SLASeries_SLAMfSeries
SLASeries_SLAMfSeries
SLASeries_SLAMfSeries
Model SLA5850
with EtherNet/IP™ The SLA5800 Series thermal mass flow meters and mass flow controllers have
gained broad acceptance as the standard for accuracy, stability and reliability. These
products have a wide flow measurement range and are suitable for a broad range
of temperature and pressure conditions making them well suited for chemical and
petrochemical research, laboratory, analytical, fuel cell and life science applications,
among others.
Highlights of the SLA5800 Series include: industry leading long-term stability,
accuracy backed by superior 17025 metrology systems and methods using calibration
systems directly traceable to international standards, and a broad range of analog
and digital I/O options to suit virtually any application. An independent diagnostic/
service port permits users to set alarms and diagnostics, tune, troubleshoot or change
flow conditions without removing the mass flow controller from service.
The SLA5800 Series provides a highly configurable platform based on a simple
modular architecture. The feature set was carefully selected to enable drop-in
replacement and upgrade of many brands of mass flow controllers. With the wide
range of features and options available, the SLA5800 Series provides users with a
single platform to support a broad range of applications.
Features Benefits
Industry leading long-term sensor stability Increased system uptime and reduced cost of ownership by reducing maintenance and eliminating
periodic recipe adjustments and/or recalibrations
User accessible service port Simplified installation, start-up, troubleshooting and access to diagnostics provides maximum uptime
Alarms and diagnostics Ensures device is operating within user specified limits for high process yield and uptime
Superior valve technology Minimum leak-by, wide turndown, fast response and superior corrosion resistant materials
reduces overall gas panel cost and increases throughput
High accuracy traceable to international standards Calibration by verified metrology systems ensures precise process gas flow control
Simple modular design Easy-to-service elastomer sealed design provides for factory or field service maximizing uptime and
reducing total cost of ownership
View SLA5800
Product Page
BrooksInstrument.com 1
Product Description
2
Product Specifications
SLA5800 Series Standard
Flow Ranges and Pressure Ratings:
Mass Flow Mass Flow Flow Ranges Maximum Operating PED Module H
Controller Meter N2 Eq. Ratings Pressure Category
Model Model Min. F.S. Max. F.S. Standard ¹ Optional ¹
SLA5850 SLA5860 0.003 50 lpm 1500 psi/103 bar 4500 psi/310 bar @ Maximum SEP
Flow of 10 lpm N2
SLA5851 SLA5861 15 150 lpm² 1500 psi/103 bar NA³ SEP
SLA5853 SLA5863 100 2500 lpm 1000 psi/70 bar NA Category 1 for all 150 lb flanges
Category 2 for all other connections
¹ Sanitary fittings - Model code 5A, 5B, 5C, 5D & 5E rated to 500 psi Maximum Pressure
² 600 lpm of H2 possible with decreased accuracy in mechanical connection section > 40 psig inlet required for flows greater than 100 lpm N₂
equivalent.
³ 4500 psi/310 bar available as a special on SLA5861 only
SLA5850/60 SLA5851/61 SLA5853/63
PERFORMANCE
Flow Accuracy (accuracy includes ±0.9% of S.P. (20-100% F.S.),
uncertainty from reference standards)⁴ ±0.18% of F.S.
(2-20% F.S.)
>1100 slpm F.S.:
±1.0% of F.S.
Control Range 100:1 for F.S. from 1-50 lpm (50:1 for all other F.S. flows)
Temperature Coefficient Zero: <0.05% of F.S. per °C. Span: <0.1% of S.P. per °C
Attitude Sensitivity <0.2% F.S. maximum deviation from specified accuracy after re-zeroing
MECHANICAL
Valve Type Normally Closed, Normally Open, Meter
Primary Wetted Materials 316L Stainless Steel, High-Alloy Stainless Steel, Viton® fluoroelastomers (optional Buna-N, Kalrez®, Teflon®/Kalrez®,
and EPDM)
DIAGNOSTICS
Status Lights MFC Health, Network Status
Alarms ⁵ Control Valve Output, Flow Totalizer, Network Interruption, Over Temperature, Power Surge/Sag, Service Required
⁵ Alarm modes are dependent on the communications interface. These are described in the corresponding digital communication interface manual.
⁶ Hazardous area certifications have a temperature range limitation of 0-65°C.
⁷ >1500 psi DP as a Special Order
⁸ Metal and Teflon Seats <5% of Full Scale
Certifications - See Page 14
3
Product Specifications
Electrical Specifications
Communication Protocol RS485 Profibus® DeviceNetTM EtherCAT® EtherNet/IPTM & PROFINET
Electrical Connection
1 x 15-pin Male Sub-D, 1 x 15-pin Male Sub-D/ 1 x M12 with 1 x 5-pin M8 with 1 x 5-pin M8 with
(A) 1 x 9-pin Female threaded coupling nut threaded coupling nut threaded coupling
Sub-D (B) 2 x RJ45 nut / 2 x RJ45
Analog I/O 0-5 V, 1-5 V, 0-10 V, N/A 0-5V N/A
0-20 mA, 4-20 mA
Power Max./Purge
From +13.5 Vdc to From +11 Vdc to From +13.5 Vdc to From +13.5 Vdc to
+27 Vdc +25 Vdc +27 Vdc +27 Vdc
Power Requirements Watts, Max. Valve Orifice > 0.032”: 8 W Valve Orifice > 0.032”: 10 W Valve Orifice > 0.032”: 8.5 W Valve Orifice > 0.032”: 10 W
Valve Orifice ≤ 0.032”: 5 W Valve Orifice ≤ 0.032”: 7 W Valve Orifice ≤ 0.032”: 5.5 W Valve Orifice ≤0.032”: 7 W
Without Valve: 2 W Without Valve: 4 W Without Valve: 2.5 W Without Valve:3 W
To serve the unique requirements of your bioprocesses, Brooks Instrument has created two SLA5800 Series Biotech
options packages, built on the proven performance of the bioprocess-leading SLA5800 Series MFC .
As noted in the ordering instructions, all options are combined into packages with convenient ordering codes,
eliminating the need to order options individually.
High Turndown Ratio Reduces number of MFCs needed to control wide flow ranges
Enhanced Control Valve Extremely low leak rate can eliminate need for redundant valves
Enhanced Sensor Design Clean welded construction meets industry standards for cleanliness
Air, CO2, N2 &O2 : gas pages can be changed in situ to reduce the
Pre-calibrated Multi-Gas Pages8
variety of spare instruments kept in stock
Class VI Elastomers USP, FDA, ADI-free Class VI O-rings & Valve Seats
(Certificate Included)
8 CO2 Actual Gas Calibration available for SLA5850/60 & SLA5851/61. Use Model Code U for Performance Package, and Model
Code V for Premium package.
9 3.1 Material Certs for pressure boundary components available as an option on Premium Package.
Note: All Communications protocols listed in the Electrical Specification Table, above, are available with any Biotech Option
5
Product Specifications
SLA5800 Series Biotech
Performance SLA5850/60 SLA5851/61 SLA5853/63
Full Scale Flow Range (N2, Eq.) 5 sccm -50 lpm 15 -150¹ lpm 100 -2500 lpm
Gasses Supported ² Air, CO2, Nitrogen & Oxygen
4 Performance at minimum inlet pressure will be gas and flow range dependent. Consult Application Engineering for details.
5 Maximum pressure drop. Actual pressure drop will be gas and flow dependent. Consult Application engineering for details.
6
Product Dimensions
Dimensional drawings for additional configurations are available in the corresponding Dimensional Drawing Quick Reference Guide or
the Installation & Operation Manual.
8
Model Code
Request a Quote
14
Certifications
Applicable
Mark Agency Certification Standard Details
Class I, Div 2, Group A, B, C, D
UL Class I, Zone 2, IIC T4 UL & CSA
(Recogonized) Class II, Zone 22 Standards E73889 Vol 3, Sec 4
II 3 G Ex nA IIC T4 Gc EN60079-0:2012
ATEX EN 60079-15:2010 KEMA 04ATEX 1118X
II 3 G Ex nA IIC T4 Gc IEC 60079-0:2011
IECEx IEC 60079-15:2010 IECEx DEK 14.0072X
15-AV4BO-0641
KOSHA Ex nA IIC T4 15-AV4BO-0640
EMC Directive 2014/30/EU EN:61326-1:2013 EMC
CE Directive 2011/65/EU RoHS
ATEX/IECEx Special Conditions: please see Certification section of the SLA5800 Installation & Operation Manual
TRADEMARKS
Brooks.......................................................................Brooks Instrument, LLC
All other trademarks are the property of their respective owners.
DS-TMF-SLA5800-Series-RevB-MFC-eng/2019-12
2019
15
DATA SHEET
Mass Flow Controllers & Meters
SLAMf Series
Thermal Mass Flow
Features Benefits
IP66 rated hardened enclosure Ensures process accuracy and control in harsh conditions (equivalent to NEMA4X)
Industry-leading long-term sensor stability Increased system uptime and reduced cost of ownership by reducing maintenance and eliminating
periodic recipe adjustments and/or recalibrations
User accessible service port Simplified installation, start-up, troubleshooting and access to diagnostics provides maximum uptime
Alarms and diagnostics Ensures device is operating within user specified limits for high process yield uptime
Superior valve technology Minimum leak-by, wide turndown, fast response and superior corrosion resistant materials
reduces overall gas panel cost and increases throughput
High accuracy traceable to international standards Calibration by verified metrology systems ensures precise process gas flow control
Simple modular design Easy-to-service elastomer sealed design provides for factory or field service maximizing uptime and
reducing total cost of ownership
View SLAMf
Product Page
1
BrooksInstrument.com 1
Product Description
IP66 Rating
The SLAMf Series provides the highest rated enclosure:
IP66 Ingress Protection (equivalent to NEMA4X). These are
used to define levels of sealing effectiveness of electrical
enclosures against intrusion from foreign bodies (tools,
dirt etc.) and moisture.
• IP66 Enclosure - IP rated as "dust tight" and protected
against heavy seas or powerful jets of water.
• NEMA4X is intended mainly for outdoor use where
extra protection against moisture and wind driven rain
is required.
Broad Array of Communication Options
Traditional 0-5 Vdc and 4-20mA analog options as well as
RS485 digital communications are available (“S-protocol”,
based on HART). Control interfaces via digital network SLAMf
protocols including EtherNet/IP™, PROFINET, DeviceNet®, Series MFC
and Profibus® are also available . EtherNet/IP™ and
PROFINET are a modern, high-speed digital protocol that
permits multiple , additional diagnostics to provide MFC
users with rich, real-time system information. DeviceNet®
has been certified by the ODVA (Open DeviceNet Vendor’s
Association). EtherNET/IP™ and PROFINET are pending
industry conformance certification. Multi-gas/Multi-range capability allows your SLAMf Series
to be programmed for a variety of different gases and flow ranges
Multi-gas/Multi-range Capabilities
The SLAMf Series multi-gas and multi-range capabilities
reduce inventory. Storage and pre-programming of up to
6 gas calibrations easily permits users to switch between
different gasses and ranges on a single device.
2
Product Specifications
SLAMf Series Standard
Flow Ranges and Pressure Ratings:
Mass Flow Mass Flow Flow Ranges Maximum Operating PED Module H
Controller Meter N2 Eq. Ratings Pressure psi/bar Category
Model Model Min. F.S. Max. F.S. Standard ¹ Optional ¹
SLAMf50 SLAMf60 0.003 50 lpm 1500 psi/103 bar 4500 psi/310 bar SEP
SLAMf51 SLAMf61 15 150 lpm ² 1500 psi/103 bar ³ NA⁴ SEP
SLAMf53 SLAMf63 100 2500 lpm 1000 psi/70 bar NA 1 for all 150 lb flanges
2 for all other connections
- SLAMf64 18 2160 m3/h Flow rate dependant 1-1/2” - 100 bar
2” & 3” - 85 bar
4” & 6” - 70 bar
8” - 50 bar
1 Sanitary fittings - Model code 5A, 5B, 5C, 5D & 5E rated to 500 psi Maximum Pressure (see Table VI on page 12)
² 600 lpm of H2 possible with decreased accuracy. Greater than 40 psig inlet required for flows greater than 100 lpm N₂ equivalent
³ 1000 psi/70 bar for UL Certificate
⁴ 4500 psi/310 bar available as a special on SLAMf61 only
SLAMf50/60 SLAMf51/61 SLAMf53/63 SLAMf64
PERFORMANCE
Flow Accuracy +0.9% of S.P. (20-100% F.S.), ±0.9% of S.P. (20-100% F.S.), ±1% F.S.
(accuracy includes uncertainty +0.18% of F.S. (<20% F.S.) ±0.18% of F.S. (2-20% F.S.)
from reference standards)⁵ >1100 slpm F.S.
±1.0% of F.S.
Control Range 100:1 for F.S. from 1-50 lpm (50:1 for all other F.S. flows) N/A
Repeatability & Reproducibility 0.20% S.P. ±0.25% S.P.
Linearity Included in accuracy
Response Time (Settling Time within < 1 second < 3 seconds N/A
±2% F.S. for 0-100% command step)
Zero Stability < + 0.2% F.S. per year
Temperature Coefficient Zero: <0.05% of F.S. per °C. Span: < 0.1% of S.P. per °C
Pressure Coefficient ±0.03% per psi (0-200 psi N2)
Attitude Sensitivity <0.2% F.S. maximum deviation from specified accuracy after re-zeroing
RATINGS
` Operating Temperature Range -14 to 65oC (7 to 149oF)⁷
Minimum Pressure Differential 5 psi/0.35 bar 10 psi/0.69 bar Min.: 11.7 psi/0.81 bar at 500 lpm N/A
(Controllers) Min.: 14.5 psi/1.00 bar at 1000 lpm
Min.: 35.0 psi/2.41 bar at 2500 lpm
Maximum Pressure Differential Application specific up to 50 psi/3.45 bar 300 psi/20.0 bar N/A
(Controllers) 1500 psi/103.4 bar ⁸
Leak Integrity (external) 1x10-9 atm. cc/sec He
MECHANICAL
Valve Type Normally Closed, Normally Open, Meter N/A
Primary Wetted Materials 316L Stainless Steel, High Alloy Stainless Steel, Viton fluoroelastomers, Buna-N, Kalrez , Teflon®/Kalrez®,
® ®
and EPDM
DIAGNOSTICS
Status Lights MFC Health, Network Status
Alarms ⁶ Control Valve Output, Flow Totalizer, Network Interruption, Over Temperature, Power Surge/Sag, Service
Required
Diagnostic/Service Port RS485 via 2.5mm jack
⁶ Alarm modes are dependent on the communications interface. These are described in the corresponding digital communication interface manual.
⁷ Hazardous area certifications have a temperature range limitation of 0-65°C.
⁸ >1500 PSI DP as a Special Order
⁹ Metal and Teflon Seats are <5% of Full Scale
¹⁰ Leak-by and valve shutdown specs for normally closed valve type. 3
Product Specifications
Electrical Specifications
Communication Protocol RS485 ®
Profibus DeviceNetTM EtherNet/IPTM & PROFINET
Electrical Connection 1 x 15-pin Male Sub-D, 1 x 15-pin Male Sub-D/ 1 x M12 with 1x 5-pin M8 Male Nano
Change Connector /
(A) 1 x 9-pin Female threaded coupling nut 2x 4-pin M12 Female D
Sub-D (B) Coded Connector
Analog I/O
0-5 V, 1-5 V, 0-10 V, N/A N/A
0-20 mA, 4-20 mA
Power Max./Purge From +13.5 Vdc to From +11 Vdc to From +13.5 Vdc to
+27 Vdc +25 Vdc +27 Vdc
Power Requirements Watts, Max. Valve Orifice > 0.032”: 8 W Valve Orifice > 0.032”: 11 W
Valve Orifice > 0.032”: 10 W
Valve Orifice ≤ 0.032”: 5 W Valve Orifice ≤ 0.032”: 7 W Valve Orifice ≤ 0.032”:
7W
Without Valve: 2 W Without Valve: 4 W Without Valve:3W
The Default Network Address is
Embedded Browser Interface N/A N/A 192.168.100.1
EtherNet/IP: Default Network
Configuration is DHCP
Name is
PROFINET: The Default
FLOW INPUT (VOLTAGE) SPECIFICATIONS "sla-mfc"
Nominal Range 0-5 Vdc, 1-5 Vdc or 0-10 Vdc
Full Range (-0.5) -11 Vdc
Absolute Max. 18 V (without damage)
Input Impedence >990 kOhms
Required Max. Sink Current 0.002 mA
FLOW INPUT (CURRENT) SPECIFICATIONS
Nominal Range 4-20 mA or 0-20 mA
Full Range 0-22 mA
Absolute Max. 24 mA (without damage)
Input Impedence 100 Ohms
FLOW OUTPUT (VOLTAGE) SPECIFICATIONS
Nominal Range 0-5 Vdc, 1-5 Vdc or 0-10 Vdc
Full Range (-1)-11 Vdc
Min Load Resistance 2 kOhms
FLOW OUTPUT (CURRENT) SPECIFICATIONS
Nominal Range 0-20 mA or 4-20 mA
Full Range 0-22 mA (@ 0-20 mA); 3.8-22 mA (@ 4-20 mA)
Max. Load 380 Ohms (for supply voltage: < 16 Vdc)
ANALOG I/O ALARM OUTPUT*
Type Open Collector
Max. Closed (On) Current 25 mA
Max. Open (Off) Leakage 1µA
Max. Open (Off) Voltage 30 Vdc
ANALOG I/O VALVE OVERRIDE SIGNAL SPECIFICATIONS**
Floating/Unconnected Instrument controls valve to command set point
VOR < 0.3 Vdc Valve Closed
1 Vdc < VOR < 4 Vdc Valve Normal
VOR > 4.8 Vdc Valve Open
Input Impedence 800 kOhms
Absolute Max. Input (-25 Vdc) < VOR < 25 Vdc (without damage)
* The Alarm Output is an open collector or "contact type" that is CLOSED (on) whenever an alarm is active.
The Alarm Output may be set to indicate any one of various alarm conditions.
** The Valve Override Signal (VOR) is implemented as an analog input which measures the voltage at the input and controls the
valve based upon the measured reading as shown in this section.
4
Product Description
To serve the unique requirements of your bioprocesses, Brooks Instrument has created two SLAMf Series Biotech
options packages, built on the proven performance of the bioprocess-leading SLAMf Series MFC .
As noted in the ordering instructions, all options are combined into packages with convenient ordering codes,
eliminating the need to order options individually.
High Turndown Ratio Reduces number of MFCs needed to control wide flow ranges
Enhanced Control Valve Extremely low leak rate can eliminate need for redundant valves
Enhanced Sensor Design Clean welded construction meets industry standards for cleanliness
Pre-calibrated Multi-Gas Pages¹² Air, CO2, N2 & O2 : gas pages can be changed in situ to reduce the
variety of spare instruments kept in stock
Class VI Elastomers USP, FDA, ADI-free Class VI O-rings & Valve Seats
(Certificate Included)
¹² CO2 Actual Gas Calibration available for SLAMf50/60 & SLAMf51/61. Use Model Code U for Performance Package, and Model
Code V for Premium package.
¹³ 3.1 Material Certs for pressure boundary components available as an option on Premium Package.
5
Product Specifications
5 Performance at minimum inlet pressure will be gas and flow range dependent. Consult Applications Engineering for details.
6 Maximum pressure drop. Actual pressure drop will be gas and flow dependent. Consult Applications Engineering for details.
6
Product Dimensions
SLAMf60, Analog/RS485
SLAMf60031B
Dimensional drawings for additional configurations are available in the corresponding Dimensional DrawingQuick Reference Guide or
the Installation & Operation Manual
7
Certifications
Mark Agency Certification Applicable Standard Details
Class I, Div 2, Group A, B, C, D
UL Class I, Zone 2, IIC T4
(Recogonized) Class II, Zone 22 IP66 UL & CSA Standards E73889 Vol 3, Sec 4
Class I, Div 2, Group A, B, C, D
Class I, Zone 2, IIC T4
UL (Listed) Class II, Zone 22 IP66 UL & CSA Standards E73889 Vol 1, Sec 25
EN 60079 0 : 2012 +
II 3 G Ex nA IIC T4 Gc A11 : 2013
ATEX II 3 D Ex tc IIIC T 85 oC Dc EN 60079 15 : 2010
EN 60079 31 : 2014 KEMA 04ATEX1290 X
IP66
IEC 60079 0 : 2011 +
Ex nA IIC T4 Gc Corr. 2012 + Cor. 2013
IECEx Ex tc IIIC T 85 oC Dc IEC 60079 15 : 2010
IEC 60079 31 : 2013 IEC KEM 07.0043X
IP66
15-AV4BO-0638
Ex nA IIC T4 15-AV4BO-0639
16-AV4BO-0328X
KOSHA Ex tD A22 IP66 T85oC 16-AV4BO-0327X
CE EMC Directive 2014/30/EU EN:61326-1:2013 EMC
Directive 2011/65/EU RoHS
Note:
1). Not all certifications are available for all SLAMF specifications and configurations.
2). EtherNET/IP & PROFINET configurations are available with IP-66 rating ONLY. No other UL, ATEX, IECEx or KOSHA ratings
are available (CE is available with EtherNet/IP & PROFINET) Please contact Customer Service for details.
11
Model Code
Request a Quote
13
Model Code
Request a Quote
14
Service and Support
Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with
outstanding service and support to back it up. We operate first class repair facilities located around the world to provide
rapid response and support. Each location utilizes primary standard calibration equipment to ensure accuracy and reli-
ability for repairs and recalibration and is certified by our local Weights and Measures Authorities and traceable to the
relevant International Standards.
Visit www.BrooksInstrument.com to locate the service location nearest to you.
START-UP SERVICE AND IN-SITU CALIBRATION
Brooks Instrument can provide start-up service prior to operation when required. For some process applications, where
ISO-9001 Quality Certification is important, it is mandatory to verify and/or (re)calibrate the products periodically. In many
cases this service can be provided under in-situ conditions, and the results will be traceable to the relevant international
quality standards.
CUSTOMER SEMINARS AND TRAINING
Brooks Instrument can provide customer seminars and dedicated training to engineers, end users, and maintenance per-
sons. Please contact your nearest sales representative for more details. Due to Brooks Instrument’s commitment to continuous
improvement of our products, all specifications are subject to change without notice.
TRADEMARKS
Brooks.......................................................................Brooks Instrument, LLC
All other trademarks are the property of their respective owners.
DS-TMF-SLAMf Series-RevB-MFC-eng/2019-11
2019
15