of adhesively bonded joints,” Interna-
tional Journal of Adhesion and Adhesives. China, 31(4), pp. 248–264. doi: 10.1016/j.ijad-
hadh.2011.01.006.
Krueger, R. and O’Brien, T.K. (2001) “Shell/3D modeling technique for the analysis of
delaminated composite laminates,” Composites Part A: Applied Science and Manufacturing.
United States: Elsevier Science Ltd, 32(1), pp. 25–44. doi: 10.1016/S1359-835X(00)00133-0.
Li, T. and Suo, Z. (2007) “Ductility of thin metal films on polymer substrates modulated by
interfacial adhesion,” International Journal of Solids and Structures. United States, 44(6), pp.
1696–1705. doi: 10.1016/j.ijsolstr.2006.07.022.
Lin, K.L. et al. (2009) “Recycling thin film transistor liquid crystal display (TFT-LCD) waste
glass produced as glass-ceramics,” Journal of Cleaner Production. Taiwan, 17(16), pp. 1499–
1503. doi: 10.1016/j.jclepro.2009.05.012.
Liu, P.F. and Islam, M.M. (2013) “A nonlinear cohesive model for mixed-mode delamination
of composite laminates,” Composite Structures. Elsevier BV, 106, pp. 47–56. doi: 10.1016/j.
compstruct.2013.05.049.
Long, X., Hu, B., et al. (2019) “Correlation of microstructure and constitutive behaviour of
sintered silver particles via nanoindentation,” International Journal of Mechanical Sciences.
China: Elsevier Ltd, 161–162. doi: 10.1016/j.ijmecsci.2019.105020.
Long, X., Shen, Z., et al. (2022) “Determine the unique constitutive properties of elastoplastic
materials from their plastic zone evolution under nanoindentation,” Mechanics of Mate-
rials. China: Elsevier B.V., 175. doi: 10.1016/j.mechmat.2022.104485.
Long, X., Li, J., et al. (2022) “Dimensionless Analysis to Determine Elastoplastic Properties of
Thin Films by Indentation,” Coatings. China: MDPI, 12(11). doi: 10.3390/coatings12111768.
Long, X., Du, C., et al. (2018) “Finite Element Analysis to the Constitutive Behavior of Sintered
Silver Nanoparticles Under Nanoindentation,” International Journal of Applied Mechanics.
China: World Scientific Publishing Co. Pte Ltd, 10(10). doi: 10.1142/S1758825118501107.
Long, X. et al. (2023) “Indentation Reverse Algorithm of Mechanical Response for Elasto-
plastic Coatings Based on LSTM Deep Learning,” Materials. China: MDPI, 16(7). doi:
10.3390/ma16072617.
Long, X., Zhang, X.-D., et al. (2019) Micromachines calibration of a constitutive model from tension
and nanoindentation for lead-free solder.
Chapter 31 | Indentation-based analysis of i 17
Long, X., Tang, W., et al. (2018) “Strain rate sensitivity of sintered silver nanoparticles using
rate-jump indentation,” International Journal of Mechanical Sciences. China: Elsevier Ltd,
140, pp. 60–67. doi: 10.1016/j.ijmecsci.2018.02.035.
Long, X. et al. (2021) “Strain rate shift for constitutive behaviour of sintered silver nanopar-
ticles under nanoindentation,” Mechanics of Materials. China: Elsevier B.V., 158. doi:
10.1016/j.mechmat.2021.103881.
Mi, Y. et al. (1998) “Progressive delamination using interface elements,” Journal of Com-
posite Materials. United Kingdom: SAGE Publications Ltd, 32(14), pp. 1246–1272. doi:
10.1177/002199839803201401.
Nagamura, T. and Tanaka, K. (2009) “Physical properties of polymer thin Films for device
application,” Iete Tech Rev, 109, pp. 1–2.
Park, K., Paulino, G.H. and Roesler, J.R. (2008) “Determination of the kink point in the
bilinear softening model for concrete,” Engineering Fracture Mechanics. United States,
75(13), pp. 3806–3818. doi: 10.1016/j.engfracmech.2008.02.002.
Turon, A. et al. (2006) “A damage model for the simulation of delamination in advanced
composites under variable-mode loading,” Mechanics of Materials. Elsevier BV, 38(11), pp.
1072–1089. doi: 10.1016/j.mechmat.2005.10.003.
Turon, A. et al. (2007) “An engineering solution for mesh size effects in the simulation of
delamination using cohesive zone models,” Engineering Fracture Mechanics. Elsevier BV,
74(10), pp. 1665–1682. doi: 10.1016/j.engfracmech.2006.08.025.
Tvergaard, V. and Hutchinson, J.W. (1992) “The relation between crack growth resistance and
fracture process parameters in elastic-plastic solids,” Journal of the Mechanics and Physics
of Solids. Denmark, 40(6), pp. 1377–1397. doi: 10.1016/0022-5096(92)90020-3.
Volokh, K. Y. (2004) “Comparison between cohesive zone models,” Communications in Numer-
ical Methods in Engineering. Wiley, 20(11), pp. 845–856. doi: 10.1002/cnm.717.