1 s2.0 S2211379722006398 Main
1 s2.0 S2211379722006398 Main
1 s2.0 S2211379722006398 Main
Results in Physics
journal homepage: www.elsevier.com/locate/rinp
A R T I C L E I N F O A B S T R A C T
Keywords: Metasurface excited multiple Fano resonances has become a hot spot and has been widely investigated and
Metasurface applied in the field of optics. A metasurface designed in this paper is composed of a silicon cuboid etched with an
Fano resonance akin rhombus hole and deposited periodically on the silica substrate. By introducing symmetry breaking, the
Bound states in continuum
symmetry-protected BIC is transformed into the quasi-BIC, and triple sharp Fano resonances, corresponding to
Absorber
1357 nm, 1421.7 nm, and 1588.8 nm respectively, with spectral contrasts of nearly 100 % are excited. Their
maximum Q-factor can reach ~ 3 × 104. Results of multipole decomposition show that the triple Fano resonances
are dominated by magnetic dipole (MD) or electric quadrupole (EQ). Additionally, by modifying the polarization
angle of the incident light, the metasurface performs excellently as a bidirectional optical switch. By adding the
aluminum layer under the original structure, an ultra-narrowband absorber is created with a maximum ab
sorption rate of ~ 100 %. The sensing performance of the absorber is studied, yielding the maximum sensitivity
of 255 nm/RIU and the maximum figure of merit (FOM) of 477 RIU− 1. The proposed metasurface and its
extension structure are potential to be applied in as high-performance biosensors, optical switch, and coherent
thermal radiation.
* Corresponding authors.
E-mail addresses: [email protected] (S. Yu), [email protected] (T. Zhao).
https://doi.org/10.1016/j.rinp.2022.106025
Received 17 July 2022; Received in revised form 17 September 2022; Accepted 27 September 2022
Available online 28 September 2022
2211-3797/© 2022 The Authors. Published by Elsevier B.V. This is an open access article under the CC BY-NC-ND license (http://creativecommons.org/licenses/by-
nc-nd/4.0/).
Y. Ye et al. Results in Physics 42 (2022) 106025
Fig. 1. Design diagrams of the proposed metasurface. (a) Top view of meta-atom. (b) Schematic diagram of meta-molecule. (c) Schematic diagram of the proposed
metasurface.
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Y. Ye et al. Results in Physics 42 (2022) 106025
Where ω0 is the resonant frequency, a1, a2 and b are the constant real
coefficients, γ represents the overall damping loss and the linewidth is
controlled by it. The Q-factor of Fano resonance is obtained by fitting.
Here, we set d = 110 nm, h1 = 140 nm, i.e. δ = 40 nm, to conduct nu
merical fitting of the FR2. Fig. 4(a) depicts its fitting results. The solid
yellow line illustrates the simulation waveform of the FR2 and the
dotted red line represents its fitting waveform. The calculation results of
Fig. 2. Transmission spectrum of the proposed metasurface. The solid yellow the Q-factor also depend on the following formula [37]:
curve represents the spectral line at δ = 0 nm, and the solid red curve represents ω0
the spectral line at δ = 100 nm. The embedded image illustrates the specific Q= (2)
2γ
structure of the meta-molecule in two different cases.
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Y. Ye et al. Results in Physics 42 (2022) 106025
Fig. 4. (a) The fitting result of FR2. The solid yellow line represents its simulation result, and the dotted red line represents its fitting result. (b) The relation between
Q-factor and β. The embedded image denotes the definition of the asymmetry degree β.
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Y. Ye et al. Results in Physics 42 (2022) 106025
Fig. 6. For δ = 150 nm, the normalized electromagnetic field distributions in the different positions of the meta-atom at the corresponding resonant wavelengths.
The color maps represent Hz distributions (|H/H0 |), and the white arrows show the electric field directions. (a) In the top view (5 nm above the meta-atom). (b) In the
cross-sectional view.
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Y. Ye et al. Results in Physics 42 (2022) 106025
spectral lines, especially FR2 and FR3, as characterized in Fig. 7. In fact, source for FR4. Fig. 8(b) illustrates that TD is generated by the polari
the degrees which the resonances are suppressed are affected by the zation current flowing along the torus meridian and can be represented
asymmetric break size likewise. A metasurface with the smaller asym equivalently by a set of magnetic dipoles aligned end to end along the
metric break is more sensitive to the introduced losses [41]. But, it can torus [44]. The TD possesses the unique characteristics different from
be explicated in Fig. 3 that the proposed metasurface usually works at δ the electric dipole and the magnetic dipole, such as data storage, elec
≥ 80 nm to achieve a high modulation depth. Thus, this metasurface is tromagnetic induction transparency, unique magnetic response and di
not pretty sensitive to the optical losses, which elucidates that the minor chroism and so forth [45]. Whereas, the electromagnetic behavior of TD
errors can be accepted to an extent and so the proposed metasurface is is usually covered by multiple effects of the charge and the magnetism,
robust. causing it untoward to observe [46]. The power scattered by the TD of
the FR4 excited by our designed metasurface at the polarization angle of
4. Application 90◦ is nearly twice that of the MQ, and far larger than that of the ED and
the MD. It offers a rare opportunity to research and apply the unique
To figure out whether the metasurface is polarization-dependent characteristics of the TD mode.
with respect to the light source, the polarization angle θ is defined as
the included angle between the direction of the incident electric field 5. DDM extension structure
polarization and the x-axis, as shown in Fig. 8(a) the polarization angle θ
is set as seven different values (other parameters are accordant with An ultra-narrowband absorber with the DDM structure is constructed
those in Fig. 1), and the transmission spectra of the metasurface at by adding the aluminum layer thick enough underneath the original
different polarization angles are received in Fig. 8(d). The modulation structure. Here, other parameters are consistent with those in Fig. 1(a)
depths of the three resonances decrease with the polarization angle and δ = 100 nm. The absorption A of the proposed DDM structure can be
increasing. Furthermore, a new resonance appears, called FR4 here, given by A = 1-R-T, where R and T represent the reflection and the
whose modulation depth increases as θ increases. When θ = 90◦ , the transmission respectively. Because the thickness of the aluminum layer
three resonances disappear, while the FR4 resonance forms at 1412.4 is much larger than the skin depth of the incidence light, A can be simply
nm. Obviously, the metasurface is dependent on the incident polariza expressed as A = 1-R. Fig. 9(a) displays the extended DDM structure,
tion. However, unlike other structures previously reported [42,43], not where the blue substrate is aluminum. The thickness of the silica is set as
only the original Fano resonances disappear when the polarization angle 200 nm. The DDM structure is placed in the environment with a
alters from 0◦ to 90◦ , but a new Fano resonance appears at other posi refractive index of 1.31. Fig. 9(b) shows the absorption spectrum of the
tion. It provides an idea for the application of the metasurface in bidi proposed DDM structure. Triple ultra-narrowband absorption peaks
rectional optical switching. When θ is 0◦ , the switching state appear at 1410.3 nm, 1499.2 nm and 1608.2 nm, named AP1, AP2 and
corresponds to (1,0,1,1), while as θ is transformed into 90◦ , the AP3 respectively. It can be manifested in Fig. 9(b) that the absorption
switching state is converted to (0,1,0,0) accordingly, which realizes the rate of the AP3 is almost 100 %, and the absorption rate of the AP1 and
bidirectional switching state transformation accurately. the AP2 also exceed 96 %. The full width at half maxima (FWHM) of the
To gain insight into the radiation characteristics of the new FR4 three peaks are 0.54 nm, 0.57 nm and 0.60 nm respectively, and the Q-
resonance, multipole decomposition is performed for it. Fig. 8(c) depicts factors are 2612, 2630 and 2680 respectively (Q = λ0 /FWHM, where
the normalized power scattered by the multipole moments. The result λ0 represents the wavelength at the absorption peak [47]). Because the
elucidates that the toroidal dipole (TD) is the dominant electromagnetic inherent ohmic loss arises after adding a metal layer, all the Q-factors
Fig. 8. (a) Schematic diagram of the polarization angle θ. (b) Schematic diagram of the toroidal dipole (TD). (c) The normalized power scattered by the multipole
moments at the FR4 for θ = 90◦ . (d) Transmission spectra at different θ.
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Y. Ye et al. Results in Physics 42 (2022) 106025
Fig. 9. (a) The diagram of the proposed DDM structure. (b) Absorption spectrum of the proposed DDM structure.
reduce inevitably. Whereas, compared with the narrowband absorber structure, the electric field Ey distributions at the three resonances are
reported previously, it possesses higher Q-factor and absorption rate as illustrated in Fig. 10. The parameters are the same as those in Fig. 9. In
well [48,49]. Moreover, the effective mode volume is also one of the Fig. 10, one can see that the reversed electric field is mainly concen
important parameters of the optical microcavity, which is defined as the trated in the dielectric layer, and there is almost no electric field dis
ratio of the total electromagnetic energy of the intrinsic mode in the tributions in the metal layer, which is completely different from the
cavity to the maximum electromagnetic energy density in the cavity. It MDM structure where the electric field is focused in the metal layer [29].
reflects the energy density distribution of the optical field in the three- Actually, the silica layer can be considered as a Fabry-Perot (F-P) cavity,
dimensional space, which is expressed as [50]. and the top silicon is treated as a near-perfect cavity mirror at the
∫ resonance. Because the electric field is mainly confined to the silicon
ε(r)|E(r)|2 dV layer, the aluminum layer plays a role as another cavity mirror, which
Ve = V (5)
max{ε(r)|E(r)|2 } enables the proposed DDM structure to possess the low dissipation rate
and thus obtain the ultra-narrowband resonances.
Where, ε(r) is permittivity and E(r) represents the electric field distri Now, the effect of the silica layer thickness t, i.e., the thickness of the
butions in the cavity. From formula (5), one can figure out that in the FP cavity layer, on the absorption characteristics is necessary to be
condition that the intensity of the incident light is constant, the effective discussed. According to the cavity resonance theory, if the phase shifts
mode volume is small, and correspondingly the Q/Ve is large, and the caused by the upper and lower interfaces are ignored, the FWHM of the
distribution of electric field energy in the cavity is concentrated com resonance absorption peak can be determined by the following formula
mendably, resulting in the strong interaction between light and matter. [52]:
The effective mode volumes of the triple resonances are calculated as
9.82 × 10-21m3 for FR1, 1.84 × 10-21m3 for FR2, and 2.14 × 10-21m3 for λ20 1− R
FWHM = √̅̅̅ (6)
FR3. Since photons are confined to nanoscale space, resulting in 2π nSiO2 t 2 R
remarkably small mode volumes. The light-field localization also leads √̅̅̅̅̅̅̅̅̅̅̅
to near-field enhancement effects. The DDM structure has a high Q/Ve Where R = R1 R2 , R1 and R2 denote the reflections from the top silicon
ratio, which possesses immense potential in the implementation of and the bottom aluminum, respectively. From formula (6), one can
efficient and low-threshold instruments, such as sensors [51]. know that if R is kept constant, there is an inverse relationship between
To comprehend the physical mechanism of the proposed DDM the FWHM of the absorption peaks and the FP cavity thickness t. As
Fig. 10. Electric field Ey distributions at three absorption peaks. (a) AP1. (b) AP2. (c) AP3.
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Y. Ye et al. Results in Physics 42 (2022) 106025
displayed in Fig. 11(a), if t increases from 160 nm to 240 nm, the AP3 6. Conclusion
produces a red shift with the shift wavelength successively decreasing
and a narrower linewidth, which fits well with formula (6). The other In summary, we design a metasurface structure, which consists of a
two peaks are concordant with its result. Meanwhile, the inverse rela silicon cuboid etched with an akin rhombus hole and a silicon dioxide
tionship between the FWHM of the AP3 and the t can be observed substrate. By breaking the in-plane symmetry of the structure, triple
distinctly from Fig. 11(b). Nevertheless, after t increases to 200 nm, the sharp and high spectral contrast Fano resonances are excited at 1357
absorption rate decreases with t increasing. Therefore, a compromise nm, 1421.7 nm, and 1588.8 nm in the transmission spectrum, with Q-
scheme with t = 200 nm is selected in this paper. Based on the above factors of 3054, 29542, and 17545, respectively. The transformation
research, if the absorption peak linewidth is required to be regulated, we from the symmetry-protected BIC to the quasi-BIC is verified by intro
just need adjust the thickness of the silica layer accordingly. It is bene ducing the asymmetry degree. Thereby, one can control the Q-factor and
ficial to the design of a high-coherence thermal emitter and a high- the linewidth of the Fano resonances by tuning the asymmetry degree of
performance sensor. the proposed metasurface to meet the needs of the specific situations.
Refractive index sensing technology has broad applications in mod The results of the cartesian multipole decomposition explicate that the
ern society, ranging from food safety [53,54] to biomedical diagnosis resonances at 1357 nm and 1588.88 nm are governed by the MD mode,
[55,56], which can be utilized to conduct qualitative research on liquids. while the resonance at 1421.7 nm is EQ mode. The metasurface re
In addition, there are various methods to be employed in the meta sponses after introducing the optical losses verify that the metasurface
surfaces for sensing applications, such as surface lattice resonances possesses strong robustness in the desired cases. Moreover, this structure
(SLR)[57] and toroidal resonances[58], and so on. Nevertheless, the is sensitive to the incident polarization enormously and a new Fano
amount of the above both detection peak (or valley) is usually just one resonance with the TD mode appears at 1412.4 nm at the polarization
[59] and the spectral contrast of the resonances is low [57], which is angle of 90◦ , thus the metasurface can be applied for the bidirectional
tough to adapt to some complicated multichannel detection environ optical switching. Additionally, an ultra-narrowband absorber with
ments. The proposed DDM structure in this paper owns multiple ab absorption rates higher than 96 % is obtained by adding an aluminum
sorption peaks with high Q-factors and strong local field enhancement, layer to form a DDM structure. The absorption linewidth can be nar
so it is potential to be applied in refractive index sensing. The DDM rowed by tuning the thickness of the silica layer flexibly. Finally, the
structure is immersed in the environment with different refractive extended DDM absorber is employed as a refractive index sensor with
indices varying from 1.31 to 1.35, and then the absorption spectra are the maximum sensitivity, and FOM value of 255 nm/RIU and 477 RIU− 1
obtained in Fig. 12 to investigate its sensing performance. The sensi respectively. The proposed metasurface and its extension structure are
tivity S and figure of merit (FOM) are utilized to measure the perfor promising to be applied as high-performance biosensors, optical switch,
mance of the sensors. The sensitivity is given by S = Δλ/Δn, where Δλ and coherent thermal radiation.
denotes the wavelength shift and Δn is the ambient refractive index
difference values. FOM is defined as FOM = S/δλ, where δλ is the line CRediT authorship contribution statement
width of the resonance [52]. It can be expounded from Fig. 12(a)-(c) that
with the increase of the ambient refractive index n, evident red shifts Yucheng Ye: Writing – original draft, Formal analysis, Conceptual
occur for all the three resonance peaks. Fig. 12(d) demonstrates that the ization, Visualization, Methodology. Shilin Yu: Writing – review &
resonance wavelength offset is directly proportional to the ambient editing, Project-administration. Hao Li: Methodology, Software. Ziang
refractive index. the sensitivities are calculated to be 208 nm/RIU, 255 Gao: Data curation, Validation. Lei Yang: Investigation, Validation.
nm/RIU, 94 nm/RIU, yielding the corresponding FOM to be 385 RIU− 1, Tonggang Zhao: Funding acquisition, Supervision.
477 RIU− 1, 157 RIU− 1 respectively. The sensor made with the proposed
DDM structure possesses the advantages of small size, high sensitivity,
high Q-factor, high FOM, and it can be extensively applied in various Declaration of Competing Interest
fields.
The authors declare that they have no known competing financial
interests or personal relationships that could have appeared to influence
the work reported in this paper.
Fig. 11. (a) Absorption spectra at the AP3 with different t (other parameters remain fixed). (b) The FWHM of the AP3 is inversely proportional to t.
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Y. Ye et al. Results in Physics 42 (2022) 106025
Fig. 12. (a) Absorption spectra of the AP1 in different n. (b) Absorption spectra of the AP2 in different n. (c) Absorption spectra of the AP3 in different n. (d)
Wavelength shifts of the three resonances related to n.
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