"Silicides and local interconnections for high-performance VLSI applications."

Randy W. Mann et al. (1995)

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DOI: 10.1147/RD.394.0403

access: closed

type: Journal Article

metadata version: 2020-03-13

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Randy W. Mann, Larry A. Clevenger, Paul D. Agnello, Francis R. White:
Silicides and local interconnections for high-performance VLSI applications. IBM J. Res. Dev. 39(4): 403-418 (1995)

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